Reaction mechanism of nickel sulfide atomic layer deposition using bis(N,N'-di-tert-butylacetamidinato)nickel(II) and hydrogen sulfide.

Zhang, Xu; Zhou, Zhongchao; Xu, Rui; Guo, Jiayi; Xu, Lina; Ding, Yihong; Xiao, Hongping; Li, Xinhua; Li, Aidong; Fang, Guoyong

Reaction mechanism of nickel sulfide atomic layer deposition using bis(N,N'-di-tert-butylacetamidinato)nickel(II) and hydrogen sulfide.

Zhang, Xu; Zhou, Zhongchao; Xu, Rui; Guo, Jiayi; Xu, Lina; Ding, Yihong; Xiao, Hongping; Li, Xinhua; Li, Aidong; Fang, Guoyong.

Afiliação

Zhang X; Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China. xulina@wzu.edu.cn.
Zhou Z; Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China. xulina@wzu.edu.cn.
Xu R; Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China. xulina@wzu.edu.cn.
Guo J; Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China. xulina@wzu.edu.cn.
Xu L; Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China. xulina@wzu.edu.cn.
Ding Y; Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China. xulina@wzu.edu.cn.
Xiao H; Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China. xulina@wzu.edu.cn.
Li X; Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China. xulina@wzu.edu.cn.
Li A; National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China.
Fang G; Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou 325035, China. xulina@wzu.edu.cn.

Phys Chem Chem Phys ; 25(19): 13465-13473, 2023 May 17.

Article em En | MEDLINE | ID: mdl-37132216

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Phys Chem Chem Phys Assunto da revista: BIOFISICA / QUIMICA Ano de publicação: 2023 Tipo de documento: Article País de afiliação: China

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