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High-Frequency Surface Acoustic Wave Resonator with Diamond/AlN/IDT/AlN/Diamond Multilayer Structure.
Lei, Liang; Dong, Bo; Hu, Yuxuan; Lei, Yisong; Wang, Zhizhong; Ruan, Shuangchen.
Affiliation
  • Lei L; College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China.
  • Dong B; College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China.
  • Hu Y; College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China.
  • Lei Y; College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China.
  • Wang Z; College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China.
  • Ruan S; College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China.
Sensors (Basel) ; 22(17)2022 Aug 28.
Article in En | MEDLINE | ID: mdl-36080938
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sensors (Basel) Year: 2022 Type: Article Affiliation country: China
Fulltext
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PubMed Links
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sensors (Basel) Year: 2022 Type: Article Affiliation country: China