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1.
Microsyst Nanoeng ; 9: 149, 2023.
Article En | MEDLINE | ID: mdl-38025886

Stretchable and curved electronic devices are a promising technology trend due to their remarkable advantages. Many approaches have been developed to manufacture stretchable and curved electronics. Here, to allow such electronics to better serve practical applications, ranging from wearable devices to soft robotics, we propose a novel vertical serpentine conductor (VSC) with superior electrical stability to interconnect functional devices through a silicon-based microfabrication process. Conformal vacuum transfer printing (CVTP) technology was developed to transfer the networked platform onto complex curved surfaces to demonstrate feasibility. The mechanical and electrical performance were investigated numerically and experimentally. The VSC interconnected network provides a new approach for stretchable and curved electronics with high stretchability and reliability.

2.
Micromachines (Basel) ; 13(8)2022 Jul 31.
Article En | MEDLINE | ID: mdl-36014151

This paper presents the principle, design, fabrication, and characterization of Molecular Electronic Transducer (MET) dual-axis tilt sensors. The proposed sensor has a 3D-printed cylindrical channel inserted with four double-band electrodes and partially filled with a liquid electrolyte. The double-band electrodes were fabricated by wire winding with a ~0.1 mm anode-cathode distance under controlled tension. It allows the electrode to become any 3D coil rather than a 2D structure by microfabrication and exhibits good repeatability (±10%). The tilting changes the electrolyte level and electrode-electrolyte contact area, resulting in Faradaic current changes. The x-axis and the y-axis sensitivity reach 0.121 V/° and 0.154 V/°, respectively.

3.
Micromachines (Basel) ; 13(4)2022 Mar 27.
Article En | MEDLINE | ID: mdl-35457835

The development of the IoT demands small, durable, remote sensing systems that have energy harvesters and storage. Various energy harvesters are developed, including piezoelectric, triboelectric, electromagnetic, and reverse-electrowetting-on-dielectric. However, integrating energy storage and sensing functionality receives little attention. This paper presents an electrochemical vibration sensor with a galvanic cell (Zn-Cu cell) as energy storage and a vibration transducer. The frequency response, scale factor, long-term response, impedance study, and discharge characteristics are given. This study proved the possibility of integrating energy storage and vibration sensing functionality with promising performance. The performance of the sensor halved within 74 min. The longevity of the sensor is short due to the spontaneous reactions and ions drained. The sensitivity can be restored after refilling the electrolyte. The sensor could be rechargeable by changing to a reversible electrochemical system such as a lead-acid cell in the future.

4.
Microsyst Nanoeng ; 7: 101, 2021.
Article En | MEDLINE | ID: mdl-34917393

Curved displays have recently become very popular, with wide applications for both industry and consumers. However, built upon initially flat films, most flexible displays are often incompatible with general nondevelopable surfaces. In this paper, we report a method for producing curved displays of nondevelopable shapes by using a structure-mechanics-inspired functional optimization method to design tessellation patterns that fold into the desired shapes. Representative displays in spherical and saddle shapes are demonstrated. The microfabrication process is employed for manufacturing 2D flexible foldable circuit boards, pick-and-place technology is used for placing illuminant elements onto the boards, and mold guidance is used for folding 2-D sheets into curved 3D display prototypes. The proposed technology is feasible for mass production and advances the application of next-generation curved displays.

5.
Microsyst Nanoeng ; 7: 99, 2021.
Article En | MEDLINE | ID: mdl-34900333

The humidity sensor is an essential sensing node in medical diagnosis and industrial processing control. To date, most of the reported relative humidity sensors have a long response time of several seconds or even hundreds of seconds, which would limit their real application for certain critical areas with fast-varying signals. In this paper, we propose a flexible and low-cost humidity sensor using vertically aligned carbon nanotubes (VACNTs) as electrodes, a PDMS-Parylene C double layer as the flexible substrate, and graphene oxide as the sensing material. The humidity sensor has an ultrafast response of ~20 ms, which is more than two orders faster than most of the previously reported flexible humidity sensors. Moreover, the sensor has a high sensitivity (16.7 pF/% RH), low hysteresis (<0.44%), high repeatability (2.7%), good long-term stability, and outstanding flexibility. Benefiting from these advantages, especially the fast response, the device has been demonstrated in precise human respiration monitoring (fast breathing, normal breathing, deep breathing, asthma, choking, and apnea), noncontact electrical safety warning for bare hand and wet gloves, and noncontact pipe leakage detection. In addition, the facile fabrication of the flexible platform with the PDMS-Parylene C double layer can be easily integrated with multisensing functions such as pH sensing, ammonium ion sensing, and temperature sensing, all of which are useful for more pattern recognition of human activity.

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