Voltage- and Metal-assisted Chemical Etching of Micro and Nano Structures in Silicon: A Comprehensive Review.

Sculpting silicon at the micro and nano scales has been game-changing to mold bulk silicon properties and expand, in turn, applications of silicon beyond electronics, namely, in photonics, sensing, medicine, and mechanics, to cite a few. Voltage- and metal-assisted chemical etching (ECE and MaCE, respectively) of silicon in acidic electrolytes have emerged over other micro and nanostructuring technologies thanks to their unique etching features. ECE and MaCE have enabled the fabrication of novel structures and devices not achievable otherwise, complementing those feasible with the deep reactive ion etching (DRIE) technology, the gold standard in silicon machining. Here, a comprehensive review of ECE and MaCE for silicon micro and nano machining is provided. The chemistry and physics ruling the dissolution of silicon are dissected and similarities and differences between ECE and MaCE are discussed showing that they are the two sides of the same coin. The processes governing the anisotropic etching of designed silicon micro and nanostructures are analyzed, and the modulation of etching profile over depth is discussed. The preparation of micro- and nanostructures with tailored optical, mechanical, and thermo(electrical) properties is then addressed, and their applications in photonics, (bio)sensing, (nano)medicine, and micromechanical systems are surveyed. Eventually, ECE and MaCE are benchmarked against DRIE, and future perspectives are highlighted.

Optofluidic passive parity-time-symmetric systems.

This research introduces a novel methodology of harnessing liquids to facilitate the realization of parity-time (PT)-symmetric optical waveguides on highly integrated microscale platforms. Additionally, we propose a realistic and detailed fabrication process flow, demonstrating the practical feasibility of fabricating our optofluidic system, thereby bridging the gap between theoretical design and actual implementation. Extensive research has been conducted over the past two decades on PT-symmetric systems across various fields, given their potential to foster a new generation of compact, power-efficient sensors and signal processors with enhanced performance. Passive PT-symmetry in optics can be achieved by evanescently coupling two optical waveguides and incorporating an optically lossy material into one of the waveguides. The essential coupling distance between two optical waveguides in air is usually less than 500 nm for near-infrared wavelengths and under 100 nm for ultraviolet wavelengths. This necessitates the construction of the coupling region via expensive and time-consuming electron beam lithography, posing a significant manufacturing challenge for the mass production of PT-symmetric optical systems. We propose a solution to this fabrication challenge by introducing liquids capable of dynamic flow between optical waveguides. This technique allows the attainment of evanescent wave coupling with coupling gap dimensions compatible with standard photolithography processes. Consequently, this paves the way for the cost-effective, rapid and large-scale production of PT-symmetric optofluidic systems, applicable across a wide range of fields.

Trajectories and Forces in Four-Electrode Chambers Operated in Object-Shift, Dielectrophoresis and Field-Cage Modes-Considerations from the System's Point of View.

In two previous papers, we calculated the dielectrophoresis (DEP) force and corresponding trajectories of high- and low-conductance 200-µm 2D spheres in a square 1 × 1-mm chamber with plane-versus-pointed, plane-versus-plane and pointed-versus-pointed electrode configurations by applying the law of maximum entropy production (LMEP) to the system. Here, we complete these considerations for configurations with four-pointed electrodes centered on the chamber edges. The four electrodes were operated in either object-shift mode (two adjacent electrodes opposite the other two adjacent electrodes), DEP mode (one electrode versus the other three electrodes), or field-cage mode (two electrodes on opposite edges versus the two electrodes on the other two opposite edges). As in previous work, we have assumed DC properties for the object and the external media for simplicity. Nevertheless, every possible polarization ratio of the two media can be modeled this way. The trajectories of the spherical centers and the corresponding DEP forces were calculated from the gradients of the system's total energy dissipation, described by numerically-derived conductance fields. In each of the three drive modes, very high attractive and repulsive forces were found in front of pointed electrodes for the high and low-conductance spheres, respectively. The conductance fields predict bifurcation points, watersheds, and trajectories with multiple endpoints. The high and low-conductance spheres usually follow similar trajectories, albeit with reversed orientations. In DEP drive mode, the four-point electrode chamber provides a similar area for DEP measurements as the classical plane-versus-pointed electrode chamber.

Soft and Flexible Bioelectronic Micro-Systems for Electronically Controlled Drug Delivery.

