Biomimetic Electronic Skin for Robots Aiming at Superior Dynamic-Static Perception and Material Cognition Based on Triboelectric-Piezoresistive Effects.

Empowering robots with tactile perception and even thinking as well as judgment capabilities similar to those of humans is an inevitable path for the development of future robots. Here, we propose a biomimetic electronic skin (BES) that truly serves and applies to robots to achieve superior dynamic-static perception and material cognition functionalities. First, the microstructured triboelectric and piezoresistive layers are fabricated by a facile template method followed by selected self-polymerization treatment, enabling BES with high sensitivity and a wide detection range. Further, through laminated-independent triboelectric and piezoresistive parts for perceiving dynamic and static pressures simultaneously, the BES is capable of supporting the robot hand to monitor the entire process during object grasping. Most importantly, by further combining a neural network model, an intelligent cognition system is constructed for real-time cognition of the object material species via one touch of the robot hand under arbitrary pressures, which goes beyond the human cognition ability.

Heterogeneous Integration of Memristive and Piezoresistive MDMO-PPV-Based Copolymers in Nociceptive Transmission with Fast and Slow Pain for an Artificial Pain-Perceptual System.

Nociceptive pain perception is a remarkable capability of organisms to be aware of environmental changes and avoid injury, which can be accomplished by specialized pain receptors known as nociceptors with 4 vital properties including threshold, no adaptation, relaxation, and sensitization. Bioinspired systems designed using artificial devices are investigated to imitate the efficacy and functionality of nociceptive transmission. Here, an artificial pain-perceptual system (APPS) with a homogeneous material and heterogeneous integration is proposed to emulate the behavior of fast and slow pain in nociceptive transmission. Retention-differentiated poly[2-methoxy-5-(3,7-dimethyoctyoxyl)-1,4-phenylenevinylene] (MDMO-PPV) memristors with film thicknesses of 160 and 80 nm are manufactured and adopted as A-δ and C nerve fibers of nociceptor conduits, respectively. Additionally, a nociceptor mimic, the ruthenium nanoparticles (Ru-NPs)-doped MDMO-PPV piezoresistive pressure sensor, is fabricated with a noxiously stimulated threshold of 150 kPa. Under the application of pricking and dull noxious stimuli, the current flows predominantly through the memristor to mimic the behavior of fast and slow pain, respectively, in nociceptive transmission with postsynaptic potentiation properties, which is analogous to biological pain perception. The proposed APPS can provide potential advancements in establishing the nervous system, thus enabling the successful development of next-generation neurorobotics, neuroprosthetics, and precision medicine.

Chemical-Physical Synergistic Assembly of MXene/CNT Nanocoatings in Silicone Foams for Reliable Piezoresistive Sensing in Harsh Environments.

Owing to their high sensitivity across a wide stress range, mechanical reliability, and rapid response time, flexible polymer foam piezoresistive sensors have been extensively used in various fields. The reliable application of these sensors under harsh environments, however, is severely limited by structural devastation and poor interfacial bonding between polymers and conductive nanoparticles. To address the above issues, robust MXene/CNT nanocoatings on the foam surface, where the chemical assembly of MXene nanosheets and the physical anchoring of CNTs lead to strong interfacial bonding, are designed and described, which endows foams with structural reliability and unexpected multi-functionalities without compromising their instinct properties. The optimized foam nanocomposites thus maintain outstanding wide-temperature flexibility (-60-210 °C) and elasticity (≈3% residual strain after 1000 cycles). Moreover, the nanocomposites display good sensitivity at a relatively wide stress range of 0-70% and remarkable stability under acidic and alkaline settings. Furthermore, the foams with exceptional fire resistance (UL-94 V-0 rating) can provide stable sensing behavior (over 300 cycles) even after being exposed to flames for 5 s, making them one of the most reliable sensing materials so far. Clearly, this work widens applications of flexible piezoresistive sensors based on silicone foam nanocomposites for various harsh environments.

Synthesis of Superelastic, Highly Conductive Graphene Aerogel/Liquid Metal Foam and its Piezoresistive Application.

