Optical scattering measurement is one of the most commonly used methods for non-contact online measurement of film properties in industrial film manufacturing. Terahertz photons have low energy and are non-ionizing when measuring objects, so combining these two methods can enable online nondestructive testing of thin films. In the visible light band, some materials are transparent, and their thickness and material properties cannot be measured. Therefore, a method based on physical consistency modeling and machine learning is proposed in this paper, which realizes the method of obtaining high-precision thin film parameters through single-frequency terahertz wave measurement, and shows good performance. Through the experimental measurement of organic material thin films, it is proved that the proposed method is an effective terahertz online detection technology with high precision and high throughput.
