We demonstrate the integration of a black phosphorus photodetector in a hybrid, three-dimensional architecture of silicon photonics and metallic nanoplasmonics structures. This integration approach combines the advantages of the low propagation loss of silicon waveguides, high-field confinement of a plasmonic nanogap, and the narrow bandgap of black phosphorus to achieve high responsivity for detection of telecom-band, near-infrared light. Benefiting from an ultrashort channel (â¼60 nm) and near-field enhancement enabled by the nanogap structure, the photodetector shows an intrinsic responsivity as high as 10 A/W afforded by internal gain mechanisms, and a 3 dB roll-off frequency of 150 MHz. This device demonstrates a promising approach for on-chip integration of three distinctive photonic systems, which, as a generic platform, may lead to future nanophotonic applications for biosensing, nonlinear optics, and optical signal processing.
We combine nanostencil lithography and template stripping to create self-aligned patterns about the apex of ultrasmooth metal pyramids with high throughput. Three-dimensional patterns such as spiral and asymmetric linear gratings, which can couple incident light into a hot spot at the tip, are presented as examples of this fabrication method. Computer simulations demonstrate that spiral and linear diffraction grating patterns are both effective at coupling light to the tip. The self-aligned stencil lithography technique can be useful for integrating plasmonic couplers with sharp metallic tips for applications such as near-field optical spectroscopy, tip-based optical trapping, plasmonic sensing, and heat-assisted magnetic recording.
We present a new technique to engineer metallic interfaces to produce sharp tips with smooth curved surfaces and variable tip angles, as well as ridges with arbitrary contour shapes, all of which can be integrated with grating couplers for applications in plasmonics and nanophotonics. We combine template stripping, a nanofabrication scheme, with atomic layer deposition (ALD) to produce the ultrasharp nanoscale tips and wedges using only conventional photolithography. Conformal ALD coating of insulators over silicon trench molds of various shapes reduces their widths to make nanoscale features without high-resolution lithography. Along with a metal deposition and template stripping, this size-reduction scheme can mass-produce narrow and ultrasharp (<10 nm radius of curvature) metallic wedges and tips over an entire 4 in. wafer. This size-reduction scheme can create metallic tips out of arbitrary trench patterns that have smooth curved surfaces to facilitate efficient adiabatic nanofocusing which will benefit applications in near-field optical spectroscopy, plasmonic waveguides, particle trapping, hot-electron plasmonics, and nonlinear optics.
The scattering of electromagnetic waves by periodic layered media plays a crucial role in many applications in optics and photonics, in particular in nanoplasmonics for topics as diverse as extraordinary optical transmission, photonic crystals, metamaterials, and surface plasmon resonance biosensing. With these applications in mind, we focus on surface plasmon resonances excited in the context of insulator-metal structures with a periodic, corrugated interface. The object of this contribution is to study the geometric limits required to generate these fundamentally important phenomena. For this we use the robust, rapid, and highly accurate field expansions method to investigate these delicate phenomena and demonstrate how very small perturbations (e.g., a 5 nm deviation on a 530 nm period grating) can generate strong (in this instance 20%) plasmonic absorption, and vanishingly small perturbations (e.g., a 1 nm deviation on a 530 nm period grating) can generate nontrivial (in this instance 1%) plasmonic absorption.
We present large-scale reproducible fabrication of multifunctional ultrasharp metallic structures on planar substrates with capabilities including magnetic field nanofocusing and plasmonic sensing. Objects with sharp tips such as wedges and pyramids made with noble metals have been extensively used for enhancing local electric fields via the lightning-rod effect or plasmonic nanofocusing. However, analogous nanofocusing of magnetic fields using sharp tips made with magnetic materials has not been widely realized. Reproducible fabrication of sharp tips with magnetic as well as noble metal layers on planar substrates can enable straightforward application of their material and shape-derived functionalities. We use a template-stripping method to produce plasmonic-shell-coated nickel wedge and pyramid arrays at the wafer-scale with tip radius of curvature close to 10 nm. We further explore the magnetic nanofocusing capabilities of these ultrasharp substrates, deriving analytical formulas and comparing the results with computer simulations. These structures exhibit nanoscale spatial control over the trapping of magnetic microbeads and nanoparticles in solution. Additionally, enhanced optical sensing of analytes by these plasmonic-shell-coated substrates is demonstrated using surface-enhanced Raman spectroscopy. These methods can guide the design and fabrication of novel devices with applications including nanoparticle manipulation, biosensing, and magnetoplasmonics.