The concept of targeted and controlled drug delivery, which directs treatment to precise anatomical sites, offers benefits such as fewer side effects, reduced toxicity, optimized dosages, and quicker responses. However, challenges remain to engineer dependable systems and materials that can modulate host tissue interactions and overcome biological barriers. To stay aligned with advancements in healthcare and precision medicine, novel approaches and materials are imperative to improve effectiveness, biocompatibility, and tissue compliance. Electronically controlled drug delivery (ECDD) has recently emerged as a promising approach to calibrated drug delivery with spatial and temporal precision. This article covers recent breakthroughs in soft, flexible, and adaptable bioelectronic micro-systems designed for ECDD. It overviews the most widely reported operational modes, materials engineering strategies, electronic interfaces, and characterization techniques associated with ECDD systems. Further, it delves into the pivotal applications of ECDD in wearable, ingestible, and implantable medical devices. Finally, the discourse extends to future prospects and challenges for ECDD.

Cell Patterning Technology on Polymethyl Methacrylate through Controlled Physicochemical and Biochemical Functionalization.

In recent years, innovative cell-based biosensing systems have been developed, showing impact in healthcare and life science research. Now, there is a need to design mass-production processes to enable their commercialization and reach society. However, current protocols for their fabrication employ materials that are not optimal for industrial production, and their preparation requires several chemical coating steps, resulting in cumbersome protocols. We have developed a simplified two-step method for generating controlled cell patterns on PMMA, a durable and transparent material frequently employed in the mass manufacturing of microfluidic devices. It involves air plasma and microcontact printing. This approach allows the formation of well-defined cell arrays on PMMA without the need for blocking agents to define the patterns. Patterns of various adherent cell types in dozens of individual cell cultures, allowing the regulation of cell-material and cell-cell interactions, were developed. These cell patterns were integrated into a microfluidic device, and their viability for more than 20 h under controlled flow conditions was demonstrated. This work demonstrated the potential to adapt polymeric cytophobic materials to simple fabrication protocols of cell-based microsystems, leveraging the possibilities for commercialization.

Design Guidelines for Thin Diaphragm-Based Microsystems through Comprehensive Numerical and Analytical Studies.

This paper presents comprehensive guidelines for the design and analysis of a thin diaphragm that is used in a variety of microsystems, including microphones and pressure sensors. It highlights the empirical relations that can be utilized for the design of thin diaphragm-based microsystems (TDMS). Design guidelines developed through a Finite Element Analysis (FEA) limit the iterative efforts to fabricate TDMS. These design guidelines are validated analytically, with the assumption that the material properties are isotropic, and the deviation from anisotropic material is calculated. In the FEA simulations, a large deflection theory is taken into account to incorporate nonlinearity, such that a critical dimensional ratio of a/h or 2r/h can be decided to have the linear response of a thin diaphragm. The observed differences of 12% in the deflection and 13% in the induced stresses from the analytical calculations are attributed to the anisotropic material consideration in the FEA model. It suggests that, up to a critical ratio (a/h or 2r/h), the thin diaphragm shows a linear relationship with a high sensitivity. The study also presents a few empirical relations to finalize the geometrical parameters of the thin diaphragm in terms of its edge length or radius and thickness. Utilizing the critical ratio calculated in the static FEA analysis, the basic conventional geometries are considered for harmonic analyses to understand the frequency response of the thin diaphragms, which is a primary sensing element for microphone applications and many more. This work provides a solution to microelectromechanical system (MEMS) developers for reducing cost and time while conceptualizing TDMS designs.

Utilizing Clinical Microsystems to Improve Mislabeled Specimen Occurrences in the Emergency Department.

INTRODUCTION: Mislabeled specimen collection in the emergency department has the potential to significantly harm patients. Studies suggest that improvement efforts can reduce specimen rejection from the laboratory and reduce mislabeled specimens in emergency departments and hospital-wide. METHODS: The clinical microsystems approach was used to understand the problem of mislabeled specimens in an emergency department that is part of a 133-bed community hospital in Pennsylvania. Plan-Do-Study-Act cycles were implemented with the help of a clinical microsystems coach. RESULTS: Significant reductions in mislabeled specimen collection were observed over the study period (P < .05). Sustainable improvements were achieved over the >3 years since the improvement initiative began in September 2019. DISCUSSION: Improving patient safety in complex clinical settings requires a systems approach. Using the established framework of clinical microsystems, along with a tenacious and persistent interdisciplinary team, helped create a reliable process for minimizing mislabeled specimens in the emergency department.

