Pseudo-Wet Plasma Mechanism Enabling High-Throughput Dry Etching of SiO2 by Cryogenic-Assisted Surface Reactions.

Manufacturing semiconductor devices requires advanced patterning technologies, including reactive ion etching (RIE) based on the synergistic interactions between ions and etch gas. However, these interactions weaken as devices continuously scale down to sub-nanoscale, primarily attributed to the diminished transport of radicals and ions into the small features. This leads to a significant decrease in etch rate (ER). Here, a novel synergistic interaction involving ions, surface-adsorbed chemistries, and materials at cryogenic temperatures is found to exhibit a significant increase in the ER of SiO2 using CF4/H2 plasmas. The ER increases twofold when plasma with H2/(CF4 + H2) = 33% is used and the substrate temperature is lowered from 20 to -60 °C. The adsorption of HF and H2O on the SiO2 surface at cryogenic temperatures is confirmed using in situ Fourier transform infrared spectroscopy. The synergistic interactions of the surface-adsorbed HF/H2O as etching catalysts and plasma species result in the ER enhancement. Therefore, a mechanism called "pseudo-wet plasma etching" is proposed to explain the cryogenic etching process. This synergy demonstrates that the enhanced etch process is determined by the surface interactions between ions, surface-adsorbed chemistry, and the material being etched, rather than interactions between ion and gas phase, as observed in the conventional RIE.

New Evidence for Ag-Sputtered Materials Inactivating Bacteria by Surface Contact without the Release of Ag Ions: End of a Long Controversy?

The study provides new evidence for Ag-coated polyester (PES) mediating Escherichia coli inactivation by way of genetically engineered E. coli (without porins, from now denoted porinless bacteria). This allows the quantification of the bactericidal kinetics induced by the Ag surface without the intervention of Ag ions. Bacterial inactivation mediated by Ag-PES was seen to be completed within 60 min. The samples were prepared by high-power impulse magnetron sputtering (HiPIMS) at different sputter powers. In anaerobic media, this process required 120 min. The amounts of ions (Ar+, Ag+, and Ag2+) generated during the deposition by direct current magnetron sputtering (DCMS) and HiPIMS were determined by mass spectrometry. The thickness of the Ag films sputtered on PES by DCMS (0.28 A) during 100 s was found to be 340 nm. Thicknesses of 250, 230, and 200 nm were found when sputtering with HiPIMS was tuned at 8, 17, and 30 A, respectively. By scanning transmission electron microscopy (STEM-HAADF), the atomic distribution of Ag and oxygen was detected. By X-ray photoelectron spectroscopy (XPS), a shift in the Ag oxidation state was observed within the bacterial inactivation period. This reveals redox catalysis within the time required for the total bacterial inactivation due to the interaction between the bacterial suspension and Ag-PES. Surface properties of the Ag-coated PES samples were additionally investigated by X-ray diffraction (XRD). The formation of Ag plasmon was detected by diffuse reflectance spectroscopy (DRS) and was a function of the applied sputtering energy. The indoor sunlight irradiation dose required to induce an accelerated bacterial inactivation was found to be 5-10 mW/cm2.

The generation and transport of reactive nitrogen species from a low temperature atmospheric pressure air plasma source.

The reactive chemical species generated by non-equilibrium plasma under atmospheric pressure conditions are key enablers for many emerging applications spanning the fields of biomedicine, manufacturing and agriculture. Despite showing great application potential, insight in to the underpinning reactive species generation and transport mechanisms remains scarce. This contribution focuses on the spatiotemporal behaviour of reactive nitrogen species (RNS) created and transported by an atmospheric pressure air surface barrier discharge (SBD) using both laser induced fluorescence and particle imaging velocimetry measurements combined with experimentally validated numerical modelling. It was observed that highly reactive species such as N are confined to the discharge region while less reactive species such as NO, NO2 and N2O closely followed the induced flow. The concentration of key RNS was found to be in the 10-100 ppm range at a position of 25 mm downstream of the discharge region. A close agreement between the experimental and computational results was achieved and the findings provide a valuable insight in to the role of electrohydrodynamic forces in dictating the spatiotemporal distribution of reactive chemical species beyond the plasma generation region, which is ultimately a key contributor towards downstream treatment uniformity and application efficacy.

Design of an imaging Fabry-Pérot interferometer for the VEST edge plasma temperature measurement.

A new technique for gas temperature determination in fusion plasmas based on time- and space-resolved imaging interferometry is presented. The proposed imaging interferometer includes a multi-channel optical fiber bundle, a pair of flat mirrors, collimating lenses, and a fast camera for registration of interferometry fringes. The technique is applied for ion temperature measurements in the Versatile Experiment Spherical Torus (VEST) tokamak located at the Seoul National University. The multi-channel operation regime of the interferometer is studied by simulations. The first experimental two-channel results obtained using the Hα emission line from the VEST plasma edge are presented and analyzed. The mentioned apparatus is suggested to be especially useful for the multi-point time-resolved characterization of the non-repetitive processes in low-temperature regions of fusion plasmas.

Towards higher stability of resonant absorption measurements in pulsed plasmas.

Possible ways to increase the reliability of time-resolved particle density measurements in pulsed gaseous discharges using resonant absorption spectroscopy are proposed. A special synchronization, called "dynamic source triggering," between a gated detector and two pulsed discharges, one representing the discharge of interest and another being used as a reference source, is developed. An internal digital delay generator in the intensified charge coupled device camera, used at the same time as a detector, is utilized for this purpose. According to the proposed scheme, the light pulses from the reference source follow the gates of detector, passing through the discharge of interest only when necessary. This allows for the utilization of short-pulse plasmas as reference sources, which is critical for time-resolved absorption analysis of strongly emitting pulsed discharges. In addition to dynamic source triggering, the reliability of absorption measurements can be further increased using simultaneous detection of spectra relevant for absorption method, which is also demonstrated in this work. The proposed methods are illustrated by the time-resolved measurements of the metal atom density in a high-power impulse magnetron sputtering (HiPIMS) discharge, using either a hollow cathode lamp or another HiPIMS discharge as a pulsed reference source.

Simple method for gas temperature determination in CO2-containing discharges.

A simple gas temperature determination method based on the line ratio between two rotational peaks from the CO Angstrom rotational emission band is reported. A formula based on CO spectral synthesis provides a way for temperature control in plasmas containing CO molecules. This approach is validated in a CO2 flowing gas surfaguide microwave discharge operating at 2.45 GHz. The gas temperature results are compared with the ones obtained using a Boltzmann plot approach, as well as using direct comparison of measured and calculated rotational spectra of the same rotational band.