Laser Actuated Microgripper Using Optimized Chevron-Shaped Actuator.

In this paper, we propose a laser actuated microgripper that can be activated remotely for micromanipulation applications. The gripper is based on an optothermally actuated polymeric chevron-shaped structure coated with optimized metallic layers to enhance its optical absorbance. Gold is used as a metallic layer due to its good absorption of visible light. The thermal deformation of the chevron-shaped actuator with metallic layers is first modeled to identify the parameters affecting its behavior. Then, an optimal thickness of the metallic layers that allows the largest possible deformation is obtained and compared with simulation results. Next, microgrippers are fabricated using conventional photolithography and metal deposition techniques for further characterization. The experiments show that the microgripper can realize an opening of 40 µm, a response time of 60 ms, and a generated force in the order of hundreds of µN. Finally, a pick-and-place experiment of 120 µm microbeads is conducted to confirm the performance of the microgripper. The remote actuation and the simple fabrication and actuation of the proposed microgripper makes it a highly promising candidate to be utilized as a mobile microrobot for lab-on-chip applications.

SAW RFID Devices Using Connected IDTs as an Alternative to Conventional Reflectors for Harsh Environments.

Remote interrogation of surface acoustic wave identification tag (ID-tags) imposes a high signal amplitude which is related to a high coupling coefficient value ( K2 ) and low propagation losses ( α ). In this article, we propose and discuss an alternative configuration to the standard one. Here, we replaced the conventional configuration, i.e., one interdigital transducer (IDT) and several reflectors, by a series of electrically connected IDTs. The goal is to increase the amplitude of the detected signal using direct transmission between IDTs instead of the reflection from passive reflectors. This concept can, therefore, increase the interrogation scope of ID-tags made on a conventional substrate with high K2 value. Moreover, it can also be extended to suitable substrates for harsh environments, such as high-temperature environments: the materials used exhibit limited performances (low K2 value and relatively high propagation losses) and are, therefore, rarely used for identification applications. The concept was first tested and validated using the lithium niobate 128° Y-X cut substrate, which is commonly used in ID-tags. A good agreement between experimental and numerical results was obtained for the promising concept of connected IDTs. The interesting features of the structure were also validated using a langasite substrate, which is well-known to operate at very high temperatures. Performances of both substrates (lithium niobate and langasite) were tested with an in situ RF characterization up to 600 °C. Unexpected results regarding the resilience of devices based on congruent lithium niobate were obtained.

A LN/Si-Based SAW Pressure Sensor.

Surface Acoustic Wave (SAW) sensors are small, passive and wireless devices. We present here the latest results obtained in a project aimed at developing a SAW-based implantable pressure sensor, equipped with a well-defined, 30 µm-thick, 4.7 mm-in-diameter, Lithium Niobate (LN) membrane. A novel fabrication process was used to solve the issue of accurate membrane etching in LN. LN/Si wafers were fabricated first, using wafer-bonding techniques. Grinding/polishing operations followed, to reduce the LN thickness to 30 µm. 2.45 GHz SAW Reflective Delay-Lines (R-DL) were then deposited on LN, using a combination of e-beam and optical lithography. The R-DL was designed in such a way as to allow for easy temperature compensation. Eventually, the membranes were etched in Si. A dedicated set-up was implemented, to characterize the sensors versus pressure and temperature. The achieved pressure accuracy is satisfactory (±0.56 mbar). However, discontinuities in the response curve and residual temperature sensitivity were observed. Further experiments, modeling and simulations were used to analyze the observed phenomena. They were shown to arise essentially from the presence of growing thermo-mechanical strain and stress fields, generated in the bimorph-like LN/Si structure, when the temperature changes. In particular, buckling effects explain the discontinuities, observed around 43 °C, in the response curves. Possible solutions are suggested and discussed.