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Synthesis of Single-Crystal Graphene on Copper Foils Using a Low-Nucleation-Density Region in a Quartz Boat.
Yang, Kaiqiang; Liu, Jianlong; Jiang, Ruirui; Gong, Yubin; Zeng, Baoqing; Yi, Zichuan; Gao, Qingguo; Yang, Jianjun; Chi, Feng; Liu, Liming.
Affiliation
  • Yang K; School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China.
  • Liu J; Zhongshan Branch of State Key Laboratory of Electronic Thin Films and Integrated Devices, Zhongshan Institute, University of Electronic Science and Technology of China, Zhongshan 528402, China.
  • Jiang R; School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China.
  • Gong Y; School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China.
  • Zeng B; School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China.
  • Yi Z; School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China.
  • Gao Q; Zhongshan Branch of State Key Laboratory of Electronic Thin Films and Integrated Devices, Zhongshan Institute, University of Electronic Science and Technology of China, Zhongshan 528402, China.
  • Yang J; Zhongshan Branch of State Key Laboratory of Electronic Thin Films and Integrated Devices, Zhongshan Institute, University of Electronic Science and Technology of China, Zhongshan 528402, China.
  • Chi F; Zhongshan Branch of State Key Laboratory of Electronic Thin Films and Integrated Devices, Zhongshan Institute, University of Electronic Science and Technology of China, Zhongshan 528402, China.
  • Liu L; Zhongshan Branch of State Key Laboratory of Electronic Thin Films and Integrated Devices, Zhongshan Institute, University of Electronic Science and Technology of China, Zhongshan 528402, China.
Micromachines (Basel) ; 12(10)2021 Oct 12.
Article in En | MEDLINE | ID: mdl-34683288
ABSTRACT
The nucleation of graphene at different locations in the quartz boat was studied, and the lowest nucleation density of graphene in the quartz boat was found. The nucleation density of graphene is the lowest at the bottom of the quartz boat near the gas inlet side. Based on the above results, a simple and reproducible way is proposed to significantly suppress the nucleation density of graphene on the copper foil during the chemical vapor deposition process. Placing the copper foil with an area of 1.3 cm × 1 cm in the middle of the bottom of the quartz boat or further back, and placing two copper pockets in front of the copper foil, an ultra-low nucleation density of ~42 nucleus/cm2 was achieved on the back of the copper foil. Single-crystal monolayer graphene with a lateral size of 800 µm can be grown on the back of copper foils after 60 min of growth. Raman spectroscopy revealed the single-crystal graphene to be in uniform monolayers with a low D-band intensity.
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2021 Type: Article Affiliation country: China
Fulltext
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PubMed Links
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2021 Type: Article Affiliation country: China