Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections.

Ji, Meilin; Yang, Haolin; Zhou, Yongxin; Xiu, Xueying; Lv, Haochen; Zhang, Songsong

Ji, Meilin; Yang, Haolin; Zhou, Yongxin; Xiu, Xueying; Lv, Haochen; Zhang, Songsong.

Afiliação

Ji M; School of Microelectronics, Shanghai University, Shanghai 200444, China.
Yang H; School of Microelectronics, Shanghai University, Shanghai 200444, China.
Zhou Y; School of Microelectronics, Shanghai University, Shanghai 200444, China.
Xiu X; School of Microelectronics, Shanghai University, Shanghai 200444, China.
Lv H; Shanghai Industrial µTechnology Research Institute, Shanghai 201800, China.
Zhang S; School of Microelectronics, Shanghai University, Shanghai 200444, China.

Micromachines (Basel) ; 13(12)2022 Dec 19.

Article em En | MEDLINE | ID: mdl-36557559

Palavras-chave

PMUT; bimorph; dual-electrode; scandium-doped aluminum nitride (Sc0.2Al0.8N)

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: China

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