Biofilms exacerbate atherogenesis through macrophage-induced inflammatory responses in a fibrous plaque microsystem model.

BACKGROUND: Microbes have been implicated in atherosclerosis development and progression, but the impact of bacterial-based biofilms on fibrous plaque rupture remains poorly understood. RESULTS: Here, we developed a comprehensive atherosclerotic model to reflect the progression of fibrous plaque under biofilm-induced inflammation (FP-I). High expressions of biofilm-specific biomarkers algD, pelA and pslB validated the presence of biofilms. Biofilm promotes the polarization of macrophages towards a pro-inflammatory (M1) phenotype, as demonstrated by an increase in M1 macrophage-specific marker CD80 expression in CD68+ macrophages. The increase in the number of intracellular lipid droplets (LDs) and foam cell percentage highlighted the potential role of biofilms on lipid synthesis or metabolic pathways in macrophage-derived foam cells. In addition, collagen I production by myofibroblasts associated with the fibrous cap was significantly reduced along with the promotion of apoptosis of myofibroblasts, indicating that biofilms affect the structural integrity of the fibrous cap and potentially undermine its strength. CONCLUSION: We validated the unique role of biofilm-based inflammation in exacerbating fibrous plaque damage in the FP-I model, increasing fibrous plaque instability and risk of thrombosis. Our results lay the foundation for mechanistic studies of the role of biofilms in fibrous plaques, allowing the evaluation of preclinical combination strategies for drug therapy. STATEMENT OF SIGNIFICANCE: A microsystem-based model was developed to reveal interactions in fibrous plaque during biofilm-induced inflammation (FP-I). Real-time assessment of biofilm formation and its role in fibrous plaque progression was achieved. The presence of biofilms enhanced the expression of pro-inflammatory (M1) specific marker CD80, lipid droplets, and foam cells and reduced anti-inflammatory (M2) specific marker CD206 expression. Fibrous plaque exposure to biofilm-based inflammation reduced collagen I expression and increased apoptosis marker Caspase-3 expression significantly. Overall, we demonstrate the unique role of biofilm-based inflammation in exacerbating fibrous plaque damage in the FP-I model, promoting fibrous plaque instability and enhanced thrombosis risk. Our findings lay the groundwork for mechanistic studies, facilitating the evaluation of preclinical drug combination strategies.

Zn Microbatteries Explore Ways for Integrations in Intelligent Systems.

As intelligent microsystems develop, many revolutionary applications, such as the swallowing surgeon proposed by Richard Feynman, are about to evolve. Nonetheless, integrable energy storage satisfying the demand for autonomous operations has emerged as a major obstacle to the deployment of intelligent microsystems. A reason for the lagging development of integrable batteries is the challenge of miniaturization through microfabrication procedures. Lithium batteries, generated by the most successful battery chemistry, are not stable in the air, thus creating major manufacturing challenges. Other cations (Na+ , Mg2+ , Al3+ , K+ ) are still in the early stages of development. In contrast, the superior stability of zinc batteries in the air brings high compatibility to microfabrication protocols and has already demonstrated excellent practicability in full-sized devices. To obtain energy-dense and high-power zinc microbatteries within square-millimeter or smaller footprints, sandwich, pillar, and Swiss-roll configurations are developed. Thin interdigital and fiber microbatteries find their applications being integrated into wearable devices and electronic skin. It is foreseeable that zinc microbatteries will find their way into highly integrated microsystems unlocking their full potential for autonomous operation. This review summarizes the material development, configuration innovation, and application-oriented integration of zinc microbatteries.

Immunocapturing rare cells from blood: A simple and robust microsystem approach.

Cell immunocapture microsystems are a fast-emerging field with several potential medical diagnostic applications. Isolation and quantification of circulating rare cells (CRCs) show great importance in the early stages of disease diagnostics and prognostics. Here, we present a simple and robust stop-flow microsystem (fabricated by a combination of glass microblasting and 3D printing) based on a planar antibody-coated surface that is effective in the immunocapture of the model as well as naturally occurring rare cells. A chip with a planar immunocapture channel working in the so-called stop-flow dynamic regime was designed to enable monitoring the efficiency of the cell capture by fluorescence microscopy. Up to 90% immunocapture efficiency of MCF-7 cells spiked into whole blood on CD326 antibody-coated planar surfaces was achieved. We discuss the role of the planar surface modifications, the influence of the set stop-flow dynamic conditions, and medium complexity on the efficiency of cell immunocapture. The presented results could be further employed in the design of microsystems for cell-size-independent isolation and identification of rare cells from blood.

