Enhancing metasurface fabricability through minimum feature size enforcement.

The metasurfaces have shown great potential for miniaturizing conventional optics while offering extended flexibility. Recently, there has been considerable interest in using algorithms to generate meta-atom shapes for these metasurfaces, as they offer vast design freedom and not biased by the human intuition. However, these complex designs significantly increase the difficulty of fabrication. To address this, we introduce a design process that rigorously enforces the fabricability of both the material-filled (fill) and empty (void) regions in a metasurface design. This process takes into account specific constraints regarding the minimum feature size for each region. Additionally, it corrects any violations of these constraints across the entire device, ensuring only minimal impact on performance. Our method provides a practical way to create metasurface designs that are easy to fabricate, even with complex shapes, hence improving the overall production yield of these advanced meta-optical components.

Stretchable Ultrasound Metalens for Biomedical Zoom Imaging and Bone Quality Assessment with Subwavelength Resolution.

Ultrasound imaging is extensively used in biomedical science and clinical practice. Imaging resolution and tunability of imaging plane are key performance indicators, but both remain challenging to be improved due to the longer wavelength compared with light and the lack of zoom lens for ultrasound. Here, the ultrasound zoom imaging based on a stretchable planar metalens that simultaneously achieves the subwavelength imaging resolution and dynamic control of the imaging plane is reported. The proposed zoom imaging ultrasonography enables precise bone fracture diagnosis and comprehensive osteoporosis assessment. Millimeter-scale microarchitectures of the cortical bones at different depths can be selectively imaged with a 0.6-wavelength resolution. The morphological features of bone fractures, including the shape, size and position, are accurately detected. Based on the extracted ultrasound information of cancellous bones with healthy matrix, osteopenia and osteoporosis, a multi-index osteoporosis evaluation method is developed. Furthermore, it provides additional biological information in aspects of bone elasticity and attenuation to access the comprehensive osteoporosis assessment. The soft metalens also features flexibility and biocompatibility for preferable applications on wearable devices. This work provides a strategy for the development of high-resolution ultrasound biomedical zoom imaging and comprehensive bone quality diagnosis system.

Stretchable Dual-Axis Terahertz Bifocal Metalens with Flexibly Polarization-Dependent Focal Position and Direction.

Varifocal lenses are essential components in any optical system, while traditional lenses suffer from bulky volume, fixed focal position, and limited working spectra. As well-arranged subwavelength structures, metalenses overcome the abovementioned obstacles and exhibit merits of ultrathin thickness, flexible focal length, and multifocus. The electromagnetic responses of metasurfaces, including metalens, rely on the phase distributions of phase-shifting elements. The steerable focal direction is investigated to obtain the combinations of focusing and anomalous refraction phase distribution. To fully explore the flexibility of focal length and direction, seven designs of double layers of terahertz (THz) bifocal metalenses are proposed and investigated in this study. They exhibit dependent and independent relationships of tunable focal length and direction with flexible tuning mechanisms. Along with polarization multiplexing, two different focuses can be obtained when the incident waves are x-linear and y-linear polarization states, respectively. The simulation results agreed well with the theoretical predictions. These designs provide a new method to modulate the focal position precisely with promising applications in wireless communication, imaging, and on-chip optical integration systems.

Achromatic and Coma-Corrected Hybrid Meta-Optics for High-Performance Thermal Imaging.

Long-wave infrared (LWIR) imaging, or thermal imaging, is widely applied in night vision and security monitoring. However, the widespread use of LWIR imagers is impeded by their bulky size, considerable weight, and high cost. While flat meta-optics present a potential solution to these limitations, existing pure LWIR meta-optics face constraints such as severe chromatic or coma aberrations. Here, we introduce an approach utilizing large-scale hybrid meta-optics to address these challenges and demonstrate the achromatic, coma-corrected, and polarization-insensitive thermal imaging. The hybrid metalens doublet is composed of a metasurface corrector and a refractive lens, featuring a full field-of-view angle surpassing 20° within the 8-12 µm wavelength range. Employing this hybrid metalens doublet, we showcase high-performance thermal imaging capabilities both indoors and outdoors, effectively capturing ambient thermal radiation. The proposed hybrid metalens doublet holds considerable promise for advancing miniaturized, lightweight, and cost-effective LWIR optical imaging systems.

