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Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources.
Klingner, Nico; Hlawacek, Gregor; Mazarov, Paul; Pilz, Wolfgang; Meyer, Fabian; Bischoff, Lothar.
Affiliation
  • Klingner N; Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany.
  • Hlawacek G; Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany.
  • Mazarov P; Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany.
  • Pilz W; Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany.
  • Meyer F; Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany.
  • Bischoff L; Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany.
Beilstein J Nanotechnol ; 11: 1742-1749, 2020.
Article in En | MEDLINE | ID: mdl-33282621
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Beilstein J Nanotechnol Year: 2020 Type: Article Affiliation country: Germany
Fulltext
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PubMed Links
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Beilstein J Nanotechnol Year: 2020 Type: Article Affiliation country: Germany