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High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE).
Wu, Rongbo; Gao, Lang; Liang, Youting; Zheng, Yong; Zhou, Junxia; Qi, Hongxin; Yin, Difeng; Wang, Min; Fang, Zhiwei; Cheng, Ya.
Afiliação
  • Wu R; State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
  • Gao L; University of Chinese Academy of Sciences, Beijing 100049, China.
  • Liang Y; State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
  • Zheng Y; University of Chinese Academy of Sciences, Beijing 100049, China.
  • Zhou J; State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
  • Qi H; XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, China.
  • Yin D; State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
  • Wang M; XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, China.
  • Fang Z; State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
  • Cheng Y; XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, China.
Micromachines (Basel) ; 13(3)2022 Feb 26.
Article em En | MEDLINE | ID: mdl-35334670
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Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article País de afiliação: China
Texto completo
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PubMed Links
Buscar no Google

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article País de afiliação: China