Fabrication of tapered waveguides by i-line UV lithography for flexible coupling control.
Opt Express
; 31(3): 4281-4290, 2023 Jan 30.
Article
in En
| MEDLINE
| ID: mdl-36785400
ABSTRACT
A tapered bus-waveguide is demonstrated to enhance the waveguide-to-cavity coupling by mass-productive, cost-effective i-line UV lithography. Through enlarging the overlap between the evanescent wave and waveguide resonator, we experimentally show that the coupling strength of silicon nitride waveguides can be 7 times stronger than the conventional coupling of a uniform, straight bus-waveguide. For the first time, strong over-coupling is identified at a 400 nm gap and quality factor ≈ 105 without elongating the coupling length. This design relieves the fabrication limits and provides the flexibility for coupling control, especially in the strongly over-coupled regime with i-line UV lithography.
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Type of study:
Prognostic_studies
Language:
En
Journal:
Opt Express
Journal subject:
OFTALMOLOGIA
Year:
2023
Type:
Article