Graphene aerogel (GA) has important application potential as piezoresistive sensors due to its low density, high conductivity, high porosity, and good mechanical properties. However, the fabrication of GA-based sensors with good mechanical properties and excellent sensing performance is still challenging. Herein, liquid- metal-modified GAs (GA/LM) are proposed for the development of an excellent GA-based sensor. GA/LM with three-dimensional interconnected layered structure exhibits excellent compressive stress of 41 KPa and fast response time (<20 ms). While generally flexible GA composites cannot be compressed beyond 80 % strain without plastic deformation, GA/LM demonstrates a high compressive strength of 60 kPa under a strain of 90 %. A real-time pressure sensor was fabricated based on GA/LM-2 to monitor swallowing, pulse beating, finger, wrist and knee bending, and even plantar pressure during walking. These excellent features enable potential applications in health detection.

Silver nanowires/waterborne polyurethane composite film based piezoresistive pressure sensor for ultrasensitive human motion monitoring.

Flexible piezoresistive pressure sensors are gaining significant attention, particularly in the realm of flexible wearable electronic skin. Here, a flexible piezoresistive pressure sensor was developed with a broad sensing range and high sensitivity. We achieved this by curing polydimethylsiloxane (PDMS) on sandpaper, creating a PDMS film as the template with a micro-protrusion structure. The core sensing layer was formed using a composite of silver nanowires (AgNWs) and waterborne polyurethane (WPU) with a similar micro-protrusion structure. The sensor stands out with its exceptional sensitivity, showing a value of 1.04 × 106kPa-1with a wide linear range from 0 to 27 kPa. It also boasts a swift response and recovery time of 160 ms, coupled with a low detection threshold of 17 Pa. Even after undergoing more than 1000 cycles, the sensor continues to deliver stable performance. The flexible piezoresistive pressure sensor based on AgNWs/WPU composite film (AWCF) can detect small pressure changes such as pulse, swallowing, etc, which indicates that the sensor has great application potential in monitoring human movement and flexible wearable electronic skin.

Differential pressure sensors based on transfer-free piezoresistive layered PdSe2thin films.

Piezoresistive layered two-dimensional (2D) crystals offer intriguing promise as pressure sensors for microelectromechanical systems (MEMS) due to their remarkable strain-induced conductivity modulation. However, integration of the conventional chemical vapor deposition grown 2D thin films onto a micromachined silicon platform requires a complex transfer process, which degrades their strain-sensing performance. In this study, we present a differential pressure sensor built on a transfer-free piezoresistive PdSe2polycrystalline film deposited on a SiNxmembrane by plasma-enhanced selenization of a metal film at a temperature as low as 200 °C. Based on the resistance change and finite element strain analysis of the film under membrane deflection, we show that a 7.9 nm thick PdSe2film has a gauge factor (GF) of -43.3, which is ten times larger than that of polycrystalline silicon. The large GF enables the development of a diaphragm pressure sensor with a high sensitivity of 3.9 × 10-4kPa-1within the differential pressure range of 0-60 kPa. In addition, the sensor with a Wheatstone bridge circuit achieves a high voltage sensitivity of 1.04 mV·kPa-1, a rapid response time of less than 97 ms, and small output voltage variation of 8.1 mV in the temperature range of 25 °C to 55 °C. This transfer-free and low-temperature grown PdSe2piezoresistive thin film is promising for MEMS transducer devices.

Toward High-Performance Piezoresistive Polymer Derived SiOC Ceramics through Masked Stereolithography 3D Printing with ß-Silicon Carbide Nanopowder Reinforcement.

