1.
Strain imaging of nanoscale semiconductor heterostructures with x-ray Bragg projection ptychography.
Phys Rev Lett
; 112(16): 165502, 2014 Apr 25.
Article
in English
| MEDLINE
| ID: mdl-24815657
ABSTRACT
We report the imaging of nanoscale distributions of lattice strain and rotation in complementary components of lithographically engineered epitaxial thin film semiconductor heterostructures using synchrotron x-ray Bragg projection ptychography (BPP). We introduce a new analysis method that enables lattice rotation and out-of-plane strain to be determined independently from a single BPP phase reconstruction, and we apply it to two laterally adjacent, multiaxially stressed materials in a prototype channel device. These results quantitatively agree with mechanical modeling and demonstrate the ability of BPP to map out-of-plane lattice dilatation, a parameter critical to the performance of electronic materials.