Highly Miniaturized, Low-Power CMOS ASIC Chip for Long-Term Continuous Glucose Monitoring.

BACKGROUND: The objective of this work is to develop a highly miniaturized, low-power, biosensing platform for continuous glucose monitoring (CGM). This platform is based on an application-specific integrated circuit (ASIC) chip that interfaces with an amperometric glucose-sensing element. To reduce both size and power requirements, this custom ASIC chip was implemented using 65-nm complementary metal oxide semiconductor (CMOS) technology node. Interfacing this chip to a frequency-counting microprocessor with storage capabilities, a miniaturized transcutaneous CGM system can be constructed for small laboratory animals, with long battery life. METHOD: A 0.45 mm × 1.12 mm custom ASIC chip was first designed and implemented using the Taiwan Semiconductor Manufacturing Company (TSMC) 65-nm CMOS technology node. This ASIC chip was then interfaced with a multi-layer amperometric glucose-sensing element and a frequency-counting microprocessor with storage capabilities. Variation in glucose levels generates a linear increase in frequency response of this ASIC chip. In vivo experiments were conducted in healthy Sprague Dawley rats. RESULTS: This highly miniaturized, 65-nm custom ASIC chip has an overall power consumption of circa 36 µW. In vitro testing shows that this ASIC chip produces a linear (R2 = 99.5) frequency response to varying glucose levels (from 2 to 25 mM), with a sensitivity of 1278 Hz/mM. In vivo testing in unrestrained healthy rats demonstrated long-term CGM (six days/per charge) with rapid glucose response to glycemic variations induced by isoflurane anesthesia and tail vein injection. CONCLUSIONS: The miniature footprint of the biosensor platform, together with its low-power consumption, renders this CMOS ASIC chip a versatile platform for a variety of highly miniaturized devices, intended to improve the quality of life of patients with type 1 and type 2 diabetes.

Optimization of an Impact-Based Frequency Up-Converted Piezoelectric Vibration Energy Harvester for Wearable Devices.

This work presents a novel development of the impact-based mechanism for piezoelectric vibration energy harvesters. More precisely, the effect of an impacting mass on a cantilever piezoelectric transducer is studied both in terms of the tip mass value attached to the cantilever and impact position to find an optimal condition for power extraction. At first, the study is carried out by means of parametric analyses at varying tip mass and impact position on a unimorph MEMS cantilever, and a suitable physical interpretation of the associated electromechanical response is given. The effect of multiple impacts is also considered. From the analysis, it emerges that the most effective configuration, in terms of power output, is an impact at the cantilever tip without a tip mass. By changing the value of the tip mass, a sub-optimal impact position along the beam axis can also be identified. Moreover, the effect of a tip mass is deleterious on the power performance, contrary to the well-known case of a resonant energy harvester. A mesoscale prototype with a bimorph transducer is fabricated and tested to validate the computational models. The comparison shows a good agreement between numerical models and the experiments. The proposed approach is promising in the field of consumer electronics, such as wearable devices, in which the impact-based device moves at the frequencies of human movement and is much lower than those of microsystems.

Trends of Biosensing: Plasmonics through Miniaturization and Quantum Sensing.

Despite being extremely old concepts, plasmonics and surface plasmon resonance-based biosensors have been increasingly popular in the recent two decades due to the growing interest in nanooptics and are now of relevant significance in regards to applications associated with human health. Plasmonics integration into point-of-care devices for health surveillance has enabled significant levels of sensitivity and limit of detection to be achieved and has encouraged the expansion of the fields of study and market niches devoted to the creation of quick and incredibly sensitive label-free detection. The trend reflects in wearable plasmonic sensor development as well as point-of-care applications for widespread applications, demonstrating the potential impact of the new generation of plasmonic biosensors on human well-being through the concepts of personalized medicine and global health. In this context, the aim here is to discuss the potential, limitations, and opportunities for improvement that have arisen as a result of the integration of plasmonics into microsystems and lab-on-chip over the past five years. Recent applications of plasmonic biosensors in microsystems and sensor performance are analyzed. The final analysis focuses on the integration of microfluidics and lab-on-a-chip with quantum plasmonics technology prospecting it as a promising solution for chemical and biological sensing. Here it is underlined how the research in the field of quantum plasmonic sensing for biological applications has flourished over the past decade with the aim to overcome the limits given by quantum fluctuations and noise. The significant advances in nanophotonics, plasmonics and microsystems used to create increasingly effective biosensors would continue to benefit this field if harnessed properly.

