Graphene Microheater Chips for In Situ TEM.

Low-dimensional materials are bringing significant innovations to in situ TEM characterization. Here a new graphene microheater chip for TEM was developed by stacking graphene on a suspended SiNx membrane as the Joule heating element. It could be heated up to 800 °C within 26.31 ms with a low power consumption of 0.025 mW/1000 µm2. The bulging was only ∼50 nm at 650 °C, which is 2 orders of magnitude smaller than those of conventional MEMS heaters at similar temperatures. The performances benefit from the employment of graphene, since its monolayer structure greatly reduces the heat capacity, and the vdW contact significantly reduces the interfacial interaction. The TEM observation on the Sn melting process verifies its great potential in resolving thermodynamic processes. Moreover, more multifunctional in situ chips could be developed by integrating other stimuli to such chips. This work opens a new frontier for both graphene and in situ characterization techniques.

Reversible Thermally Driven Phase Change of Layered In2Se3 for Integrated Photonics.

Two-dimensional In2Se3, an unconventional phase-change material, has drawn considerable attention for polymorphic phase transitions and electronic device applications. However, its reversible thermally driven phase transitions and potential use in photonic devices have yet to be explored. In this study, we observe the thermally driven reversible phase transitions between α and ß' phases with the assistance of local strain from surface wrinkles and ripples, as well as reversible phase changes within the ß phase family. These transitions lead to changes in the refractive index and other optoelectronic properties with minimal optical loss at telecommunication bands, which are crucial in integrated photonic applications such as postfabrication phase trimming. Additionally, multilayer ß'-In2Se3 working as a transparent microheater proves to be a viable option for efficient thermo-optic modulation. This prototype design for layered In2Se3 offers immense potential for integrated photonics and paves the way for multilevel, nonvolatile optical memory applications.

Microheater: material, design, fabrication, temperature control, and applications-a role in COVID-19.

Heating plays a vital role in science, engineering, mining, and space, where heating can be achieved via electrical, induction, infrared, or microwave radiation. For fast switching and continuous applications, hotplate or Peltier elements can be employed. However, due to bulkiness, they are ineffective for portable applications or operation at remote locations. Miniaturization of heaters reduces power consumption and bulkiness, enhances the thermal response, and integrates with several sensors or microfluidic chips. The microheater has a thickness of ~ 100 nm to ~ 100 µm and offers a temperature range up to 1900℃ with precise control. In recent years, due to the escalating demand for flexible electronics, thin-film microheaters have emerged as an imperative research area. This review provides an overview of recent advancements in microheater as well as analyses different microheater designs, materials, fabrication, and temperature control. In addition, the applications of microheaters in gas sensing, biological, and electrical and mechanical sectors are emphasized. Moreover, the maximum temperature, voltage, power consumption, response time, and heating rate of each microheater are tabulated. Finally, we addressed the specific key considerations for designing and fabricating a microheater as well as the importance of microheater integration in COVID-19 diagnostic kits. This review thereby provides general guidelines to researchers to integrate microheater in micro-electromechanical systems (MEMS), which may pave the way for developing rapid and large-scale SARS-CoV-2 diagnostic kits in resource-constrained clinical or home-based environments.

Microheater-integrated zinc oxide nanowire microfluidic device for hybridization-based detection of target single-stranded DNA.

Detection of cell-free DNA (cfDNA) has an impact on DNA analysis in liquid biopsies. However, current strategies to detect cfDNA have limitations that should be overcome, such as having low sensitivity and requiring much time and a specialized instrument. Thus, non-invasive and rapid detection tools are needed for disease prevention and early-stage treatment. Here we developed a device having a microheater integrated with zinc oxide nanowires (microheater-ZnO-NWs) to detect target single-stranded DNAs (ssDNAs) based on DNA probe hybridization. We confirmed experimentally that our device realizedin-situannealed DNA probes by which we subsequently detected target ssDNAs. We envision that this device can be utilized for fundamental studies related to nanobiodevice-based DNA detection.

Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor.

Based on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a flexible polyimide film. The thermistors were connected to a Wheatstone bridge circuit, and the resistance difference between the thermistors resulting from the generation of a flow was converted into an output voltage signal using LabVIEW software. A mini tube flow test was conducted to demonstrate the sensor's detection of fluid velocity in gas and liquid flows. A good correlation was found between the experimental results and the simulation data. However, the results for the gas and liquid flows differed in that for gas, the output voltage increased with the fluid's velocity and decreased against the liquid's flow velocity. This study's MEMS-based flexible microthermal flow sensor achieved a resolution of 1.1 cm/s in a liquid flow and 0.64 cm/s in a gas flow, respectively, within a fluid flow velocity range of 0-40 cm/s. The sensor is suitable for many applications; however, with some adaptations to its electrical packaging, it will be particularly suitable for detecting biosignals in healthcare applications, including measuring respiration and body fluids.