Chemical analysis of membrane-bound containers such as secretory vesicles, organelles, and exosomes can provide insights into subcellular biology. These containers are loaded with a range of important biomolecules, which further underscores the need for sensitive and selective analysis methods. Here we present a metallic pyramid array for intravesicular analysis by combining site-selective dielectrophoresis (DEP) and Raman spectroscopy. Sharp pyramidal tips act as a gradient force generator to trap nanoparticles or vesicles from the solution, and the tips are illuminated by a monochromatic light source for concurrent spectroscopic detection of trapped analytes. The parameters suitable for DEP trapping were optimized by fluorescence microscopy, and the Raman spectroscopy setup was characterized by a nanoparticle based model system. Finally, vesicles loaded with 4-mercaptopyridine were concentrated at the tips and their Raman spectra were detected in real time. These pyramidal tips can perform large-area array-based trapping and spectroscopic analysis, opening up possibilities to detect molecules inside cells or cell-derived vesicles.
Electrophoresis/methods , Pyridines/analysis , Spectrum Analysis, Raman/methods , Gold/chemistry , Metal Nanoparticles/chemistry , Microscopy, Fluorescence
We use template stripping to integrate metallic nanostructures onto flexible, stretchable, and rollable substrates. Using this approach, high-quality patterned metals that are replicated from reusable silicon templates can be directly transferred to polydimethylsiloxane (PDMS) substrates. First we produce stretchable gold nanohole arrays and show that their optical transmission spectra can be modulated by mechanical stretching. Next we fabricate stretchable arrays of gold pyramids and demonstrate a modulation of the wavelength of light resonantly scattered from the tip of the pyramid by stretching the underlying PDMS film. The use of a flexible transfer layer also enables template stripping using a cylindrical roller as a substrate. As an example, we demonstrate roller template stripping of metallic nanoholes, nanodisks, wires, and pyramids onto the cylindrical surface of a glass rod lens. These nonplanar metallic structures produced via template stripping with flexible and stretchable films can facilitate many applications in sensing, display, plasmonics, metasurfaces, and roll-to-roll fabrication.
We present quantitative, spectroscopic polarization interferometry phase measurements on plasmonic surfaces for sensing applications. By adding a liquid crystal variable wave plate in our beam path, we are able to measure phase shifts due to small refractive index changes on the sensor surface. By scanning in a quick sequence, our technique is extended to demonstrate real-time measurements. While this optical technique is applicable to different sensor geometries-e.g., nanoparticles, nanogratings, or nanoapertures-the plasmonic sensors we use here consist of an ultrasmooth gold layer with buried linear gratings. Using these devices and our phase measurement technique, we calculate a figure of merit that shows improvement over measuring only surface plasmon resonance shifts from a reflected intensity spectrum. To demonstrate the general-purpose versatility of our phase-resolved measurements, we also show numerical simulations with another common device architecture: periodic plasmonic slits. Since our technique inherently measures both the intensity and phase of the reflected or transmitted light simultaneously, quantitative sensor device characterization is possible.
Biosensing Techniques/methods , Interferometry , Surface Plasmon Resonance , Equipment Design , Gold/chemistry , Interferometry/instrumentation , Microscopy
Gradient fields of optical, magnetic, or electrical origin are widely used for the manipulation of micro- and nanoscale objects. Among various device geometries to generate gradient forces, sharp metallic tips are one of the most effective. Surface roughness and asperities present on traditionally produced tips reduce trapping efficiencies and limit plasmonic applications. Template-stripped, noble metal surfaces and structures have sub-nm roughness and can overcome these limits. We have developed a process using a mix of conductive and dielectric epoxies to mount template-stripped gold pyramids on tungsten wires that can be integrated with a movable stage. When coupled with a transparent indium tin oxide (ITO) electrode, the conductive pyramidal tip functions as a movable three-dimensional dielectrophoretic trap which can be used to manipulate submicrometer-scale particles. We experimentally demonstrate the electrically conductive functionality of the pyramidal tip by dielectrophoretic manipulation of fluorescent beads and concentration of single-walled carbon nanotubes, detected with fluorescent microscopy and Raman spectroscopy.
The scattering of time-harmonic linear waves by periodic media arises in a wide array of applications from materials science and nondestructive testing to remote sensing and oceanography. In this work we have in mind applications in optics, more specifically plasmonics, and the surface plasmon polaritons that are at the heart of remarkable phenomena such as extraordinary optical transmission, surface-enhanced Raman scattering, and surface plasmon resonance biosensing. In this paper we develop robust, highly accurate, and extremely rapid numerical solvers for approximating solutions to grating scattering problems in the frequency regime where these are commonly used. For piecewise-constant dielectric constants, which are commonplace in these applications, surface formulations are clearly advantaged as they posit unknowns supported solely at the material interfaces. The algorithms we develop here are high-order perturbation of surfaces methods and generalize previous approaches to take advantage of the fact that these algorithms can be significantly accelerated when some or all of the interfaces are trivial (flat). More specifically, for configurations with one nontrivial interface (and one trivial interface) we describe an algorithm that has the same computational complexity as a two-layer solver. With numerical simulations and comparisons with experimental data, we demonstrate the speed, accuracy, and applicability of our new algorithms.
