Impact of asymmetric electrodes on ferroelectricity of sub-10 nm HZO thin films.

Chen, Hsing-Yang; Jiang, Yu-Sen; Chuang, Chun-Ho; Mo, Chi-Lin; Wang, Ting-Yun; Lin, Hsin-Chih; Chen, Miin-Jang.

Affiliation

Chen HY; Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, ROC.
Jiang YS; Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, ROC.
Chuang CH; Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, ROC.
Mo CL; Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, ROC.
Wang TY; Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, ROC.
Lin HC; Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, ROC.
Chen MJ; Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, ROC.

Nanotechnology ; 35(10)2023 Dec 18.

Article in En | MEDLINE | ID: mdl-37995361