Microheater Actuators as a Versatile Platform for Strain Engineering in 2D Materials.

We present microfabricated thermal actuators to engineer the biaxial strain in two-dimensional (2D) materials. These actuators are based on microheater circuits patterned onto the surface of a polymer with a high thermal expansion coefficient. By running current through the microheater one can vary the temperature of the polymer and induce a controlled biaxial expansion of its surface. This controlled biaxial expansion can be transduced to biaxial strain to 2D materials, placed onto the polymer surface, which in turn induces a shift of the optical spectrum. Our thermal strain actuators can reach a maximum biaxial strain of 0.64%, and they can be modulated at frequencies up to 8 Hz. The compact geometry of these actuators results in a negligible spatial drift of 0.03 µm/°C, which facilitates their integration in optical spectroscopy measurements. We illustrate the potential of this strain engineering platform to fabricate a strain-actuated optical modulator with single-layer MoS2.

A High-Efficiency Driver Circuit for a Gas-Sensor Microheater Based on a Switch-Mode DC-to-DC Converter.

Low power consumption is one of the critical factors for successful Internet of Things (IoT) applications. In such applications, gas sensors have become a main source of power consumption because energy conversion efficiency of the microheater is relative over a wide range of operating temperatures. To improve the energy-conversion efficiency of gas-sensor microheaters, this paper proposes integrated switch-mode DC-to-DC power converter technology which we compare with traditional driving methods such as pulse-width modulation and the linear mode. The results indicate that energy conversion efficiency with this proposed method remains over 90% from 150 °C to 400 °C when using a 3.0, 4.2 and 5.0 V power supply. Energy-conversion efficiency increases by 1-74% compared with results obtained using the traditional driving methods, and the sensing film still detects alcohol and toluene at 200 °C and 280 °C, respectively, with high energy conversion efficiency. These results show that the proposed method is useful and should be further developed to drive gas-sensor microheaters, and then integrated into the circuits of the complementary metal-oxide-semiconductor micro electro mechanical systems (CMOS-MEMS).

Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon Nanotubes for Gas Sensing.

Carbon nanotubes (CNTs) can be grown locally on custom-designed CMOS microstructures to use them as a sensing material for manufacturing low-cost gas sensors, where CMOS readout circuits are directly integrated. Such a local CNT synthesis process using thermal chemical vapor deposition (CVD) requires temperatures near 900 °C, which is destructive for CMOS circuits. Therefore, it is necessary to ensure a high thermal gradient around the CNT growth structures to maintain CMOS-compatible temperature (below 300 °C) on the bulk part of the chip, where readout circuits are placed. This paper presents several promising designs of CNT growth microstructures and their thermomechanical analyses (by ANSYS Multiphysics software) to check the feasibility of local CNT synthesis in CMOS. Standard CMOS processes have several conductive interconnecting metal and polysilicon layers, both being suitable to serve as microheaters for local resistive heating to achieve the CNT growth temperature. Most of these microheaters need to be partially or fully suspended to produce the required thermal isolation for CMOS compatibility. Necessary CMOS post-processing steps to realize CNT growth structures are discussed. Layout designs of the microstructures, along with some of the microstructures fabricated in a standard AMS 350 nm CMOS process, are also presented in this paper.

Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices.

Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and characterized in terms of their sensing capability and the thermo-mechanical behavior of the micro-hotplate. The sensors demonstrate high sensitivity at low concentrations of volatile organic compounds (VOCs) at a low power consumption of 10.5 mW. In addition, the sensors realize fast response and recovery times of 20 s and 2.3 min, respectively. To further improve the baseline stability and sensing response characteristics at low power consumption, a novel sensor is conceived of and proposed. Tantalum aluminum (TaAl) is used as a microheater, whereas Pt-doped SnO2 is used as a thin film sensing layer. Both layers were deposited on top of a porous silicon nitride membrane. In this paper, two designs are characterized by simulations and experimental measurements, and the results are comparatively reported. Simultaneously, the impact of a heat pulsing mode and rubber smartphone cases on the sensing performance of the gas sensor are highlighted.

Digital microfluidic immobilized cytochrome P450 reactors with integrated inkjet-printed microheaters for droplet-based drug metabolism research.

