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The development of a hydrogen-helium dual-beam ion implanter.
Tang, Bing; Cui, Baoqun; Wang, Lumin; Ma, Ruigang; Li, Ning; Chen, Lihua; Cao, Liuxuan; Huang, Qinghua; Zhang, Jian; Ran, Guang; Ma, Yingjun; Huang, Jinchi; Ma, Xie; Zhou, Zehui.
Affiliation
  • Tang B; China Institute of Atomic Energy, Beijing 102413, China.
  • Cui B; China Institute of Atomic Energy, Beijing 102413, China.
  • Wang L; Xiamen University, Xiamen, Fujian 361005, China.
  • Ma R; China Institute of Atomic Energy, Beijing 102413, China.
  • Li N; Xiamen University, Xiamen, Fujian 361005, China.
  • Chen L; China Institute of Atomic Energy, Beijing 102413, China.
  • Cao L; Xiamen University, Xiamen, Fujian 361005, China.
  • Huang Q; China Institute of Atomic Energy, Beijing 102413, China.
  • Zhang J; Xiamen University, Xiamen, Fujian 361005, China.
  • Ran G; Xiamen University, Xiamen, Fujian 361005, China.
  • Ma Y; China Institute of Atomic Energy, Beijing 102413, China.
  • Huang J; Xiamen University, Xiamen, Fujian 361005, China.
  • Ma X; China Institute of Atomic Energy, Beijing 102413, China.
  • Zhou Z; Xiamen University, Xiamen, Fujian 361005, China.
Rev Sci Instrum ; 91(1): 013309, 2020 Jan 01.
Article in En | MEDLINE | ID: mdl-32012625
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Rev Sci Instrum Year: 2020 Type: Article Affiliation country: China
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Rev Sci Instrum Year: 2020 Type: Article Affiliation country: China