RESUMO
A wafer-thin chip-scale portable spectrometer suitable for wearable applications based on a reconstructive algorithm was demonstrated. A total of 16 spectral encoders that simultaneously functioned as photodetectors were monolithically integrated on a chip area of 0.16 mm2 by applying local strain engineering in compressively strained InGaN/GaN multiple quantum well heterostructures. The built-in GaN pn junction enabled a direct photocurrent measurement. A non-negative least-squares (NNLS) algorithm with total-variation regularization and a choice of a proper kernel function was shown to deliver a decent spectral reconstruction performance in the wavelength range of 400-645 nm. The accuracies of spectral peak positions and intensity ratios between peaks were found to be 0.97% and 10.4%, respectively. No external optics, such as collimation optics and apertures, were used, enabled by angle-insensitive light-harvesting structures, including an array of cone-shaped backreflectors fabricated on the underside of the sapphire substrate.
Assuntos
Gálio , Gálio/química , Semicondutores , Iluminação , Análise de Falha de Equipamento , Desenho de Equipamento , Óxido de Alumínio/químicaRESUMO
An LED chip containing monolithically integrated red, green, and blue channels was fabricated and characterized. Using local strain engineering in gallium nitride p-i-n nanopillar structures, each color channel emits a distinct color with emission wavelength determined entirely by the diameter of the nanopillar. The crosstalk between color channels is negligible. As a result, individually addressable color channels can be integrated on the same substrate which will be suitable for color-tunable lighting applications. Optical and electrical properties were measured and discussed. Fabrication challenges which degraded power efficiency of the shorter-wavelength channel were analyzed. Potential strategies for improvements were proposed.
RESUMO
A semiconductor spectrometer chip with a monolithically integrated light-emitting diode was demonstrated. The spectrometer design was based on a computational reconstruction algorithm and a series of absorptive spectral filters directly built in to the photodetectors' active regions. The result is the elimination of the need to employ external optics to control the incident angle of light. In the demonstration, an array of gallium nitride (GaN) based photodetectors with wavelength selectivity generated via the principle of local strain engineering were designed and fabricated. Additionally, a GaN based LED was monolithically integrated. An optical blocking structure was used to suppress the LED-photodetector interference and was shown to be essential for the spectroscopic functionality. A proof of concept using a reflection spectroscopy configuration was experimentally conducted to validate the feasibly of simultaneously operating the LED excitation light source and the photodetectors. Spectral reconstruction using a non-negative least squares (NNLS) algorithm enhanced with orthogonal matching pursuit was shown to reconstruct the signal from the reflection spectroscopy. Optics-free operation was also demonstrated.
RESUMO
In this paper, a spectrometer design enabling an ultrathin form factor is proposed. Local strain engineering in group III-nitride semiconductor nanostructured light-absorbing elements enables the integration of a large number of photodetectors on the chip exhibiting different absorption cut-off wavelengths. The introduction of a simple cone-shaped back-reflector at the bottom side of the substrate enables a high light-harvesting efficiency design, which also improves the accuracy of spectral reconstruction. The cone-shaped back-reflector can be readily fabricated using mature patterned sapphire substrate processes. Our design was validated via numerical simulations with experimentally measured photodetector responsivities as the input. A light-harvesting efficiency as high as 60% was achieved with five InGaN/GaN multiple quantum wells for the visible wavelengths.