We report the development and characterization of digital microfluidic (DMF) immobilized enzyme reactors (IMERs) for studying cytochrome P450 (CYP)-mediated drug metabolism on droplet scale. The on-chip IMERs consist of porous polymer (thiol-ene) monolith plugs prepared in situ by photopolymerization and functionalized with recombinant CYP1A1 isoforms (an important detoxification route for many drugs and other xenobiotics). The DMF devices also incorporate inexpensive, inkjet-printed microheaters for on-demand regio-specific heating of the IMERs to physiological temperature, which is crucial for maintaining the activity of the temperature-sensitive CYP reaction. For on-chip monitoring of the CYP activity, the DMF devices were combined with a commercial well-plate reader, and a custom fluorescence quantification method was developed for detection of the chosen CYP1A1 model activity (ethoxyresorufin-O-deethylation). The reproducibility of the developed assay was examined with the help of ten parallel CYP-IMERs. All CYP-IMERs provided statistically significant difference (in fluorescence response) compared to any of the negative controls (including room-temperature reactions). The average (n = 10) turnover rate was 20.3 ± 9.0 fmol resorufin per minute. Via parallelization, the concept of the droplet-based CYP-IMER developed in this study provides a viable approach to rapid and low-cost prediction of the metabolic clearance of new chemical entities in vitro.

Self-Test Procedures for Gas Sensors Embedded in Microreactor Systems.

Metal oxide (MOX) gas sensors sensitively respond to a wide variety of combustible, explosive and poisonous gases. However, due to the lack of a built-in self-test capability, MOX gas sensors have not yet been able to penetrate safety-critical applications. In the present work we report on gas sensing experiments performed on MOX gas sensors embedded in ceramic micro-reaction chambers. With the help of an external micro-pump, such systems can be operated in a periodic manner alternating between flow and no-flow conditions, thus allowing repetitive measurements of the sensor resistances under clean air, R 0 , and under gas exposure, R g a s , to be obtained, even under field conditions. With these pairs of resistance values, eventual drifts in the sensor baseline resistance can be detected and drift-corrected values of the relative resistance response R e s p = ( R 0 - R g a s ) / R 0 can be determined. Residual poisoning-induced changes in the relative resistance response can be detected by reference to humidity measurements taken with room-temperature-operated capacitive humidity sensors which are insensitive to the poisoning processes operative on heated MOX gas sensors.

New Digital Metal-Oxide (MOx) Sensor Platform.

The application of metal oxide gas sensors in Internet of Things (IoT) devices and mobile platforms like wearables and mobile phones offers new opportunities for sensing applications. Metal-oxide (MOx) sensors are promising candidates for such applications, thanks to the scientific progresses achieved in recent years. For the widespread application of MOx sensors, viable commercial offerings are required. In this publication, the authors show that with the new Sensirion Gas Platform (SGP) a milestone in the commercial application of MOx technology has been reached. The architecture of the new platform and its performance in selected applications are presented.

A Light-Activated Microheater for the Remote Control of Enzymatic Catalysis.

The remote control of enzymatic catalysis is of significant importance in disease treatment and industrial applications. Herein, we designed a microheater composed of a porous polylactic acid (PLA) matrix and polydopamine (PDA) with notable photothermal conversion capability. Starch hydrolysis, catalyzed by using α-amylase, was accelerated in the presence of the microheater under illumination with near-infrared light or natural sunlight at room temperature. Additionally, the methodology was extended to the preparation of microwave-absorbing materials with the deposition of polyaniline on porous PLA matrix. The porous morphology improves the energy-conversion efficiency.

Development of a Microheater with a Large Heating Area and Low Thermal Stress in the Heating Area.

In this paper, a microheater that can absorb thermal stress and has a large heating area is demonstrated by optimizing the structure and process of the microheater. Four symmetrically distributed elongated support beam structures were machined around the microheater via deep silicon etching. This design efficiently mitigates the deformation of the heated region caused by thermal expansion and enhances the structural stability of the microheater. The updated microheater no longer converts the work area into a thin film; instead, it creates a stable heating platform that can uniformly heat a work area measuring 10 × 10 mm2. The microheater is verified to have high temperature uniformity and structural stability in finite element simulation. Finally, thorough investigations of electrical-thermal-structural characterization were conducted. The test findings show that the new microheater can achieve 350 °C with a power consumption of 6 W and a thermal reaction time of 22 s. A scan of its whole plane reveals that the surface of the working area of the new microheater is flat and does not distort in response to variations in temperature, offering good structural stability.

Microheater Chips with Carbon Nanotube Resistors.

The specific and excellent properties of the low-dimensional nanomaterials have made them promising building blocks to be integrated into microelectromechanical systems with high performances. Here, we present a new microheater chip for in situ TEM, in which a cross-stacked superaligned carbon nanotube (CNT) film resistor is located on a suspended SiNx membrane via van der Waals (vdW) interactions. The CNT microheater has a fast high-temperature response and low power consumption, thanks to the micro/nanostructure of the CNT materials. Moreover, the membrane bulging amplitude is significantly reduced to only ∼100 nm at 800 °C for the vdW interaction between the CNTs and the SiNx membrane. An in situ observation of the Sn melting process is successfully conducted with the assistance of a customized flexible temperature control system. The uniform wafer-scaled CNT films enable a high level of consistency and cost-effective mass production of such chips. The as-developed in situ chips, as well as the related techniques, hold great promise in nanoscience, materials science, and electrochemistry.

