Quantitative investigation on a period variation reduction method for the fabrication of large-area gratings using two-spherical-beam laser interference lithography.

Gratings produced by two-spherical-beam Laser Interference Lithography (LIL) will have a nonuniform period, and the associated period variation is larger with the increase of the substrate size. This work quantitatively investigates a noninvasive method for improving the period variation on 4-inch silicon wafers. By temporarily deforming the flexible silicon wafer using a customized concave vacuum chuck [J. Vac. Sci. Technol. B19(6), 2347 (2001)10.1116/1.1421558], we show that the fabricated gratings will have improved period uniformity, with the period variation reduced by 86% at the 1000 nm central grating period setting. This process is a simple and efficient way to achieve linear gratings without altering the LIL configuration with two spherical beams. We present experimental results on the impact of a concave vacuum chuck on the chirp reduction at different grating period settings. Then, we compare two different LIL configurations with different wavelength sources concerning their influence on the efficiency of period variation reduction. Finally, the flatness of the 4-inch silicon wafers due to the temporary bending process is verified using optical profilometry measurements.

Surface Plasmon Resonance Based Temperature Sensors in Liquid Environment.

The aim of this work is to measure the temperature variations by analyzing the plasmon signature on a metallic surface that is periodically structured and immersed in a liquid. A change in the temperature of the sample surface induces a modification of the local refractive index leading to a shift of the surface plasmon resonance (SPR) frequency due to the strong interaction between the evanescent electric field and the metallic surface. The experimental set-up used in this study to detect the refractive index changes is based on a metallic grating permitting a direct excitation of a plasmon wave, leading to a high sensibility, high-temperature range and contactless sensor within a very compact and simple device. The experimental set-up demonstrated that SPR could be used as a non-invasive, high-resolution temperature measurement method for metallic surfaces.

Condensation phenomenon detection through surface plasmon resonance.

The aim of this work is to optically detect the condensation of acetone vapor on an aluminum plate cooled down in a two-phase environment (liquid/vapor). Sub-micron period aluminum based diffraction gratings with appropriate properties, exhibiting a highly sensitive plasmonic response, were successfully used for condensation experiments. A shift in the plasmonic wavelength resonance has been measured when acetone condensation on the aluminum surface takes place due to a change of the surrounding medium close to the surface, demonstrating that the surface modification occurs at the very beginning of the condensation phenomenon. This paper presents important steps in comprehending the incipience of condensate droplet and frost nucleation (since both mechanisms are similar) and thus to control the phenomenon by using an optimized engineered surface.