A 3D surface nanomechanical property mapping method with a magnetic-drive orthogonal cantilever probe.

Traditional force-distance curve based atomic force microscopy (FD-AFM) is limited to two-dimensional (2D) surface characterization, making the in situ mapping of three-dimensional (3D) surface nanomechanical properties (SNMP) challenging. This paper presents a multimode 3D FD-AFM based on a magnetic-drive orthogonal cantilever probe (MD-OCP) that can achieve SNMP imaging of 3D micro-nano structures with surface contour fluctuations reaching or exceeding several microns. Bending, torsion and vector tracking modes are integrated into this method for a 2D horizontal surface, 2D sidewall, and 3D surface mapping, respectively. The MD-OCP consists of a horizontal cantilever, a vertical cantilever with a protruding tip, and a magnetized bead. It can be utilized in the detection of deep trench and dense microarray units. The force analysis during 3D SNMP measurement is performed through mathematical derivation, which shows a clear relationship between effective indentation force, friction, and total tip-sample interactions. Single-point SNMP evaluation, discrete 2D SNMP imaging, and continuous omnidirectional 3D SNMP mapping of a 3D microarray unit verify the accurate and comprehensive measurement abilities of the reported method in its bending, torsion, and vector tracking modes. The experimental results demonstrate that this method can achieve excellent 3D quantitative characterization of topography and SNMP, including critical dimensions, adhesion, Young's modulus, stiffness, and energy dissipation, along a 3D device surface. This novel 3D FD-AFM technique has many potential applications in the further exploration of 3D micro-nano devices.

In Situ Quantification of Strain-Induced Piezoelectric Potential of Dynamically Bending ZnO Microwires.

The piezoelectric properties of semiconductor micro/nanowires (M/NWs) are crucial for optimizing semiconductors' electronic structure and carrier dynamics. However, the dynamic characterization of the piezoelectric properties of M/NWs remains challenging. Here, a Kelvin probe force microscopy technique based on a dual-probe atomic force microscope is developed to achieve in situ piezoelectric potential measurements of dynamic bending MWs. This technique can not only characterize the surface potential on different crystal faces of ZnO MWs in a natural state through controllable axial rotation, but also investigate the piezoelectric potential of the dynamically bending flake-like ZnO MW at different points and under different strain loads. The results show that the surface potentials of different faces/positions of the ZnO MWs are varied significantly, and determine that the quasi-static conditions piezo-strain factor of the flake-like ZnO MW is 0.28 V/%, while the factor was 0.14 V/% under low-frequency (⩽5 Hz) sinusoidal strain loading. This work provides a significant methodology to further study piezoelectric materials, and it aims to facilitate their applications in piezoelectric devices and systems.

Three-Dimensional Kelvin Probe Force Microscopy.

Traditional Kelvin probe force microscopy (KPFM) is mainly limited to the characterization of two-dimensional (2D) surfaces, and in situ surface potential (SP) imaging along 3D device surfaces remains a challenge. This paper presents a multimode 3D-KPFM based on an orthogonal cantilever probe (OCP) that can achieve SP mapping of 3D micronano structures. It integrates three working modes: a bending mode for 2D horizontal surface imaging, a torsion mode for vertical sidewall imaging, and a vector tracking-based 3D scanning mode. The customized OCP has a nanoscale tip protruding from the side and underside of the cantilever, rather than the front, and the extended tip makes the proposed approach universally applicable for 3D detection from the nanometer to micrometer scale. The spatial resolution of the proposed method is analyzed by simulation, which shows it can reduce the cantilever homogenization effect. Linearity and energy resolution measurements show that the proposed method has comparable performance to traditional methods. A comparative experiment using a gold-silicon interface verifies the accuracy of the reported method in its bending and torsion modes. Further, the imaging ability of the 3D scanning mode is confirmed in the 3D characterization of a step grating. This technique is applied to the in situ characterization of a microforce sensor with microcomb structures. The experiment results show that this method can excellently achieve the 3D quantitative characterization of topography and SP, including critical dimensions and SP along a 3D device surface. This novel 3D-KPFM technique has many potential applications in the further exploration of 3D micronano devices.