Lipid bilayer membranes form the plasma membranes of cells and define the boundaries of subcellular organelles. In nature, these membranes are heterogeneous mixtures of many types of lipids, contain membrane-bound proteins and are decorated with carbohydrates. In some experiments, it is desirable to decouple the biophysical or biochemical properties of the lipid bilayer from those of the natural membrane. Such cases call for the use of model systems such as giant vesicles, liposomes or supported lipid bilayers (SLBs). Arrays of SLBs are particularly attractive for sensing applications and mimicking cell-cell interactions. Here we describe a new method for forming SLB arrays. Submicron-diameter SiO2 beads are first coated with lipid bilayers to form spherical SLBs (SSLBs). The beads are then deposited into an array of micro-fabricated submicron-diameter microwells. The preparation technique uses a "squeegee" to clean the substrate surface, while leaving behind SSLBs that have settled into microwells. This method requires no chemical modification of the microwell substrate, nor any particular targeting ligands on the SSLB. Microwells are occupied by single beads because the well diameter is tuned to be just larger than the bead diameter. Typically, more 75% of the wells are occupied, while the rest remain empty. In buffer SSLB arrays display long-term stability of greater than one week. Multiple types of SSLBs can be placed in a single array by serial deposition, and the arrays can be used for sensing, which we demonstrate by characterizing the interaction of cholera toxin with ganglioside GM1. We also show that phospholipid vesicles without the bead supports and biomembranes from cellular sources can be arrayed with the same method and cell-specific membrane lipids can be identified.
Cell Membrane/chemistry , Lipid Bilayers/chemistry , Tissue Array Analysis/methods , Animals , Cattle , Cholera Toxin/chemistry , G(M1) Ganglioside/chemistry , Phospholipids/chemistry , Silicon Dioxide/chemistry , Tissue Array Analysis/instrumentation
We experimentally demonstrate dielectrophoretic concentration of biological analytes on the surface of a gold nanohole array, which concurrently acts as a nanoplasmonic sensor and gradient force generator. The combination of nanohole-enhanced dielectrophoresis, electroosmosis, and extraordinary optical transmission through the periodic gold nanohole array enables real-time label-free detection of analyte molecules in a 5 µL droplet using concentrations as low as 1 pM within a few minutes, which is more than 1000 times faster than purely diffusion-based binding. The nanohole-based optofluidic platform demonstrated here is straightforward to construct, applicable to both charged and neutral molecules, and performs a novel function that cannot be accomplished using conventional surface plasmon resonance sensors.
Gold/chemistry , Nanostructures/chemistry , Serum Albumin, Bovine/analysis , Surface Plasmon Resonance/instrumentation , Animals , Cattle , Electroosmosis/instrumentation , Electrophoresis/instrumentation , Equipment Design , Nanostructures/ultrastructure , Serum Albumin, Bovine/isolation & purification
We present metallic nanohole arrays fabricated on suspended membranes as an optofluidic substrate. Millimeter-sized suspended nanohole arrays were fabricated using nanoimprint lithography. We demonstrate refractive-index-based tuning of the optical spectra using a sucrose solution for the optimization of SERS signal intensity, leading to a Raman enhancement factor of 107. Furthermore, compared to dead-ended nanohole arrays, suspended nanohole arrays capable of flow-through detection increased the measured SERS signal intensity by 50 times. For directed transport of analytes, we present a novel methodology utilizing surface tension to generate spontaneous flow through the nanoholes with flow rates of 1 µL/min, obviating the need for external pumps or microfluidic interconnects. Using this method for SERS, we obtained a 50 times higher signal as compared to diffusion-limited transport and could detect 100 pM 4-mercaptopyridine. The suspended nanohole substrates presented herein possess a uniform and reproducible geometry and show the potential for improved analyte transport and SERS detection.
In this paper we demonstrate that rigorous high-order perturbation of surfaces (HOPS) methods coupled with analytic continuation mechanisms are particularly well-suited for the assessment and design of nanoscale devices (e.g., biosensors) that operate based on surface plasmon resonances generated through the interaction of light with a periodic (metallic) grating. In this connection we explain that the characteristics of the latter are perfectly aligned with the optimal domain of applicability of HOPS schemes, as these procedures can be shown to be the methods of choice for low to moderate wavelengths of radiation and grating roughness that is representable by a few (e.g., tens of) Fourier coefficients. We argue that, in this context, the method can, for instance, produce full and precise reflectivity maps in computational times that are orders of magnitude faster than those of alternative numerical schemes (e.g., the popular "C-method," finite differences, integral equations or finite elements). In this initial study we concentrate on the description of the basic principles that underlie the solution scheme, including those that relate to analytic continuation procedures. Within this framework, we explain how, in spite of conventional wisdom to the contrary, the resulting perturbative techniques can provide a most valuable tool for practical investigations in plasmonics. We demonstrate this with some examples that have been previously discussed in the literature (including treatments of the reflectivity and band gap structure of some simple geometries) and extend this to demonstrate the wider applicability of the proposed approach.
