Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition.

A low-cost method of fabrication of high aspect ratio nano-channels by thermal nano-imprinting and Parylene deposition is proposed. SU-8 photoresist nano-channels were first manufactured by thermal nano-imprinting, and Parylene deposition was carried out to reduce the width of the nano-channels and increase the aspect ratio. During the process, the side walls of the SU-8 nano-channels were covered with the Parylene film, reducing the width of the nano-channels, and the depth of the channels increased due to the thickness of the Parylene film deposited on the surface of the SU-8 nano-channels, more so than that at the bottom. The influence of Parylene mass on the size of nano-channels was studied by theoretical analysis and experiments, and the deposition pressure of Parylene was optimized. The final high aspect ratio nano-channels are 46 nm in width and 746 nm in depth, of which the aspect ratio is 16. This simple and efficient method paves the way for the production of high aspect ratio nano-channels.

The Relevant Approaches for Aligning Carbon Nanotubes.

Carbon-nanotube (CNT) is a promising material owing to its compelling mechanical, thermal and electrical properties and has been applied in a broad variety of fields such as composite, fiber, film and microelectronic. Although the introductions of CNT have brought huge improvement for many applications, these properties of macrostructures prepared by CNTs still cannot meet those of individual CNT. Disordered alignment of CNTs in the matrix results in degradation of performance and hinders further application. Nowadays, quantities of methods are being researched to realize alignments of CNTs. In this paper, we introduce the application of CNTs and review some typical pathways for vertical and horizontal alignment, including chemical vapor disposition, vertical self-assembly, external force, film assisted, electric field, magnetic field and printing. Besides that, advantages and disadvantages of specific methods are also discussed. We believe that these efforts will contribute to further understanding the nature of aligned CNT and generating more effective ideas to the relevant workers.

A review on carbon quantum dots: Synthesis, photoluminescence mechanisms and applications.

Carbon quantum dots (CQDs), having outstanding biocompatibility, attractive catalytic performance, excellent optical properties, and valuable environment friendliness, are emerging as a new paradigm to design luminescent devices and show great potential in application fields such as biomedical sensors, optical and photonic devices. Furthermore, CQDs are known as one of the most promising carbon-based nanomaterials in the 21st century. Therefore, they have attracted a lot of attention since they were first discovered in 2004. In this review, we explain the accepted photoluminescence mechanism of CQDs, including fluorescence and phosphorescence. There are two main types of synthesis strategies: top-down approach and bottom-up approach. At the same time, the main application fields, including ion detection, anti-counterfeiting, biological imaging, food safety, sensors, lubrication additives, are reviewed. Finally, the existing bottlenecks, pending problems and prospects for the future of CQDs are discussed.

Advances of Commercial and Biological Materials for Electron Transport Layers in Biological Applications.

Electron transport layer (ETL), one of the important layers for high-performing perovskite solar cells (PSCs), also has great potential in bioengineering applications. It could be used for biological sensors, biological imaging, and biomedical treatments with high resolution or efficiency. Seldom research focused on the development of biological material for ETL and their application in biological uses. This review will introduce commercial and biological materials used in ETL to help readers understand the working mechanism of ETL. And the ways to prepare ETL at low temperatures will also be introduced to improve the performance of ETL. Then this review summarizes the latest research on material doping, material modification, and bilayer ETL structures to improve the electronic transmission capacity of ETLs. Finally, the application of ETLs in bioengineering will be also shown to demonstrate that ETLs and their used material have a high potential for biological applications.

A Simple and Low-Cost Method for Fabrication of Polydimethylsiloxane Microfludic Chips.

The conventional fabrication methods for enrichment microfluidic devices require cleanroom, which are costly and time-consuming. Developing a facile and low-cost method to fabricate microfluidic chips could stimulate the progress of the applications of those chips. Here, we present an easy method for fabrication of a complete PDMS (Polydimethylsiloxane) microfluidic chip used for ion and protein enrichment. The method consists of three main fabrication steps: PDMS microchannels ablation by co2 laser, nation membrane deposition, and oxygen plasma assist bonding under pressure. To fabricate a desired microchannel, the laser ablation parameters, containing laser power and ablation speed, were analyzed. The parameters for oxygen plasma assist bonding were also investigated to improve the bonding quality of the chips (low dimension loss and high bonding strength). The following Rhodamine B enrichment tests demonstrate that the presented method allows fabrication of microfluidic chips with precise dimensions and leakage free.

Fabrication of 2D silicon nano-mold by side etch lift-off method.

Nano-imprint technology is a method of nano-pattern reproduction, has the characteristics of high resolution, high throughput, and low-cost. It can reduce the complexity and cost of the equipment while improving the resolution, which considered a promising industrial production technology. The key to nanoimprinting lies in the mold, and the quality of the mold directly determines the quality of the imprinted graphics. Here, a method for fabricating sub-100 nm concave 2D silicon nano-mold by side etch lift-off is proposed. The effects of different wet etching time and the metal deposition angle on the width of nanochannels were studied. The measurement result of dry etching shows that on the entire 4 inch silicon wafer, the width of the nanochannel varies by 4% and the depth by 2%. The width of the nanochannel between chips varies by 0.7%, and the depth variation is 1%. With this new method, high-precision and large-scale silicon nano-mold can be produced, which has great potential for realizing high-precision and low-cost manufacturing of nano devices.

