Integration of an opto-chemical detector based on group III-nitride nanowire heterostructures.

The photoluminescence intensity of group III nitrides, nanowires, and heterostructures (NWHs) strongly depends on the environmental H(2) and O(2) concentration. We used this opto-chemical transducer principle for the realization of a gas detector. To make this technology prospectively available to commercial gas-monitoring applications, a large-scale laboratory setup was miniaturized. To this end the gas-sensitive NWHs were integrated with electro-optical components for optical addressing and read out within a compact and robust sensor system. This paper covers the entire realization process of the device from its conceptual draft and optical design to its fabrication and assembly. The applied approaches are verified with intermediate results of profilometric characterizations and optical performance measurements of subsystems. Finally the gas-sensing capabilities of the integrated detector are experimentally proven and optimized.

CIP (cleaning-in-place) stability of AlGaN/GaN pH sensors.

The CIP stability of pH sensitive ion-sensitive field-effect transistors based on AlGaN/GaN heterostructures was investigated. For epitaxial AlGaN/GaN films with high structural quality, CIP tests did not degrade the sensor surface and pH sensitivities of 55-58 mV/pH were achieved. Several different passivation schemes based on SiO(x), SiN(x), AlN, and nanocrystalline diamond were compared with special attention given to compatibility to standard microelectronic device technologies as well as biocompatibility of the passivation films. The CIP stability was evaluated with a main focus on the morphological stability. All stacks containing a SiO2 or an AlN layer were etched by the NaOH solution in the CIP process. Reliable passivations withstanding the NaOH solution were provided by stacks of ICP-CVD grown and sputtered SiN(x) as well as diamond reinforced passivations. Drift levels about 0.001 pH/h and stable sensitivity over several CIP cycles were achieved for optimized sensor structures.

Analysis of nanocrystalline films on rough substrates.

In this work, we propose a method to estimate basic parameters like the rms roughness and the mean grain size of nanocrystalline thin films on rough substrates. The method is based on the analysis of the power spectral density (PSD) of the surface profile, which allows distinguishing between the two participating components from surface and film. The effectiveness will be demonstrated for thin NiO(x) layers for gas sensing on Al(2)O(3) ceramic substrates, and for protective WC coatings on steel.

Using defined structures on very thin foils for characterizing AFM tips.

Knowledge of tip geometry is necessary for reproducible atomic force microscope (AFM) measurements. This is particularly important for measurements in contact mode, in which a certain wear of the tip will always occur. For small or flat structures or for structures of larger dimensions, knowledge of the tip radius and the entire tip geometry is important. Additionally, the tilt of the tip in relation to the sample is of importance. Normally, very complicated lithographically manufactured structures for tip characterization are used. In contrast, the structures shown in this work are very simple. For measuring the tip geometry very thin foils patterned by focused ion beam (FIB) were used. In this work we demonstrate the possibility of determining the AFM tip geometry and the tilt based on several different large structures. A proven algorithm was developed for the reconstruction of the tips. The shape of FIB-structured foils was determined by electron microscopy prior to AFM measurements. This new method for determining tip shape is also presented as it compares to other current methods. In this case a discussion on the stability and advantages of the new method is presented.