Molecule transfer into mammalian cells by single sub-nanosecond laser pulses.

A rapid, precise, and viability-retaining method for cytoplasmic molecule delivery is highly desired for cell engineering. Routine methods suffer from low throughput, lack of selectivity, requirement of helper compounds, predominant endosomal delivery, and/or are restricted to specific molecule classes. Photonic cell manipulation bears the potential to overcome these drawbacks. Here we investigated mammalian cell manipulation by single sub-nanosecond laser pulses. Axial beam waist positioning close to a cell monolayer induced culture vessel damage and zones of cell ablation. Cells at margins of ablation zones exhibited uptake of membrane-impermeant fluorophores and GFP expression plasmids. Increasing Rayleigh-length and beam waist diameter reduced the sensitivity to axial defocusing and resulted in robust molecule transfer. Serial application of single pulses focused over a moving cell monolayer yielded quantitative molecule transfer to cells at rates up to 40%. Our results could be basic to spatially and temporally controlled single laser pulse-mediated marker-free high throughput cell manipulation.

Towards the Estimation of Body Weight in Sheep Using Metaheuristic Algorithms from Biometric Parameters in Microsystems.

The Body Weight (BW) of sheep is an important indicator for producers. Genetic management, nutrition, and health activities can benefit from weight monitoring. This article presents a polynomial model with an adjustable degree for estimating the weight of sheep from the biometric parameters of the animal. Computer vision tools were used to measure these parameters, obtaining a margin of error of less than 5%. A polynomial model is proposed after the parameters were obtained, where a coefficient and an unknown exponent go with each biometric variable. Two metaheuristic algorithms determine the values of these constants. The first is the most extended algorithm, the Genetic Algorithm (GA). Subsequently, the Cuckoo Search Algorithm (CSA) has a similar performance to the GA, which indicates that the value obtained by the GA is not a local optimum due to the poor parameter selection in the GA. The results show a Root-Mean-Squared Error (RMSE) of 7.68% for the GA and an RMSE of 7.55% for the CSA, proving the feasibility of the mathematical model for estimating the weight from biometric parameters. The proposed mathematical model, as well as the estimation of the biometric parameters can be easily adapted to an embedded microsystem.

Silicone Rubber Based-Conductive Composites for Stretchable "All-in-One" Microsystems.

Wearable electronics with development trends such as miniaturization, multifunction, and smart integration have become an important part of the Internet of Things (IoT) and have penetrated various sectors of modern society. To meet the increasing demands of wearable electronics in terms of deformability and conformability, many efforts have been devoted to overcoming the nonstretchable and poor conformal properties of traditional functional materials and endowing devices with outstanding mechanical properties. One of the promising approaches is composite engineering in which traditional functional materials are incorporated into the various polymer matrices to develop different kinds of functional composites and construct different functions of stretchable electronics. Herein, we focus on the approach of composite engineering and the polymer matrix of silicone rubber (SR), and we summarize the state-of-the-art details of silicone rubber-based conductive composites (SRCCs), including a summary of their conductivity mechanisms and synthesis methods and SRCC applications for stretchable electronics. For conductivity mechanisms, two conductivity mechanisms of SRCC are emphasized: percolation theory and the quantum tunneling mechanism. For synthesis methods of SRCCs, four typical approaches to synthesize different kinds of SRCCs are investigated: mixing/blending, infiltration, ion implantation, and in situ formation. For SRCC applications, different functions of stretchable electronics based on SRCCs for interconnecting, sensing, powering, actuating, and transmitting are summarized, including stretchable interconnects, sensors, nanogenerators, antennas, and transistors. These functions reveal the feasibility of constructing a stretchable all-in-one self-powered microsystem based on SRCC-based stretchable electronics. As a prospect, this microsystem is expected to integrate the functional sensing modulus, the energy harvesting modulus, and the process and response modulus together to sense and respond to environmental stimulations and human physiological signals.