Enhancing the piezoresistivity of polymer-derived silicon oxycarbide ceramics (SiOCPDC ) is of great interest in the advancement of highly sensitive pressure/load sensor technology for use in harsh and extreme working conditions. However, a facile, low cost, and scalable approach to fabricate highly piezoresistive SiOCPDC below 1400 °C still remains a great challenge. Here, the fabrication and enhancement of piezoresistive properties of SiOCPDC reinforced with ß-SiC nanopowders (SiCNP ) through masked stereolithography-based 3D-printing and subsequent pyrolysis at 1100 °C are demonstrated. The presence of free carbon in SiCNP augments high piezoresistivity in the fabricated SiCNP -SiOCPDC composites even at lower pyrolysis temperatures. A gauge factor (GF) in the range of 4385-5630 and 6129-8987 with 0.25 and 0.50 wt% of SiCNP , respectively is demonstrated, for an applied pressure range of 0.5-5 MPa at ambient working conditions. The reported GF is significantly higher compared to those of any existing SiOCPDC materials. This rapid and facile fabrication route with significantly enhanced piezoresistive properties makes the 3D-printed SiCNP -SiOCPDC composite a promising high-performance material for the detection of pressure/load in demanding applications. Also, the overall robustness in mechanical properties and load-bearing capability ensures its long-term stability and makes it suitable for challenging and severe environment applications.

Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode.

A MEMS piezoresistive sensor for measuring accelerations greater than 100,000 g (about 106 m/s2) is described in this work. To enhance the performance of the sensor, specifically widening its measurement range and natural frequency, a cross-beam construction with a center block was devised, and a Wheatstone bridge was formed by placing four piezoresistors at the ends of the fixed beams to convert acceleration into electricity. The location of the varistor was determined using the finite element approach, which yielded the optimal sensitivity. Additionally, a reliable Pt-Ti-Pt-Au electrode was designed to solve the issue of the electrode failing under high impact and enhancing the stability of the ohmic contact. The accelerometer was fabricated using MEMS technology, and the experiment with a Hopkinson pressure bar and hammering was conducted, and the bias stability was measured. It had a sensitivity of 1.06 µV/g with good linearity. The simulated natural frequency was 633 kHz The test result revealed that the accelerometer can successfully measure an acceleration of 100,000 g.

Ceramic Stress Sensor Based on Thick Film Piezo-Resistive Ink for Structural Applications.

This paper presents a ceramic stress sensor with the dimension of a coin, able to measure the compressive force (stress) applied to its two round faces. The sensor is designed and engineered to be embedded inside concrete or masonry structures, like bridges or buildings. It provides good accuracy, robustness, and simplicity of use at potentially low cost for large-scale applications in civil structures. Moreover, it can be calibrated temperature compensated, and it is inherently hermetic, ensuring the protection of sensitive elements from the external environment. It is, therefore, suitable for operating in harsh and dirty environments like civil constructions. The sensor directly measures the internal stress of the structure, exploiting the piezo resistivity of thick film ink based on ruthenium oxide. It is insensitive with respect to the stiffness of the embedding material and the variation of the surrounding material properties like concrete hardening, shrinkage, and creep as it decouples the two components of stress.

Performance of Self-Sensing Cement-Stabilized Sand under Various Loading Conditions.

Numerous elements, such as the composition and characteristics of carbon nanomaterials, the composition and characteristics of the matrix material, moisture levels, temperature, and loading circumstances, influence the piezoresistive behavior of self-sensing cementitious composites. While some past research has explored the impact of some of these factors on the performance of self-sensing cementitious composites, additional investigations need to be conducted to delve into how loading conditions affect the sensitivity of self-sensing cement-stabilized composites. Therefore, this study explores the influences of various loading conditions (i.e., location of loading regarding the location of recording electrodes, and loading level) on the electromechanical performance of self-sensing cement-stabilized sand. To this end, firstly, the evaluation of the percolation threshold based on 10% cement-stabilized sand specimens containing various multiwall carbon nanotubes (MWCNTs) and graphene nanoplatelets (GNPs) was performed. Then, 10% cement-stabilized sand containing 4% MWCNTs/GNPs was tested under various cyclic compressive stresses. The results suggested that the distance between the loading area and the electrode location used for recording the electrical resistance significantly impacted the sensitivity of cement-stabilized sand. Optimal sensitivity was achieved when the electrodes were positioned directly beneath the loading area. Moreover, the study showed that the stress sensitivity of self-sensing cement-stabilized sand increased proportionally with the stress level. An examination through scanning electron microscopy (SEM) demonstrated that the loading condition influences the bridging characteristics of carbon nanomaterials in cement-stabilized sand, leading to diverse electromechanical behaviors emerging based on the loading condition. This study underscores the importance of considering specific parameters when designing self-sensing cement-stabilized sand for application in practical field use.