A Novel Room-Temperature Bonding Method Based on Electrohydrodynamic Printing.

Microfluidic chips made by traditional materials (glass and silicon) are still important for fluorescence tests, biocompatible experiments, and high temperature applications. However, the majority of the present bonding methods suffer from ultra-clean requirement, complicated fabrication process, and low production efficiency. In the present work, an Electrohydrodynamic printing assist bonding method was proposed. By this method, the ultraviolet-cured-glue dots were printed onto the silicon substrate, and then the patterned glass and silicon substrate can be bonded together at room temperature. The influence of printing condition (nozzle inner-diameter, applied voltage, printing height, and flow rate) on the diameter of printed dot was analyzed by experiments. By the optimized printing condition, the glass-silicon microfluidic chip can be well bonded. The bonding strength and leakage test demonstrated the high bonding quality of the microfluidic chip (bonding strength of 28 MPa and leakage pressure of 3.5 MPa).

The Fabrication of Polymethyl Methacrylate Nozzles for Electrohydrodynamic Printing.

Electrohydrodynamic (EHD) jet printing enables rapid prototyping high-resolution and low-cost lines with width of micrometer or even nanometer. However, EHD printing always suffers from nozzle clogging when the nozzle inner-diameter decrease to micro-scale. Thus fabrication of low cost nozzles becomes significantly important. In this work, 50 µm wide and 12.5 µm deep PMMA (Polymethyl Methacrylate) nozzles were fabricated without using traditional expensive glass capillary pulling approach. To replicate PMMA nozzle with high precision, the embossing condition was optimized according to replication precision, the deformation rate, and maximum stress. To nearly fully bond PMMA nozzle with intact PMMA microchannel, the bonding condition was optimized according the bonding rate and dimension loss of PMMA microchannel. The availability of the fabricated PMMA nozzle was finally verified by EHD printing experiments.

Structure-Induced Method for Circular Cross-Sectional Nanochannel Fabrication.

Nanochannels are key elements in building nano-systems for many applications, such as ion transportation, single molecule manipulation, and protein analysis. Commercially manufacturing of nanosystems lies in the development of a low-cost and concise method for nanochannels fabrication. In the present work, a novel PDMS nanochannels fabrication method was proposed based on PDMS spin-coating on a structure-induced wafer. All the influencing parameters which can affect the shape and size of PDMS nanochannels were optimized by proposed simulation method. The comparison between experiments and simulation showed good agreement and confirmed the developed simulation method. By the optimized conditions, 64 nm wide and 37 nm deep PDMS nanochannels can be fabricated.

Fast Microfluidic Chip Fabrication Technique by Laser Erosion and Sticky Tape Assist Bonding Technique.

Disposable microfluidic chips are becoming increasingly important for biological and chemical researches. Future advances in their commercial applications depends on the mass fabrication of low cost microfluidic chip. In this study we are presenting a simple, low cost and fast way of fabricating PMMA microfluidic chips based on laser erosion. The influence of the width and depth of PMMA microchannels on erosion current and erosion times was analyzed. To bond the open PMMA microchannels at low pressure and temperature, sticky tape assist bonding method was proposed. By this method, the microfluidic chip can be fully sealed without using any equipment. The leakage test indicated that the bonded microfluidic chip can endure an pressure up to 0.82 MPa.

Polycarbonate Nanofluidic Chip Fabrication Technique by Hot Embossing and Thermal Bonding.

Nanofluidic devices are becoming increasingly critical for medical, chemical and biological applications. In this paper, a 2D Polycarbonate (PC) nanofluidic chip was fabricated by hot embossing and thermal bonding method. In this paper, the effect of the hot embossing parameters on the replication precision of 2D PC nanochannels was investigated by finite element method. To increase the bonding rate of the chip, the parameters of the thermal bonding process were optimized. Under the optimized parameters the 2D PC nanofluidic chip was successfully fabricated. The results show that the replication precision of the nanochannels can be as high as 97% and the bonding rate of the chip can be 96%. The fluorescent images demonstrate that there is no block and leakage through the whole microchannels and nanochannels. It is expected that this fabrication method has great potential to fabricate 2D nanofluidic chip with low cost and high precision.

Low auto-fluorescence fabrication methods for plastic nanoslits.

Plastic nanofluidic devices are becoming increasingly important for biological and chemical applications. However, they suffer from high auto-fluorescence when used for on-chip optical detection. In this study, the auto-fluorescence problem of plastic nanofluidic devices was remedied by newly developed fabrication methods that minimise their auto-fluorescence: one by depositing a gold (Au) layer on them, the other by making them ultra-thin. In the first method, the Au layer [minimum thickness is 40 nm on 150 µm SU-8, 50 nm on 1 mm polyethylene terephthalate (PET), and 40 on 2 nm polymethyl methacrylate (PMMA)] blocks the auto-fluorescence of the polymer; in the second method, auto-fluorescence is minimised by making the chips ultra-thin, selected operating thickness of SU-8 is 20 µm, for PET it is 150 µm, and for PMMA it is 0.8 mm.

