Monolithic beam combined quantum cascade laser arrays with integrated arrayed waveguide gratings.

Quantum cascade lasers (QCLs) are ubiquitous mid-infrared sources owing to their flexible designs and compact footprints. Manufacturing multiwavelength QCL chips with high power levels and good beam quality is highly desirable for many applications. In this study, we demonstrate an λ ∼ 4.9 µm monolithic, wavelength beam-combined (WBC) infrared laser source by integrating on a single chip array of five QCL gain sections with an arrayed waveguide grating (AWG). Optical feedback from the cleaved facets enables lasing, whereas the integrated AWG locks the emission spectrum of each gain section to its corresponding input channel wavelength and spatially combines their signals into a single-output waveguide. Our chip features high peak power from the common aperture exceeding 0.6 W for each input channel, with a side-mode suppression ratio (SMSR) of over 27 dB when operated in pulsed mode. Our active/passive integration approach allows for a seamless transition from the QCL ridges to the AWG without requiring regrowth or evanescent coupling schemes, leading to a robust design. These results pave the way for the development of highly compact mid-IR sources suitable for applications such as hyperspectral imaging.

High-efficiency mid-infrared InGaAs/InP arrayed waveguide gratings.

Photonic integrated circuits and mid-infrared quantum cascade lasers have attracted significant attention over the years because of the numerous applications enabled by these compact semiconductor chips. In this paper, we demonstrate low loss passive waveguides and highly efficient arrayed waveguide gratings that can be used, for example, to beam combine infrared (IR) laser arrays. The waveguide structure used consists of an In0.53Ga0.47As core and InP cladding layers. This material system was chosen because of its compatibility with future monolithic integration with quantum cascade lasers. Different photonic circuits were fabricated using standard semiconductor processes, and experiments conducted with these chips demonstrated low-loss waveguides with an estimated propagation loss of ∼ 1.2 dB/cm as well as micro-ring resonators with an intrinsic Q-factor of 174,000. Arrayed waveguide gratings operating in the 5.15-5.34 µm range feature low insertion loss and non-uniformity of ∼ 0.9 dB and ∼ 0.6 dB, respectively. The demonstration of the present photonic circuits paves the path toward monolithic fabrication of compact infrared light sources with advanced functionalities beneficial to many chemical sensing and high-power applications.