A Piezoresistive-Sensor Nonlinearity Correction on-Chip Method with Highly Robust Class-AB Driving Capability.

This paper presents a thorough robust Class-AB power amplifier design and its application in pressure-mode sensor-on-chip nonlinearity correction. Considering its use in piezoresistive sensing applications, a gain-boosting-aided folded cascode structure is utilized to increase the amplifier's gain by a large amount as well as enhancing the power rejection ability, and a push-pull structure with miller compensation, a floating gate technique, and an adaptive output driving limiting structures are adopted to achieve high-efficiency current driving capability, high stability, and electronic environmental compatibility. This amplifier is applied in a real sensor nonlinearity correction on-chip system. With the help of a self-designed 7-bit + sign DAC and a self-designed two-stage operational amplifier, this system is compatible with nonlinear correction at different signal conditioning output values. It can also drive resistive sensors as small as 300 ohms and as high as tens of thousands of ohms. The designed two-stage operational amplifier utilizes the TSMC 0.18 um process, resulting in a final circuit power consumption of 0.183 mW. The amplifier exhibits a gain greater than 140 dB, a phase margin of 68°, and a unit gain bandwidth exceeding 199.76 kHz. The output voltage range spans from 0 to 4.6 V. The final simulation results indicate that the nonlinear correction system designed in this paper can correct piezoresistive sensors with a nonlinearity of up to ±2.5% under various PVT (Process-Voltage-Temperature) conditions. After calibration by this system, the maximum error in the output voltage is 4 mV, effectively reducing the nonlinearity to 4% of its original value in the worst-case scenario.

Temperature Compensation Method Based on Bilinear Interpolation for Downhole High-Temperature Pressure Sensors.

Due to their high accuracy, excellent stability, minor size, and low cost, silicon piezoresistive pressure sensors are used to monitor downhole pressure under high-temperature, high-pressure conditions. However, due to silicon's temperature sensitivity, high and very varied downhole temperatures cause a significant bias in pressure measurement by the pressure sensor. The temperature coefficients differ from manufacturer to manufacturer and even vary from batch to batch within the same manufacturer. To ensure high accuracy and long-term stability for downhole pressure monitoring at high temperatures, this study proposes a temperature compensation method based on bilinear interpolation for piezoresistive pressure sensors under downhole high-temperature and high-pressure environments. A number of calibrations were performed with high-temperature co-calibration equipment to obtain the individual temperature characteristics of each sensor. Through the calibration, it was found that the output of the tested pressure measurement system is positively linear with pressure at the same temperatures and nearly negatively linear with temperature at the same pressures, which serves as the bias correction for the subsequent bilinear interpolation temperature compensation method. Based on this result, after least squares fitting and interpolating, a bilinear interpolation approach was introduced to compensate for temperature-induced pressure bias, which is easier to implement in a microcontroller (MCU). The test results show that the proposed method significantly improves the overall measurement accuracy of the tested sensor from 21.2% F.S. to 0.1% F.S. In addition, it reduces the MCU computational complexity of the compensation model, meeting the high accuracy demand for downhole pressure monitoring at high temperatures and pressures.

Temperature Compensation Method for Piezoresistive Pressure Sensors Based on Gated Recurrent Unit.

