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Enhanced Conductivity and Microstructure in Highly Textured TiN1-x /c-Al2O3 Thin Films.
Zintler, Alexander; Eilhardt, Robert; Petzold, Stefan; Sharath, Sankaramangalam Ulhas; Bruder, Enrico; Kaiser, Nico; Alff, Lambert; Molina-Luna, Leopoldo.
Affiliation
  • Zintler A; Advanced Electron Microscopy, Institute of Materials Science, TU Darmstadt, Alarich-Weiss-Str. 2, 64287 Darmstadt, Germany.
  • Eilhardt R; Advanced Electron Microscopy, Institute of Materials Science, TU Darmstadt, Alarich-Weiss-Str. 2, 64287 Darmstadt, Germany.
  • Petzold S; Advanced Thin Film Technology, Institute of Materials Science, TU Darmstadt, Alarich-Weiss-Str. 2, 64287 Darmstadt, Germany.
  • Sharath SU; Advanced Thin Film Technology, Institute of Materials Science, TU Darmstadt, Alarich-Weiss-Str. 2, 64287 Darmstadt, Germany.
  • Bruder E; Physical Metallurgy, Institute of Materials Science, TU Darmstadt, Alarich-Weiss-Straße 2, 64287 Darmstadt, Germany.
  • Kaiser N; Advanced Thin Film Technology, Institute of Materials Science, TU Darmstadt, Alarich-Weiss-Str. 2, 64287 Darmstadt, Germany.
  • Alff L; Advanced Thin Film Technology, Institute of Materials Science, TU Darmstadt, Alarich-Weiss-Str. 2, 64287 Darmstadt, Germany.
  • Molina-Luna L; Advanced Electron Microscopy, Institute of Materials Science, TU Darmstadt, Alarich-Weiss-Str. 2, 64287 Darmstadt, Germany.
ACS Omega ; 7(2): 2041-2048, 2022 Jan 18.
Article in En | MEDLINE | ID: mdl-35071892
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: ACS Omega Year: 2022 Type: Article Affiliation country: Germany
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: ACS Omega Year: 2022 Type: Article Affiliation country: Germany