ABSTRACT
Gratings produced by two-spherical-beam Laser Interference Lithography (LIL) will have a nonuniform period, and the associated period variation is larger with the increase of the substrate size. This work quantitatively investigates a noninvasive method for improving the period variation on 4-inch silicon wafers. By temporarily deforming the flexible silicon wafer using a customized concave vacuum chuck [J. Vac. Sci. Technol. B19(6), 2347 (2001)10.1116/1.1421558], we show that the fabricated gratings will have improved period uniformity, with the period variation reduced by 86% at the 1000â nm central grating period setting. This process is a simple and efficient way to achieve linear gratings without altering the LIL configuration with two spherical beams. We present experimental results on the impact of a concave vacuum chuck on the chirp reduction at different grating period settings. Then, we compare two different LIL configurations with different wavelength sources concerning their influence on the efficiency of period variation reduction. Finally, the flatness of the 4-inch silicon wafers due to the temporary bending process is verified using optical profilometry measurements.
ABSTRACT
Zirconium oxide (ZrO2) is a well-studied and promising material due to its remarkable chemical and physical properties. It is used, for example, in coatings for corrosion protection layer, wear and oxidation, in optical applications (mirror, filters), for decorative components, for anti-counterfeiting solutions and for medical applications. ZrO2 can be obtained as a thin film using different deposition methods such as physical vapor deposition (PVD) or chemical vapor deposition (CVD). These techniques are mastered but they do not allow easy micro-nanostructuring of these coatings due to the intrinsic properties (high melting point, mechanical and chemical resistance). An alternative approach described in this paper is the sol-gel method, which allows direct micro-nanostructuring of the ZrO2 layers without physical or chemical etching processes, using optical or nano-imprint lithography. In this paper, the authors present a complete and suitable ZrO2 sol-gel method allowing to achieve complex micro-nanostructures by optical or nano-imprint lithography on substrates of different nature and shape (especially non-planar and foil-based substrates). The synthesis of the ZrO2 sol-gel is presented as well as the micro-nanostructuring process by masking, colloidal lithography and nano-imprint lithography on glass and plastic substrates as well as on plane and curved substrates.
ABSTRACT
A significant enhancement of the longitudinal magneto-optical effect is demonstrated numerically and experimentally in transmission, and for small angles of incidence, through a subwavelength resonant structure consisting of a dielectric grating on top of a magneto-optical waveguide. The enhanced polarization rotation is associated with a high transmittance. These low footprint devices may thus be suitable for applications like magnetic field sensors or in non-destructive testing.
ABSTRACT
We report on the design, fabrication, and characterization of an all-dielectric one-dimensional (1D) resonant device formed by a silicon nitride grating impregnated by a low-index magneto-optical silica-type matrix. This impregnation is realized through the dipping of the 966 nm periodic template in a sol-gel solution previously doped with CoFe2O4 nanoparticles, and able to fill the grating slits. By a proper adjustment of the geometrical parameters of such a photonic crystal membrane, simultaneous excitation of transverse electric (TE) and transverse magnetic (TM) polarization resonances is nearly achieved at 1570 nm. This TE/TM phase-matching situation leads to a fivefold enhancement of the Faraday effect in the resonance area with an increased merit factor of 0.32°. Moreover, the device demonstrates its ability to enhance longitudinal and transverse Kerr effects for the other directions of the applied magnetic field. Taking benefits from the ability of the nanocomposite material to be processed on photonic platforms, and despite its quite low magneto-optical activity compared to classical magnetic materials, this work proves that an all-dielectric 1D device can produce a high magneto-optical sensitivity to every magnetic field directions.
