PMMA-Based Wafer-Bonded Capacitive Micromachined Ultrasonic Transducer for Underwater Applications.

Ahmad, Mansoor; Bozkurt, Ayhan; Farhanieh, Omid

Ahmad, Mansoor; Bozkurt, Ayhan; Farhanieh, Omid.

Afiliación

Ahmad M; Faculty of Engineering and Natural Sciences, Sabanci University, 34956 Istanbul, Turkey. amansoor@sabanciuniv.edu.
Bozkurt A; Faculty of Engineering and Natural Sciences, Sabanci University, 34956 Istanbul, Turkey. abozkurt@sabanciuniv.edu.
Farhanieh O; Sabanci University Nanotechnology Research and Application Center (SUNUM), 34956 Istanbul, Turkey. abozkurt@sabanciuniv.edu.

Micromachines (Basel) ; 10(5)2019 May 11.

Article en En | MEDLINE | ID: mdl-31083578

Palabras clave

Capacitive Micromachined Ultrasonic Transducers (CMUTs); Microelectromechanical Systems (MEMS); PMMA; underwater acoustics; wafer bonding

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Tipo de estudio: Clinical_trials Idioma: En Revista: Micromachines (Basel) Año: 2019 Tipo del documento: Article País de afiliación: Turquía

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