Eagle-Eye Inspired Meta-Device for Phase Imaging.

The dual-focus vision observed in eagles' eyes is an intriguing phenomenon captivates scientists since a long time. Inspired by this natural occurrence, the authors' research introduces a novel bifocal meta-device incorporating a polarized camera capable of simultaneously capturing images for two different polarizations with slightly different focal distances. This innovative approach facilitates the concurrent acquisition of underfocused and overfocused images in a single snapshot, enabling the effective extraction of quantitative phase information from the object using the transport of intensity equation. Experimental demonstrations showcase the application of quantitative phase imaging to artificial objects and human embryonic kidney cells, particularly emphasizing the meta-device's relevance in dynamic scenarios such as laser-induced ablation in human embryonic kidney cells. Moreover, it provides a solution for the quantification during the dynamic process at the cellular level. Notably, the proposed eagle-eye inspired meta-device for phase imaging (EIMPI), due to its simplicity and compact nature, holds promise for significant applications in fields such as endoscopy and headsets, where a lightweight and compact setup is essential.

Linear Electro-Optic Effect in 2D Ferroelectric for Electrically Tunable Metalens.

The advent of 2D ferroelectrics, characterized by their spontaneous polarization states in layer-by-layer domains without the limitation of a finite size effect, brings enormous promise for applications in integrated optoelectronic devices. Comparing with semiconductor/insulator devices, ferroelectric devices show natural advantages such as non-volatility, low energy consumption and high response speed. Several 2D ferroelectric materials have been reported, however, the device implementation particularly for optoelectronic application remains largely hypothetical. Here, the linear electro-optic effect in 2D ferroelectrics is discovered and electrically tunable 2D ferroelectric metalens is demonstrated. The linear electric-field modulation of light is verified in 2D ferroelectric CuInP2S6. The in-plane phase retardation can be continuously tuned by a transverse DC electric field, yielding an effective electro-optic coefficient rc of 20.28 pm V-1. The CuInP2S6 crystal exhibits birefringence with the fast axis oriented along its (010) plane. The 2D ferroelectric Fresnel metalens shows efficacious focusing ability with an electrical modulation efficiency of the focusing exceeding 34%. The theoretical analysis uncovers the origin of the birefringence and unveil its ultralow light absorption across a wide wavelength range in this non-excitonic system. The van der Waals ferroelectrics enable room-temperature electrical modulation of light and offer the freedom of heterogeneous integration with silicon and another material system for highly compact and tunable photonics and metaoptics.

A Fully Metaoptical Zoom Lens with a Wide Range.

Metalenses are typically designed for a fixed focal length, restricting their functionality to static scenarios. Various methods have been introduced to achieve the zoom function in metalenses. These methods, however, have a very limited zoom range, or they require additional lenses to achieve direct imaging. Here, we demonstrate a zoom metalens based on axial movement that performs both the imaging and the zoom function. The key innovation is the use of a polynomial phase profile that mimics an aspheric lens, which allows an extended depth of focus, enabling a large zoom range. Experimental results show that this focal length variation, combined with the extended depth of focus, translates into an impressive zoom range of 11.9× while maintaining good imaging quality. We see applications for such a zoom metalens in surveillance cameras of drones or microrobots to reduce their weight and volume, thus enabling more flexible application scenarios.

The Effect of Height Error on Performance of Propagation Phase-Based Metalens.

Metalenses, as a new type of planar optical device with flexible design, play an important role in miniaturized and integrated optical devices. Propagation phase-based metalenses, known for their low loss and extensive design flexibility, are widely utilized in optical imaging and optical communication. However, fabrication errors introduced by thin-film deposition and etching processes inevitably result in variations in the height of the metalens structure, leading to the fabricated devices not performing as expected. Here, we introduce a reflective TiO2 metalens based on the propagation phase. Then, the relationship between the height variation and the performance of the metalens is explored by using the maximum phase error. Our results reveal that the height error of the unit structure affects the phase rather than the amplitude. The focusing efficiency of our metalens exhibits robustness to structural variations, with only a 5% decrease in focusing efficiency when the height varies within ±8% of the range. The contents discussed in this paper provide theoretical guidance for the unit design of the propagation phase-based metalens and the determination of its allowable fabrication error range, which is of great significance for low-cost and high-efficiency manufacturing.

Full-Color Imaging System Based on the Joint Integration of a Metalens and Neural Network.