From Quantum Materials to Microsystems.

The expression "quantum materials" identifies materials whose properties "cannot be described in terms of semiclassical particles and low-level quantum mechanics", i.e., where lattice, charge, spin and orbital degrees of freedom are strongly intertwined. Despite their intriguing and exotic properties, overall, they appear far away from the world of microsystems, i.e., micro-nano integrated devices, including electronic, optical, mechanical and biological components. With reference to ferroics, i.e., functional materials with ferromagnetic and/or ferroelectric order, possibly coupled to other degrees of freedom (such as lattice deformations and atomic distortions), here we address a fundamental question: "how can we bridge the gap between fundamental academic research focused on quantum materials and microsystems?". Starting from the successful story of semiconductors, the aim of this paper is to design a roadmap towards the development of a novel technology platform for unconventional computing based on ferroic quantum materials. By describing the paradigmatic case of GeTe, the father compound of a new class of materials (ferroelectric Rashba semiconductors), we outline how an efficient integration among academic sectors and with industry, through a research pipeline going from microscopic modeling to device applications, can bring curiosity-driven discoveries to the level of CMOS compatible technology.

Positive Psychology and SLA Revisited: Unearthing Positive Emotions in EFL Classrooms.

Positive psychology focuses on the constructive effects of positive emotions on human behavior. Considering the recent plethoric research on positive emotions and SLA, this study pursues two important aims. The first aim is to find out whether there is any significant disparity between EFL teachers' and learners' views on an inventory of positive psychology in language learning (IPPLL) which was fostered by researchers. The second goal is to find out whether teachers' practices conform to their views on IPPLL and those expressed in the interview which was conducted with them. To this end, a 54-item questionnaire was developed and the revised questionnaire was administered to 385 learners. The results indicated that the teachers, in comparison with the learners, scored higher on all categories of the IPPLL. Moreover, unlike what they had expressed on the questionnaire and in the interview, the teachers did not capitalize on positive emotions as evinced in both teachers' practice and learners' experience with learning English. Implications of the findings for teacher education courses are presented.

Micro/Nanosystems for Magnetic Targeted Delivery of Bioagents.

Targeted delivery of pharmaceuticals is promising for efficient disease treatment and reduction in adverse effects. Nano or microstructured magnetic materials with strong magnetic momentum can be noninvasively controlled via magnetic forces within living beings. These magnetic carriers open perspectives in controlling the delivery of different types of bioagents in humans, including small molecules, nucleic acids, and cells. In the present review, we describe different types of magnetic carriers that can serve as drug delivery platforms, and we show different ways to apply them to magnetic targeted delivery of bioagents. We discuss the magnetic guidance of nano/microsystems or labeled cells upon injection into the systemic circulation or in the tissue; we then highlight emergent applications in tissue engineering, and finally, we show how magnetic targeting can integrate with imaging technologies that serve to assist drug delivery.

A Parametric Analysis of Capillary Height in Single-Layer, Small-Scale Microfluidic Artificial Lungs.

Microfluidic artificial lungs (µALs) are being investigated for their ability to closely mimic the size scale and cellular environment of natural lungs. Researchers have developed µALs with small artificial capillary diameters (10-50 µm; to increase gas exchange efficiency) and with large capillary diameters (~100 µm; to simplify design and construction). However, no study has directly investigated the impact of capillary height on µAL properties. Here, we use Murray's law and the Hagen-Poiseuille equation to design single-layer, small-scale µALs with capillary heights between 10 and 100 µm. Each µAL contained two blood channel types: capillaries for gas exchange; and distribution channels for delivering blood to/from capillaries. Three designs with capillary heights of 30, 60, and 100 µm were chosen for further modeling, implementation and testing with blood. Flow simulations were used to validate and ensure equal pressures. Designs were fabricated using soft lithography. Gas exchange and pressure drop were tested using whole bovine blood. All three designs exhibited similar pressure drops and gas exchange; however, the µAL with 60 µm tall capillaries had a significantly higher wall shear rate (although physiologic), smaller priming volume and smaller total blood contacting surface area than the 30 and 100 µm designs. Future µAL designs may need to consider the impact of capillary height when optimizing performance.