ABSTRACT
The deleterious consequences of climate change are well documented. Future climate treaties might mandate greenhouse gas (GHG) emissions measurement from signatories in order to verify compliance. The acquisition of atmospheric chemistry would benefit from low cost, small size/weight/power of microsystems. In this paper, we investigated several key materials science aspects of a phase-change microvalve (PCµV) technology with low power/size/weight/cost for ubiquitous GHG sampling. The novel design, based on phase-change material low-melting-point eutectic metal alloys (indium-bismuth, InBi and tin-lead, SnPb), could be actuated at temperatures as low as 72 °C. Valve manufacturing was based on standard thick and thin-film processes and solder technologies that are commonly used in industry, enabling low-cost, high-volume fabrication. Aging studies showed that it was feasible to batch fabricate the PCµVs and store them for future use, especially in the case of SnPb alloys. Hermetic sealing of the valve prototypes was demonstrated through helium leak testing, and Mil spec leak rates less than 1 × 10(-9) atm cm(3)/s were achieved. This confirms that the sample capture and analysis interval can be greatly expanded, easing the logistical burdens of ubiquitous GHG monitoring. Highly conservative and hypothetical CO(2) bias due to valve actuation at altitude in 1 cm(3) microsamplers would be significantly below 1.0 and 2.2 ppmv for heat-treated InBi and SnPb solders, respectively. The CO(2) bias from the PCµV scales well, as a doubling of sampler volume halved the bias. We estimated the shelf life of the SnPb PCµVs to be at least 2.8 years. These efforts will enable the development of low cost, low dead volume, small size/weight microsystems for monitoring GHGs and volatile organic compounds.