Stably polarized 795 nm vertical-cavity surface-emitting lasers with anti-phase SiNx surface gratings.

795 nm vertical-cavity surface-emitting lasers (VCSELs) with dielectric surface gratings to control the output polarization are designed and fabricated. The calculated results demonstrate that a well-designed S i N x surface grating positioned on the surface of an anti-phase VCSEL structure enhances the reflectivity difference between the two polarization modes compared to a conventional GaAs surface grating, consequently resulting in a larger gain anisotropy in VCSELs and a high orthogonal polarization suppression ratio (OPSR). Characterization shows that a peak-to-peak OPSR of 30.3 dB is achieved at 85°C for 795 nm VCSELs with a S i N x surface grating of 5 µm in diameter and an oxide aperture of ∼4µm, demonstrating the effectiveness of the S i N x surface grating in polarization control for 795 nm VCSELs.

Low Threshold Current and Polarization-Stabilized 795 nm Vertical-Cavity Surface-Emitting Lasers.

Low threshold current and polarization-stabilized 795 nm vertical-cavity surface-emitting lasers (VCSELs) are fabricated by integrating a surface grating of high polarization selectivity and high reflectivity. The rigorous coupled-wave analysis method is used to design the surface grating. For the devices with a grating period of 500 nm, a grating depth of ~150 nm, and a diameter of the surface grating region of 5 µm, a threshold current of 0.4 mA and an orthogonal polarization suppression ratio (OPSR) of 19.56 dB are obtained. The emission wavelength of 795 nm of a single transverse mode VCSEL is achieved at a temperature of 85 °C under an injection current of 0.9 mA. In addition, experiments demonstrate that the threshold and output power also depended on the size of the grating region.

Polarization control of 795 nm vertical-cavity surface-emitting lasers by in-phase surface gratings.

795 nm vertical-cavity surface-emitting lasers (VCSELs) with in-phase surface gratings are fabricated and investigated theoretically and experimentally. The polarization characteristics of 795 nm VCSELs with various grating periods and depths are analyzed using the rigorous coupled-wave analysis (RCWA) method; the dependence of polarization stability on the profile of gratings demonstrates that the trapezoid grating ridge slightly enhances the orthogonal polarization suppression ratio (OPSR), but increases the threshold current. The fabricated VCSELs with a sub-wavelength in-phase surface grating of a duty cycle of 0.5 show stabilized output polarization at the cost of increasing the threshold current which is in agreement with the calculations. The grating VCSELs with a period of 200 nm and an oxide aperture of 3.43µm×4.39µm produce a single-mode output with an OPSR of 16.6 dB and a slope efficiency of 0.42 W/A at 85°C.