Piezoresistive pressure sensors have broad applications but often face accuracy challenges due to temperature-induced drift. Traditional compensation methods based on discrete data, such as polynomial interpolation, support vector machine (SVM), and artificial neural network (ANN), overlook the thermal hysteresis, resulting in lower accuracy. Considering the sequence-dependent nature of temperature drift, we propose the RF-IWOA-GRU temperature compensation model. Random forest (RF) is used to interpolate missing values in continuous data. A combination of gated recurrent unit (GRU) networks and an improved whale optimization algorithm (IWOA) is employed for temperature compensation. This model leverages the memory capability of GRU and the optimization efficiency of the IWOA to enhance the accuracy and stability of the pressure sensors. To validate the compensation method, experiments were designed under continuous variations in temperature and actual pressure. The experimental results show that the compensation capability of the proposed RF-IWOA-GRU model significantly outperforms that of traditional methods. After compensation, the standard deviation of pressure decreased from 10.18 kPa to 1.14 kPa, and the mean absolute error and root mean squared error were reduced by 75.10% and 76.15%, respectively.

A Simple Method to Manufacture a Force Sensor Array Based on a Single-Material 3D-Printed Piezoresistive Foam and Metal Coating.

Nowadays, 3D printing is becoming an increasingly common option for the manufacturing of sensors, primarily due to its capacity to produce intricate geometric shapes. However, a significant challenge persists in integrating multiple materials during printing, for various reasons. In this study, we propose a straightforward approach that combines 3D printing with metal coating to create an array of resistive force sensors from a single material. The core concept involves printing a sensing element using a conductive material and subsequently separating it into distinct parts using metal-coated lines connected to the electrical ground. This post-printing separation process involves manual intervention utilizing a stencil and metallic spray. The primary obstacle lies in establishing a sufficient contact surface between the sprayed metal and the structure, to ensure effective isolation among different zones. To address this challenge, we suggest employing a lattice structure to augment the contact surface area. Through experimental validation, we demonstrate the feasibility of fabricating two sensing elements from a single-material 3D-printed structure, with a maximum electrical isolation ratio between the sensors of above 30. These findings hold promise for the development of a new generation of low-tech 3D-printed force/displacement sensor arrays.

A Tutorial on Mechanical Sensors in the 70th Anniversary of the Piezoresistive Effect.

An outstanding event related to the understanding of the physics of mechanical sensors occurred and was announced in 1954, exactly seventy years ago. This event was the discovery of the piezoresistive effect, which led to the development of semiconductor strain gauges with a sensitivity much higher than that obtained before in conventional metallic strain gauges. In turn, this motivated the subsequent development of the earliest micromachined silicon devices and the corresponding MEMS devices. The science and technology related to sensors has experienced noteworthy advances in the last decades, but the piezoresistive effect is still the main physical phenomenon behind many mechanical sensors, both commercial and in research models. On this 70th anniversary, this tutorial aims to explain the operating principle, subtypes, input-output characteristics, and limitations of the three main types of mechanical sensor: strain gauges, capacitive sensors, and piezoelectric sensors. These three sensor technologies are also compared with each other, highlighting the main advantages and disadvantages of each one.

Piezoresistive Porous Composites with Triply Periodic Minimal Surface Structures Prepared by Self-Resistance Electric Heating and 3D Printing.

Three-dimensional flexible piezoresistive porous sensors are of interest in health diagnosis and wearable devices. In this study, conductive porous sensors with complex triply periodic minimal surface (TPMS) structures were fabricated using the 3D printed sacrificial mold and enhancement of MWCNTs. A new curing routine by the self-resistance electric heating was implemented. The porous sensors were designed with different pore sizes and unit cell types of the TPMS (Diamond (D), Gyroid (G), and I-WP (I)). The impact of pore characteristics and the hybrid fabrication technique on the compressive properties and piezoresistive response of the developed porous sensors was studied. The results indicate that the porous sensors cured by the self-resistance electric heating could render a uniform temperature distribution in the composites and reduce the voids in the walls, exhibiting a higher elastic modulus and a better piezoresistive response. Among these specimens, the specimen with the D-based structure cured by self-resistance electric heating showed the highest responsive strain (61%), with a corresponding resistance response value of 0.97, which increased by 10.26% compared to the specimen heated by the external heat sources. This study provides a new perspective on design and fabrication of porous materials with piezoresistive functionalities, particularly in the realm of flexible and portable piezoresistive sensors.

Response Characteristics of Pressure-Sensitive Conductive Elastomer Sensors Using OFC Electrode with Triangular Wave Concavo-Convex Surfaces.

