Wafer-scale fabrication of fused silica chips for low-noise recording of resistive pulses through nanopores.

This paper presents a maskless method to manufacture fused silica chips for low-noise resistive-pulse sensing. The fabrication includes wafer-scale density modification of fused silica with a femtosecond-pulsed laser, low-pressure chemical vapor deposition (LPVCD) of silicon nitride (SiN x ) and accelerated chemical wet etching of the laser-exposed regions. This procedure leads to a freestanding SiN x window, which is permanently attached to a fused silica support chip and the resulting chips are robust towards Piranha cleaning at ∼80 °C. After parallel chip manufacturing, we created a single nanopore in each chip by focused helium-ion beam or by controlled breakdown. Compared to silicon chips, the resulting fused silica nanopore chips resulted in a four-fold improvement of both the signal-to-noise ratio and the capture rate for signals from the translocation of IgG1 proteins at a recording bandwidth of 50 kHz. At a bandwidth of ∼1 MHz, the noise from the fused silica nanopore chips was three- to six-fold reduced compared to silicon chips. In contrast to silicon chips, fused silica chips showed no laser-induced current noise-a significant benefit for experiments that strive to combine nanopore-based electrical and optical measurements.

Fabrication of multiple nanopores in a SiNx membrane via controlled breakdown.

This paper reports a controlled breakdown (CBD) method to fabricate multiple nanopores in a silicon nitride (SiNx) membrane with control over both nanopore count and nanopore diameter. Despite the stochastic process of the breakdown, we found that the nanopores created via CBD, tend to be of the same diameter. We propose a membrane resistance model to explain and control the multiple nanopores forming in the membrane. We prove that the membrane resistance can reflect the number of nanopores in the membrane and that the diameter of the nanopores is controlled by the exposure time and strength of the electric field. This controllable multiple nanopore formation via CBD avoids the utilization of complicated instruments and time-intensive manufacturing. We anticipate CBD has the potential to become a nanopore fabrication technique which, integrated into an optical setup, could be used as a high-throughput and multichannel characterization technique.

Nanopore fabrication by heating Au particles on ceramic substrates.

We found that gold nanoparticles, when heated to close to their melting point on substrates of amorphous SiO2 or amorphous Si3N4, move perpendicularly into the substrate. Dependent on applied temperatures, particles can become buried or leave nanopores of extreme aspect ratio (diameter ≅ 25 nm, length up to 800 nm). The process can be understood as driven by gold evaporation and controlled by capillary forces and can be controlled by temperature programming and substrate choice.

High-efficiency ballistic electrostatic generator using microdroplets.

The strong demand for renewable energy promotes research on novel methods and technologies for energy conversion. Microfluidic systems for energy conversion by streaming current are less known to the public, and the relatively low efficiencies previously obtained seemed to limit the further applications of such systems. Here we report a microdroplet-based electrostatic generator operating by an acceleration-deceleration cycle ('ballistic' conversion), and show that this principle enables both high efficiency and compact simple design. Water is accelerated by pumping it through a micropore to form a microjet breaking up into fast-moving charged droplets. Droplet kinetic energy is converted to electrical energy when the charged droplets decelerate in the electrical field that forms between membrane and target. We demonstrate conversion efficiencies of up to 48%, a power density of 160 kW m(-2) and both high- (20 kV) and low- (500 V) voltage operation. Besides offering striking new insights, the device potentially opens up new perspectives for low-cost and robust renewable energy conversion.

Highly enhanced energy conversion from the streaming current by polymer addition.

In this contribution, we present for the first time the experimental results of energy conversion from the streaming current when a polymer is added to the working solution. We added polyacrylic acid (PAA) in concentrations of 200 ppm to 4000 ppm to a KCl solution. By introducing PAA, the input power, which is the product of volumetric flow rate and the applied pressure, reduced rapidly as compared to the case of using only a normal viscous electrolyte KCl solution. The output power at the same time remained largely constant, whereby an increase of the streaming current and a decrease of the streaming potential simultaneously occurred. These combined factors led to the massive increase of the energy conversion efficiency. Particularly, the results showed that when PAA was in a 0.01 mM KCl solution, the energy conversion efficiency of the system was enhanced by a factor of 447 (±2%), as compared to the case of the solution containing only 0.01 mM KCl. An enhancement factor of 249 (±4%) was also observed when PAA was added to the higher ionic strength background solution, 1 mM KCl. This finding can have practical use in microchannel-array energy conversion systems. When, instead of the negatively charged PAA, a non-ionic polymer polyethylene oxide (PEO) was added to the solution, no efficiency increase was observed, probably due to polymer wall adsorption.