A Symmetric-Actuating Linear Piezoceramic Ultrasonic Motor Capable of Producing a Scissoring Effect.

Conventionally, to produce a linear motion, one motor's stator is employed to drive one runner moving forward or backward. So far, there is almost no report of one electromechanical motor or piezoelectric ultrasonic motor that can directly generate two symmetrical linear motions, while this function is desired for precise scissoring and grasping in the minimally invasive surgery field. Herein, we report a brand-new symmetric-actuating linear piezoceramic ultrasonic motor capable of generating symmetrical linear motions of two outputs directly without additional mechanical transmission mechanisms. The key component of the motor is an (2 × 3) arrayed piezoceramic bar stator operating in the coupled resonant mode of the first longitudinal (L1) and third bending (B3) modes, leading to symmetric elliptical vibration trajectories at its two ends. A pair of microsurgical scissors is used as the end-effector, demonstrating a very promising future for high-precision microsurgical operations. The sliders of the prototype show the following features: (a) symmetrical, fast relative moving velocity (~1 m/s) outward or inward simultaneously; (b) high step resolution (40 nm); and (c) high power density (405.4 mW/cm3) and high efficiency (22.1%) that are double those of typical piezoceramic ultrasonic motors, indicating the full capacity of symmetric-actuating linear piezoceramic ultrasonic motor working in symmetric operation principle. This work also has enlightening significance for future symmetric-actuating device designs.

Designing Artificial Vibration Modes of Piezoelectric Devices Using Programmable, 3D Ordered Structure with Piezoceramic Strain Units.

Piezoelectric ceramic devices, which utilize multifarious vibration modes to realize electromechanical coupling and energy conversions, are extensively used in high-technological fields. However, the excitation of basic modes is mainly subjected to natural eigenfrequency of ceramic devices, which is related to the structure and material parameters. Herein, inspired by metamaterial theory, a programmable, 3D ordered structure with piezoceramic strain units (3D OSPSU) is developed to artificially generate basic modes in a broad frequency band other than only in narrow eigenfrequency. A (2 × 2 × 2) arrayed, co-fired, multilayer 3D OSPSU is painstakingly designed and fabricated for generating basic modes, such as flexural, extension, shear, torsion, and even coupled modes at nonresonance. To validate the 3D OSPSU method, a five-degree-of-freedom micro-nano actuating platform based on only one co-fired multilayer ceramic is constructed. The proposed methodology provides a new paradigm for creating extraordinary material properties of piezoelectric ceramics and will inspire brand-new piezoelectric device designs.

Designing Ordered Structure with Piezoceramic Actuation Units (OSPAU) for Generating Continual Nanostep Motion.

Continual precision actuations with nanoscale resolution over large ranges have extensive requirements in advanced intelligent manufacturing and precise surgical robots. To produce continual nanostep motion, conventionally, multiple pairs of piezo-actuators are employed to operate in inchworm principle under complex three- or four-phase timing signal drive. Inspired by the idea of ordered structures with functional units, a much simpler nanostep piezoelectric actuator consisting of (2 × 2) arrayed, cofired multilayer piezoceramic actuation units is developed, which operates in an artificially generated quasi shear mode (AGQSM) that is missing in natural piezoelectric ceramics. Under only one-phase square-wave voltage drive, the actuator can produce a stable, continual nanostep motion in two ways at nonresonant frequencies, and the obtained minimum step displacement is as low as 7 nm in open control, indicating its potential application as a precise finger or knife actuator in surgical robots. This work is of great guiding significance for future actuator designs using the methodology of ordered structure with piezoceramic actuation units and AGQSM.

A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion.

Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner. Traditional stacked stage method works effectively only in a local, limited range, and vibration coupling is also challenging. Here, we design a dual mechanism multimodal linear actuator (DMMLA) consisted of piezoelectric and electromagnetic costator and coslider for producing macro-, micro-, and nanomotion, respectively. A DMMLA prototype is fabricated, and each working mode is validated separately, confirming its fast motion (0~50 mm/s) in macromotion mode, micromotion (0~135 µm/s) and nanomotion (minimum step: 0~2 nm) in piezoelectric step and servomotion modes. The proposed dual mechanism design and multimodal motion method pave the way for next generation high-precision actuator development.

Designing electromechanical metamaterial with full nonzero piezoelectric coefficients.

Designing topological and geometrical structures with extended unnatural parameters (negative, near-zero, ultrahigh, or tunable) and counterintuitive properties is a big challenge in the field of metamaterials, especially for relatively unexplored materials with multiphysics coupling effects. For natural piezoelectric ceramics, only five nonzero elements in the piezoelectric matrix exist, which has impeded the design and application of piezoelectric devices for decades. Here, we introduce a methodology, inspired by quasi-symmetry breaking, realizing artificial anisotropy by metamaterial design to excite all the nonzero elements in contrast to zero values in natural materials. By elaborately programming topological structures and geometrical dimensions of the unit elements, we demonstrate, theoretically and experimentally, that tunable nonzero or ultrahigh values of overall effective piezoelectric coefficients can be obtained. While this work focuses on generating piezoelectric parameters of ceramics, the design principle should be inspirational to create unnatural apparent properties of other multiphysics coupling metamaterials.