The sensor response of pressure-sensitive conductive elastomers using polymeric materials can be adjusted by altering the type and quantity of fillers used during manufacturing. Another method involves modifying the surface shape of the elastomer. This study investigates the sensor response by altering the surface shape of an electrode using a readily available pressure-sensitive conductive elastomer. By employing an oxygen-free copper electrode with a flat surface (with surface roughness parameters Ra = 0.064 µm and Rz = 0.564 µm) as a baseline, we examined the sensor system's characteristics. Electrodes were fabricated with triangular wave concavo-convex surfaces, featuring tip angles of 60, 90, and 120°. Improved sensor responses were observed with electrodes having tip angles of 60 and 90°. Additionally, even with varying conductive properties of elastomers, the conductance of the elastomer sensor increased similarly when using an electrode with a 90° tip angle. This study demonstrates the potential for expanding the applications of conductive elastomer sensors, highlighting the noteworthy improvement in sensor response and performance achieved by altering the surface shape of electrodes used with commercially available conductive elastomers.

A Piezoelectric-Piezoresistive Coupling Electric Field Sensor for Large Dynamic Range AC Electric Field Measurements.

We propose a piezoelectric-piezoresistive coupling electric field sensor capable of performing large dynamic range AC electric field measurements. The electric field sensor utilizes direct coupling between piezoelectric (PE) materials and piezoresistive (PR) strain gauges, in conjunction with an external signal conditioning circuit, to measure AC electric fields effectively. We verified the feasibility of the scheme using a finite element simulation, fabricated a prototype of the electric field sensor, and characterized the properties of the prototype. The testing results indicate that the sensor exhibits an ac resolution of 50 V/m and a linear measurable electric field range of 0 to over 200 kV/m, which keeps the linearity at less than 0.94% from 1 Hz to over 5 kHz. Furthermore, the sensor also has advantages, such as a small size and low power consumption. The sensor can enhance the comprehensive observability and measurability of digital power grids.

A Flexible Double-Sided Curvature Sensor Array for Use in Soft Robotics.

This paper describes the design, fabrication, integration, characterization, and demonstration of a novel flexible double-sided curvature sensor array for use in soft robotics. The paper explores the performance and potential applications of a piezoresistive sensor array consisting of four gold strain gauges on a flexible polyimide (PI) substrate arranged in a Wheatstone bridge configuration. Multiple sensor strips were arranged like the fingers of a hand. Integrating Shape Memory Alloy (SMA) foils alongside the fingers was explored to mimic a human hand-gripping motion controlled with temperature, while curvature sensor array strips measure the resulting finger shapes. Moreover, object sensing in a flexible granular material gripper was demonstrated. The sensors were embedded within Polydimethylsiloxane (PDMS) to enhance their tactile feel and adhesive properties. The findings of this study are promising for future applications, particularly in robotics and prosthetics, as the ability to accurately mimic human hand movements and reconstruct sensor surfaces paves the way for robotic hand functionality.

Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors.

Electrothermal piezoresistive resonant cantilever sensors have been fabricated with embedded actuating (heating resistor) and sensing (piezo resistors) parts, with the latter configured in a Wheatstone bridge circuit. Due to the close spacing between these two elements, a direct thermal parasitic effect on the resonant sensor during the actuating-sensing process leads to asymmetric amplitude and reversing phase spectral responses. Such a condition affects the precise determination of the cantilever's resonant frequency, f0. Moreover, in the context of phase-locked loop-based (PLL) resonance tracking, a reversing phase spectral response hinders the resonance locking due to its ambiguity. In this work, a replica of the baseline spectral was applied to remove the thermal parasitic effect on the resonance spectra of the cantilever sensor, and its capability was simulated through mathematical analysis. This replica spectral was subtracted from the parasitized spectral using a particular calculation, resulting in optimized spectral responses. An assessment using cigarette smoke particles performed a desired spectral shifting into symmetrical amplitude shapes and monotonic phase transitions, subsequently allowing for real-time PLL-based frequency tracking.