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Morphological studies of SnO2 thin films fabricated by using e-beam method.
Heo, S N; Sung, C H; Seo, Y J; Park, K Y; Ahmed, F; Anwar, M S; Koo, B H.
Afiliação
  • Heo SN; School of Nano and Advanced Materials Engineering, Changwon National University, 641-773 Changwon, Korea.
J Nanosci Nanotechnol ; 13(5): 3446-50, 2013 May.
Article em En | MEDLINE | ID: mdl-23858876
This paper studies the variations in morphology of SnO2 nanostructures thin films deposited by using e-beam technique with the substrate temperature, oxygen partial pressure and the film thickness. The e-beam conditions were optimized to get crystalline nanosheets of SnO2. The films of 100-700 nm thickness were deposited on quartz substrates at temperatures ranging from room temperature (RT) to 300 degrees C and oxygen partial pressure ranging from 0 to 200 sccm. The nanostructured films have been characterized by means of X-ray diffraction (XRD), field emission scanning electron microscope (FE-SEM) and Energy dispersive spectroscopy (EDS) measurements. XRD results show that the films deposited at RT and 100 degrees C were amorphous, however, for 200 degrees C and 300 degrees C, the films showed crystalline nature with rutile structure. Also, the crystallinity increased with the increase of oxygen partial pressure. FE-SEM images revealed that at RT and 100 degrees C of substrate temperature, the film consist of spherical particles, whereas, the films deposited at 200 degrees C and 300 degrees C consist of sheet like morphology having thickness -40 nm and lateral dimension of 1 microm, respectively. The size of the nanosheets increased with the increase of substrate temperature and oxygen partial pressure due to the enhancement in the crystallinity of the films. A possible growth mechanism of the formation of SnO2 nanosheets is discussed.
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Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Oxigênio / Compostos de Estanho / Nanoestruturas / Membranas Artificiais Idioma: En Revista: J Nanosci Nanotechnol Ano de publicação: 2013 Tipo de documento: Article
Buscar no Google
Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Oxigênio / Compostos de Estanho / Nanoestruturas / Membranas Artificiais Idioma: En Revista: J Nanosci Nanotechnol Ano de publicação: 2013 Tipo de documento: Article