Effect of Deposition Pressure and Temperature on Tungsten Thin-Film Heater for Phase-Change Switch Applications.

Tungsten (W) film is increasingly utilized in various microheater applications due to its numerous advantages. These advantages include a high melting point, positive constant temperature coefficient of resistance (TCR), good mechanical stability, and compatibility with semiconductor processes. In this paper, deposition parameters for enhancing the properties of W film were investigated, and an optimized microheater was fabricated. It was found that the deposition temperature and pressure can modify the TCR to be negative or positive and the crystalline phase of W films to be alpha phases or mixed with beta phases. A W film deposited under 650 °C with a pressure of 1 pa has a positive TCR and pure alpha phase crystalline structure. We applied this optimized W film as a microheater in an RF phase-change switch (RFPCS), and the maximum voltage of the optimized W microheater increased by at least 48% in this work. By optimizing the microheater, the phase-change switch can be successfully actuated in both on and off states, demonstrated by the Raman results of the phase-change material. A voltage pulse of 20 V/200 ns was enough to turn the switch off with MΩ, and 11 V/3 µs could turn the switch on with 138 Ω. The optimized microheater and device can cycle 500 times without failure. The insertion loss and isolation of the device at 20 GHz was 1.0 dB and 22 dB.

Microheater-Integrated Microlens Array for Robust Rapid Fog Removal.

In extreme environments, fog formation on a microlens array (MLA) surface results in a device failure. One reliable solution for fog removal is to heat the surface using a microheater. However, due to the surface interference, the combination of these two microdevices remains elusive. In this study, we introduce lift-off and electroless plating into femtosecond laser processing to fabricate a microheater integrated MLA (µH-MLA) on the same substrate with high light transmittance, durability, and fog removal efficiency. Laser-induced micro-nano grooves enable the microheater to be tightly coupled with the MLA and have high heating performance, thus maintaining a stable performance for over 24 h during continuous operation as well as under long time ultrasonic vibration and mechanical friction. With a rapid response time (τ0.5) of 17 s and a high working temperature of 188 °C, the µH-MLA removed fog that covers the entire face within 14 s. Finally, we prove the use of this fabrication method in large areas and curved surface environments. This study provides a flexible, stable, and economical method to integrate micro-optical and microelectrical devices.

A Novel Flexible Liquid Metal Microheater with a Textured Structure.

In this paper, we propose a novel liquid metal microheater utilizing a textured structure. This microheater effectively solves the problem of the liquid metal in the PDMS flow channel fracturing at a certain temperature and significantly increases the maximum operating temperature that can be achieved by the current liquid metal microheater. Experimental results demonstrate that this new structured microheater can achieve a maximum operating temperature exceeding 300 °C. To explain the performance improvement and the reasons behind liquid metal fracture, corresponding experiments were conducted, and explanations were provided based on the experimental results. Subsequently, we verified the mechanical flexibility of the microheater and found that it exhibits excellent tensile and bending resistance. Finally, utilizing its good mechanical flexibility, the microheater was successfully attached to the side wall of a cup, resulting in the boiling of water.

A Thermopile-Based Gas Flow Sensor with High Sensitivity for Noninvasive Respiration Monitoring.

In this work, a N/P polySi thermopile-based gas flow device is presented, in which a microheater distributed in a comb-shaped structure is embedded around hot junctions of thermocouples. The unique design of the thermopile and the microheater effectively enhances performance of the gas flow sensor leading to a high sensitivity (around 6.6 µV/(sccm)/mW, without amplification), fast response (around 35 ms), high accuracy (around 0.95%), and mood long-term stability. In addition, the sensor has the advantages of easy production and compact size. With such characteristics, the sensor is further used in real-time respiration monitoring. It allows detailed and convenient collection of respiration rhythm waveform with sufficient resolution. Information such as respiration periods and amplitudes can be further extracted to predict and alert of potential apnea and other abnormal status. It is expected that such a novel sensor could provide a new approach for respiration monitoring related noninvasive healthcare systems in the future.

A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles.

The response time is an important parameter for thermopiles sensors, which reflects the response speed of the device. The accurate measurement of response time is extremely important to evaluate device characteristics for using them in suitable scenarios. In this work, to accurately measure the response time of thermopile sensors, an Al microheater is integrated in a MEMS thermopile as an in situ heat source. Compared with the traditional chopper measurement method for response time, this approach avoids mechanical delay induced by chopper blades. Accordingly, based on this approach, the response time of the device is measured to be 6.9 ms, while that is 12.7 ms when a chopping system is used, demonstrating that an error of at least 5.8 ms is avoided. Such an approach is quite simple to realize and provides a novel route to accurately measure the response time.