Compact focusing grating couplers for silicon horizontal slot waveguides.
Opt Lett
; 42(3): 490-493, 2017 Feb 01.
Article
em En
| MEDLINE
| ID: mdl-28146509
ABSTRACT
In this Letter, we present the design, simulation (2D and 3D), fabrication, and experimental characterization of compact and fully etched focusing gratings for a horizontal slot waveguide based on a silicon nitride layer sandwiched between amorphous silicon and a silicon-on-insulator. The measured coupling losses are about 4 dB with a 3 dB bandwidth of 38 nm. The fully etched configuration allows the fabrication in a single lithography step.
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MEDLINE
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En
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Opt Lett
Ano de publicação:
2017
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Article