A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diameter substrate.

A novel low-cost 2D silicon nano-mold fabrication technique was developed based on Cu inclined-deposition and Ar(+) (argon ion) etching. With this technique, sub-100 nm 2D (two dimensional) nano-channels can be etched economically over the whole area of a 4 inch n-type <100> silicon wafer. The fabricating process consists of only 4 steps, UV (Ultraviolet) lithography, inclined Cu deposition, Ar(+) sputter etching, and photoresist &Cu removing. During this nano-mold fabrication process, we investigated the influence of the deposition angle on the width of the nano-channels and the effect of Ar(+) etching time on their depth. Post-etching measurements showed the accuracy of the nanochannels over the whole area: the variation in width is 10%, in depth it is 11%. However, post-etching measurements also showed the accuracy of the nanochannels between chips: the variation in width is 2%, in depth it is 5%. With this newly developed technology, low-cost and large scale 2D nano-molds can be fabricated, which allows commercial manufacturing of nano-components over large areas.

Two dimensional PMMA nanofluidic device fabricated by hot embossing and oxygen plasma assisted thermal bonding methods.

A method for obtaining a low-cost and high-replication precision two-dimensional (2D) nanofluidic device with a polymethyl methacrylate (PMMA) sheet is proposed. To improve the replication precision of the 2D PMMA nanochannels during the hot embossing process, the deformation of the PMMA sheet was analyzed by a numerical simulation method. The constants of the generalized Maxwell model used in the numerical simulation were calculated by experimental compressive creep curves based on previously established fitting formula. With optimized process parameters, 176 nm-wide and 180 nm-deep nanochannels were successfully replicated into the PMMA sheet with a replication precision of 98.2%. To thermal bond the 2D PMMA nanochannels with high bonding strength and low dimensional loss, the parameters of the oxygen plasma treatment and thermal bonding process were optimized. In order to measure the dimensional loss of 2D nanochannels after thermal bonding, a dimension loss evaluating method based on the nanoindentation experiments was proposed. According to the dimension loss evaluating method, the total dimensional loss of 2D nanochannels was 6 nm and 21 nm in width and depth, respectively. The tensile bonding strength of the 2D PMMA nanofluidic device was 0.57 MPa. The fluorescence images demonstrate that there was no blocking or leakage over the entire microchannels and nanochannels.

A novel hybrid patterning technique for micro and nanochannel fabrication by integrating hot embossing and inverse UV photolithography.

Nanofluidic devices with micro and nanostructures are becoming increasingly important for biological and chemical applications. However, the majority of the present fabrication methods suffer from a low pattern transfer quality during the simultaneous embossing of the microscale and nanoscale patterns into a thermoplastic polymer due to insufficient polymer flow. In this work, a novel hybrid patterning technique, integrating hot embossing and inverse ultraviolet (UV) photolithography, is developed to fabricate micro and nanochannels with a high replication precision of the SU-8 layer. The influence of embossing temperature and time on the replication precision was investigated. The effect of UV lithography parameters on the micro and nanochannel pattern was analyzed. To improve the SU-8 bonding strength, the influence of the O2 plasma treatment parameters on the water contact angles of the exposed and unexposed SU-8 layer were studied. A complete SU-8 nanofluidic chip with 130 nm wide and 150 nm deep nanochannels was successfully fabricated with a replication precision of 99.5%. Compared with most of the current processing methods, this fabrication technique has great potential due to its low cost and high pattern transfer quality of the SU-8 micro and nanochannels.

Fabrication of two dimensional polyethylene terephthalate nanofluidic chip using hot embossing and thermal bonding technique.

We present in this paper a method for obtaining a low cost and high replication precision 2D (two dimensional) nanofluidic chip with a PET (polyethylene terephthalate) sheet, which uses hot embossing and a thermal bonding technique. The hot embossing process parameters were optimized by both experiments and the finite element method to improve the replication precision of the 2D nanochannels. With the optimized process parameters, 174.67 ± 4.51 nm wide and 179.00 ± 4.00 nm deep nanochannels were successfully replicated into the PET sheet with high replication precision of 98.4%. O2 plasma treatment was carried out before the bonding process to decrease the dimension loss and improve the bonding strength of the 2D nanofluidic chip. The bonding parameters were optimized by bonding rate of the nanofluidic chip. The experiment results show that the bonding strength of the 2D PET nanofluidic chip is 0.664 MPa, and the total dimension loss of 2D nanochannels is 4.34 ± 7.03 nm and 18.33 ± 9.52 nm, in width and depth, respectively. The fluorescence images demonstrate that there is no blocking or leakage over the entire micro- and nanochannels. With this fabrication technology, low cost polymer nanochannels can be fabricated, which allows for commercial manufacturing of nano-components.