Lenses have been a cornerstone of optical systems for centuries; however, they are inherently limited by the laws of physics, particularly in terms of size and weight. Because of their characteristic light weight, small size, and subwavelength modulation, metalenses have the potential to miniaturize and integrate imaging systems. However, metalenses still face the problem that chromatic aberration affects the clarity and accuracy of images. A high-quality image system based on the end-to-end joint optimization of a neural network and an achromatic metalens is demonstrated in this paper. In the multi-scale encoder-decoder network, both the phase characteristics of the metalens and the hyperparameters of the neural network are optimized to obtain high-resolution images. The average peak-signal-to-noise ratio (PSNR) and average structure similarity (SSIM) of the recovered images reach 28.53 and 0.83. This method enables full-color and high-performance imaging in the visible band. Our approach holds promise for a wide range of applications, including medical imaging, remote sensing, and consumer electronics.

In Vivo Intelligent Fluorescence Endo-Microscopy by Varifocal Meta-Device and Deep Learning.

Endo-microscopy is crucial for real-time 3D visualization of internal tissues and subcellular structures. Conventional methods rely on axial movement of optical components for precise focus adjustment, limiting miniaturization and complicating procedures. Meta-device, composed of artificial nanostructures, is an emerging optical flat device that can freely manipulate the phase and amplitude of light. Here, an intelligent fluorescence endo-microscope is developed based on varifocal meta-lens and deep learning (DL). The breakthrough enables in vivo 3D imaging of mouse brains, where varifocal meta-lens focal length adjusts through relative rotation angle. The system offers key advantages such as invariant magnification, a large field-of-view, and optical sectioning at a maximum focal length tuning range of ≈2 mm with 3 µm lateral resolution. Using a DL network, image acquisition time and system complexity are significantly reduced, and in vivo high-resolution brain images of detailed vessels and surrounding perivascular space are clearly observed within 0.1 s (≈50 times faster). The approach will benefit various surgical procedures, such as gastrointestinal biopsies, neural imaging, brain surgery, etc.

Design and Analysis of the Dual-Band Far-Field Super-Resolution Metalens with Large Aperture.

The resolving power of metalens telescopes rely on their aperture size. Flat telescopes are advancing with the research on super-resolution confocal metalenses with large aperture. However, the aperture sizes of metalenses are usually bound within hundreds of micrometers due to computational and fabrication challenges, limiting their usage on practical optical devices like telescopes. In this work, we demonstrated a two-step designing method for the design of dual-band far-field super-resolution metalens with aperture sizes from the micro-scale to macro-scale. By utilizing two types of inserted unit cells, the phase profile of a dual-wavelength metalens with a small aperture of 100 µm was constructed. Through numerical simulation, the measured FWHM values of the focal spots of 5.81 µm and 6.81 µm at working wavelengths of 632.8 nm and 1265.6 nm were found to all be slightly smaller than the values of 0.61 λ/NA, demonstrating the super-resolution imaging of the designed metalens. By measuring the optical power ratio of the focal plane and the incident plane, the focusing efficiencies were 76% at 632.8 nm and 64% at 1265.6 nm. Based on the design method for small-aperture metalens, far-field imaging properties through the macro metalens with an aperture of 40 mm were simulated by using the Huygens-Fresnel principle. The simulation results demonstrate confocal far-field imaging behavior at the target wavelengths of 632.8 nm and 1265.6 nm, with a focal length of 200 mm. The design method for dual-band far-field super-resolution metalens with a large aperture opens a door towards the practical applications in the dual-band space telescope system.

All-Glass 100 mm Diameter Visible Metalens for Imaging the Cosmos.

Metasurfaces, optics made from subwavelength-scale nanostructures, have been limited to millimeter-sizes by the scaling challenge of producing vast numbers of precisely engineered elements over a large area. In this study, we demonstrate an all-glass 100 mm diameter metasurface lens (metalens) comprising 18.7 billion nanostructures that operates in the visible spectrum with a fast f-number (f/1.5, NA = 0.32) using deep-ultraviolet (DUV) projection lithography. Our work overcomes the exposure area constraints of lithography tools and demonstrates that large metasurfaces are commercially feasible. Additionally, we investigate the impact of various fabrication errors on the imaging quality of the metalens, several of which are specific to such large area metasurfaces. We demonstrate direct astronomical imaging of the Sun, the Moon, and emission nebulae at visible wavelengths and validate the robustness of such metasurfaces under extreme environmental thermal swings for space applications.