We demonstrate a novel scheme for plasmonic nanofocusing with internally illuminated asymmetric metallic pyramidal tips using linearly polarized light. A wafer-scale array of sharp metallic pyramids is fabricated via template stripping with films of different thicknesses on opposing pyramid facets. This structural asymmetry is achieved through a one-step angled metal deposition that does not require any additional lithography processing and when internally illuminated enables the generation of plasmons using a Kretschmann-like coupling method on only one side of the pyramids. Plasmons traveling toward the tip on one side will converge at the apex, forming a nanoscale "hotspot." The asymmetry is necessary for these focusing effects since symmetric pyramids display destructive plasmon interference at the tip. Computer simulations confirm that internal illumination with linearly polarized light at normal incidence on these asymmetric pyramids will focus optical energy into nanoscale volumes. Far-field optical experiments demonstrate large field enhancements as well as angle-dependent spectral tuning of the reradiated light. Because of the low background light levels, wafer-scale fabrication, and a straightforward excitation scheme, these asymmetric pyramidal tips will find applications in near-field optical microscopy and array-based optical trapping.
Gold/chemistry , Nanostructures/chemistry , Nanotechnology , Surface Plasmon Resonance , Light , Scattering, Radiation
Solid-state quantum emitters, such as artificially engineered quantum dots or naturally occurring defects in solids, are being investigated for applications ranging from quantum information science and optoelectronics to biomedical imaging. Recently, these same systems have also been studied from the perspective of nanoscale metrology. In this letter, we study the near-field optical properties of a diamond nanocrystal hosting a single nitrogen vacancy center. We find that the nitrogen vacancy center is a sensitive probe of the surrounding electromagnetic mode structure. We exploit this sensitivity to demonstrate nanoscale fluorescence lifetime imaging microscopy (FLIM) with a single nitrogen vacancy center by imaging the local density of states of an optical antenna.
We demonstrate the design, fabrication and characterization of a near-field plasmonic nanofocusing probe with a hybrid tip-plus-aperture design. By combining template stripping with focused ion beam lithography, a variety of aperture-based near-field probes can be fabricated with high optical performance. In particular, the combination of large transmission through a C-shaped aperture aligned to the sharp apex (<10â nm radius) of a template-stripped metallic pyramid allows the efficient delivery of light--via the C-shaped aperture--while providing a nanometric hotspot determined by the sharpness of the tip itself.
Self-assembled plasmonic nanoring cavity arrays are formed alongside the curvature of highly packed metallic nanosphere gratings. The sub-10-nm gap size is precisely tuned via atomic layer deposition and highly ordered arrays are produced over a cm-sized area. The resulting hybrid nanostructure boosts coupling efficiency of light into plasmons, and shows an improved SERS detection limit. These substrates are used for SERS detection of the biological analyte, adenine, followed by concurrent localized surface plasmon resonance sensing.
Biosensing Techniques/instrumentation , Metals/chemistry , Nanostructures/chemistry , Nanostructures/ultrastructure , Nanotechnology/instrumentation , Refractometry/instrumentation , Surface Plasmon Resonance/instrumentation , Equipment Design , Equipment Failure Analysis , Particle Size , Scattering, Radiation
With a template-stripping fabrication technique, we demonstrate the mass fabrication of high-quality, uniform, ultrasharp (10 nm) metallic probes suitable for single-molecule fluorescence imaging, tip-enhanced Raman spectroscopy (TERS), and other near-field imaging techniques. We achieve reproducible single-molecule imaging with sub-20-nm spatial resolution and an enhancement in the detected fluorescence signal of up to 200. Similar results are obtained for TERS imaging of carbon nanotubes. We show that the large apex angle (70.5°) of our pyramidal tip is well suited to scatter the near-field optical signal into the far-field, leading to larger emission enhancement and hence to a larger quantum yield. Each gold or silver pyramidal probe is used on-demand, one at a time, and the unused tips can be stored for extended times without degradation or contamination. The high yield (>95%), reproducibility, durability, and massively parallel fabrication (1.5 million identical probes over a wafer) of the probes hold promise for reliable optical sensing and detection and for cementing near-field optical imaging and spectroscopy as a routine characterization technique.
Gold/analysis , Gold/chemistry , Microscopy, Fluorescence/methods , Molecular Imaging/methods , Nanostructures/chemistry , Nanostructures/ultrastructure , Spectrum Analysis, Raman/methods , Reproducibility of Results , Sensitivity and Specificity