Metalens for Accelerated Optoelectronic Edge Detection under Ambient Illumination.

Analog systems may allow image processing, such as edge detection, with low computational power. However, most demonstrated analog systems, based on either conventional 4-f imaging systems or nanophotonic structures, rely on coherent laser sources for illumination, which significantly restricts their use in routine imaging tasks with ambient, incoherent illumination. Here, we demonstrated a metalens-assisted imaging system that can allow optoelectronic edge detection under ambient illumination conditions. The metalens was designed to generate polarization-dependent optical transfer functions (OTFs), resulting in a synthetic OTF with an isotropic high-pass frequency response after digital subtraction. We integrated the polarization-multiplexed metalens with a polarization camera and experimentally demonstrated single-shot edge detection of indoor and outdoor scenes, including a flying airplane, under ambient sunlight illumination. The proposed system showcased the potential of using polarization multiplexing for the construction of complex optical convolution kernels toward accelerated machine vision tasks such as object detection and classification under ambient illumination.

Broadband Achromatic Imaging of a Metalens with Optoelectronic Computing Fusion.

The remarkable ultrathin ability of metalenses gives them potential as a next-generation imaging candidate. However, the inherent chromatic aberration of metalenses restricts their widespread application. We present an achromatic metalens with optoelectronic computing fusion (OCF) to mitigate the impact of chromatic aberration and simultaneously avoid the significant challenges of nanodesign, nanofabrication, and mass production of metalenses, a method different from previous methods. Leveraging the nonlinear fitting, we demonstrate that OCF can effectively learn the chromatic aberration mapping of metalens and thus restore the chromatic aberration. In terms of the peak signal-to-noise ratio index, there is a maximum improvement of 12 dB, and ∼8 ms is needed to correct the chromatic aberration. Furthermore, the edge extraction of images and super-resolution reconstruction that effectively enhances resolution by a factor of 4 are also demonstrated with OCF. These results offer the possibility of applications of metalenses in mobile cameras, virtual reality, etc.

Meta-Lens Particle Image Velocimetry.

Fluid flow behavior is visualized through particle image velocimetry (PIV) for understanding and studying experimental fluid dynamics. However, traditional PIV methods require multiple cameras and conventional lens systems for image acquisition to resolve multi-dimensional velocity fields. In turn, it introduces complexity to the entire system. Meta-lenses are advanced flat optical devices composed of artificial nanoantenna arrays. It can manipulate the wavefront of light with the advantages of ultrathin, compact, and no spherical aberration. Meta-lenses offer novel functionalities and promise to replace traditional optical imaging systems. Here, a binocular meta-lens PIV technique is proposed, where a pair of GaN meta-lenses are fabricated on one substrate and integrated with a imaging sensor to form a compact binocular PIV system. The meta-lens weigh only 116 mg, much lighter than commercial lenses. The 3D velocity field can be obtained by the binocular disparity and particle image displacement information of fluid flow. The measurement error of vortex-ring diameter is ≈1.25% experimentally validates via a Reynolds-number (Re) 2000 vortex-ring. This work demonstrates a new development trend for the PIV technique for rejuvenating traditional flow diagnostic tools toward a more compact, easy-to-deploy technique. It enables further miniaturization and low-power systems for portable, field-use, and space-constrained PIV applications.

High-Resolution Metalens Imaging with Sequential Artificial Intelligence Models.

An analysis of the optical response of a GaN-based metalens was conducted alongside the utilization of two sequential artificial intelligence (AI) models in addressing the occasional issues of blurriness and color cast in captured images. The optical loss of the metalens in the blue spectral range was found to have resulted in the color cast of images. Autoencoder and CodeFormer sequential models were employed in order to correct the color cast and reconstruct image details, respectively. Said sequential models successfully addressed the color cast and reconstructed details for all of the allocated face image categories. Subsequently, the CIE 1931 chromaticity diagrams and peak signal-to-noise ratio analysis provided numerical evidence of the AI models' effectiveness in image reconstruction. Furthermore, the AI models can still repair the image without blue information. Overall, the integration of metalens and artificial intelligence models marks a breakthrough in enhancing the performance of full-color metalens-based imaging systems.

High-Resolution Metalens Imaging Polarimetry.

Imaging polarimeters find many critical applications in applications ranging from remote sensing to biological detection. Metasurfaces have been proposed as a compact approach for imaging polarimeters, but prior strategies suffer from low imaging resolution. Here, we propose an interleaved metalens configuration for polarization imaging where three-row metasurface units within a group individually interact with three pairs of orthogonal polarization channels. The optical paths between the object and adjacent three-row metasurfaces are nearly equal, allowing the construction of a metalens polarimeter with an unlimited numerical aperture (NA), which is beneficial for high-resolution polarization imaging. The metalens polarimeter fabricated by crystalline silicon nanostructures has a NA of 0.51 at 632.8 nm and achieves an imaging resolution of up to a 1.2-fold wavelength. Polarimetric microscopy experiments demonstrate that metalens polarimeters can realize high-resolution polarization imaging for various microscopic samples. This study offers a promising solution for high-resolution metasurface polarization imaging, with the potential for widespread applications.

Varifocal Metalenses: Harnessing Polarization-Dependent Superposition for Continuous Focal Length Control.

Traditional varifocal lenses are bulky and mechanically complex. Emerging active metalenses promise compactness and design flexibility but face issues like mechanical tuning reliability and nonlinear focal length tuning due to additional medium requirements. In this work, we propose a varifocal metalens design based on superimposing light intensity distributions from two orthogonal polarization states. This approach enables continuous and precise focal length control within the visible spectrum, while maintaining relatively high focusing efficiencies (∼41% in simulation and ∼28% in measurement) and quality. In experimental validation, the metalens exhibited flexible tunability, with the focal length continuously adjustable between two spatial positions upon variation of the incident polarization angle. The MTF results showed high contrast reproduction and sharp imaging, with a Strehl ratio of >0.7 for all polarization angles. With compactness, design flexibility, and high focusing quality, the proposed varifocal metalens holds potential for diverse applications, advancing adaptive and versatile optical devices.

Aberration Theory of a Flat, Aplanatic Metalens Doublet and the Design of a Meta-Microscope Objective Lens.

A theoretical approach for reducing multiple monochromatic aberrations using a flat metalens doublet is proposed and verified through ray tracing simulations. The theoretical relation between the Abbe sine condition and the generalized Snell's law is revealed in the doublet system. Starting from the Abbe aplanat design, minimization conditions of astigmatism and field curvature are derived. Based on the theory, a metalens doublet is semi-analytically optimized as a compact, practical-level meta-microscope objective lens working for a target wavelength. The proposed approach also reveals how to reduce lateral chromatism for an additional wavelength. The design degree of freedom and fundamental limits of the system are both rigorously analyzed in theory and verified through ray tracing simulations. It is expected that the proposed method will provide unprecedented practical opportunities for the design of advanced compact microscopic imaging or sensing systems.

Broadband Achromatic Metalens for Tunable Focused Vortex Beam Generation in the Near-Infrared Range.

Vortex beams accompanied with orbital angular momentum have attracted significant attention in research fields due to their formidable capabilities in various crucial applications. However, conventional devices for generating vortex beams still suffer from bulky sizes, high cost, and confined performances. Metalens, as an advanced platform to arbitrarily control the optical waves, has promising prospects to address the predicament for conventional devices. Although great progress has been demonstrated in the applications of vortex beams, they are still confronted with fixed functionality after fabrication that severely hinders their application range. In this work, the phase-change material of Ge2Sb2Te5 (GST) is employed to design the meta-atoms to realize tunable optical responses. Moreover, the focused vortex beam can be accomplished by superimposing a helical phase and hyperbolic phase, and the chromatic aberrations in near-infrared (NIR) range can be corrected by introducing an additional phase compensation. And the design strategy is validated by two different metalenses (BAMTF-1 and BAMTF-2). The numerical results indicate that the chromatic aberrations for two metalens can be corrected in 1.33-1.60 µm covering the telecom range. Moreover, the average focusing efficiency of BAMTF-1 is 51.4%, and that of BAMTF-2 is 39.9%, indicating the favorable performances of designed BAMTF. More importantly, their average focal lengths have a relative tuning range of 38.82% and 33.17% by altering the crystallization ratio of GST, respectively. This work may provide a significant scheme for on-chip and tunable devices for NIR imaging and communication systems.