Lithography-defect-driven source-mask optimization solution for full-chip optical proximity correction.

In the domain of computational lithography, the performance of an optimized imaging solution is usually qualified with a full-chip posted-optical-proximity-correction lithography printing check to ensure the printing is defect free before committed for mask writing. It is thus highly preferable for the optimization process itself to be driven by the same defect detection mechanism towards a defect-free solution. On the other hand, the huge data size of chip layout poses great challenge to such optimization process, in terms of runtime and data storage. A gradient-based optimization scheme thus becomes necessary. To date, no successful engineering tool is capable of accommodating these two requirements at the same time. We demonstrate the technology of defect-driven gradient-based optimization to achieve a defect-free solution within practical runtime specification, using ASML's computational lithography product Tachyon SMO.

Coherent versus uncorrelated nanoscale heterogeneities in L1(0) solid solutions and their signatures from local and extended probes.

The structural properties of the phase coexistence of chemically ordered L1(0) and chemically disordered structures within binary alloys are investigated, using the NiMn system as an example. Theoretical and numerical predictions of the signatures that one might expect in data from local and extended probes are presented in an attempt to explain the presence of antiferromagnetism in NiMn when no L1(0) signatures appear in diffraction data. Two scenarios are considered. In the first scenario, the tetragonal L1(0) structure and fcc chemically disordered structure are distributed evenly into uncorrelated domains of specified average diameter. The diffraction limit, below which the two structures can only be distinguished using a local probe, is quantified with respect to the domain diameter by applying straightforward diffraction analysis. In the second scenario, domains with chemical ordering oriented in different directions are required to maintain their atomic coherence with each other. A numerical treatment is used to illustrate the long-range strain that results from elastic energy considerations, and the effects on the structure factor (extended probe) and pair distribution function (local probe) are investigated.

Resonant nucleation.

We investigate the role played by fast quenching on the decay of metastable (or false vacuum) states. Instead of the exponentially slow decay rate per unit volume, Gamma(HN) approximately exp([-E(b)/k(B)T] (E(b) is the free energy of the critical bubble), predicted by homogeneous nucleation theory, we show that under fast enough quenching the decay rate is a power law Gamma(RN) approximately [E(b)/k(B)T](-B), where B is weakly sensitive to the temperature. For a range of parameters, large-amplitude oscillations about the metastable state trigger the resonant emergence of coherent subcritical configurations. Decay mechanisms for different E(b) are proposed and illustrated in a (2+1)-dimensional scalar field model.

Local atomic structure of partially ordered NiMn in NiMn/NiFe exchange coupled layers: 1. XAFS measurements and structural refinement.

The local atomic structure of the Mn in NiMn/NiFe exchange coupled films was investigated using Mn K-edge extended X-ray absorption fine structure (EXAFS) measurements to elucidate the possible correlation between the coercivity that can occur even in samples that display no signs of NiMn L1(0) ordering in diffraction patterns and such ordering on a length scale below the diffraction limit. Raising the substrate growth temperature from 3 to 200 degrees C increases the extent of L1(0) ordering in the NiMn pinning layer and the associated coercivity. A short-range order parameter (S(SRO)) was derived from EXAFS data for comparison with the long-range order parameter (S(LRO)) obtained from the X-ray diffraction measurements. Analogous to S(LRO), S(SRO) increases in tandem with the pinning layer coercivity, implying the presence of nanometer-scale ordered clusters at the beginning stages of macroscopic L1(0) phase formation that apparently foster antiferromagnetism despite their small size. The behavior of the EXAFS, especially the contributions of the more distant shells, also suggests that the overall structure in materials that are not fully L1(0)-ordered is more accurately described as locally ordered, magnetically ordered, incoherent nanodomains of the L1(0) phase separated by locally disordered, strained, interdomain regions that globally average to the fcc lattice with little or no local fcc structure present. The constraints on the sizes and other characteristics of these domains were explored by examining the diffraction patterns calculated for several two-dimensional analogue structures. These demonstrated that one of the most important structural features in the development of a two-phase diffraction pattern was the presence of dislocations in response to the elastic strain at the interfaces between domains where the accumulated expitaxial mismatch was greater than half of the bond length that rendered the domains incoherent with respect to each other.

Local atomic structure of partially ordered NiMn in NiMn/NiFe exchange-coupled layers: 2. Electronic structure calculations.

Local electronic and magnetic structure calculations for NiMn exchange bias alloys are reported for clusters containing NiMn in both the chemically disordered face-centered cubic and the chemically and magnetically ordered L1(0) phases. The results of these calculations are consistent with our local structure measurements that point toward the existence of nanometer-scale ordered clusters at the beginning stages of chemical ordering. The spatial dependence of both the local density of states and the magnetization is strongly influenced by the existence of magnetic order on short length scales, giving rise to an inhomogeneous profile for these quantities across the material with the greatest change at the interface that is still small enough within the domain to imply that the magnetization is still highly developed.

Resonant emergence of global and local spatiotemporal order in a nonlinear field model.

We investigate the nonequilibrium evolution of a scalar field in (2+1) dimensions. The field is set in a double-well potential in contact (open) or not (closed) with a heat bath. For closed systems, we observe the synchronized emergence of coherent spatiotemporal configurations, identified with oscillons. This initial global ordering degenerates into localized order until all oscillons disappear. We show that the synchronization is driven by resonant parametric oscillations of the field's zero mode and that local ordering is only possible outside equipartition. None of these orderings occur for open systems.

Nonequilibrium precursor model for the onset of percolation in a two-phase system.

Using a Boltzmann-like equation, we investigate the nonequilibrium dynamics of nonperturbative fluctuations within the context of Ginzburg-Landau models. As an illustration, we examine how a two-phase system initially prepared in a homogeneous, low-temperature phase becomes populated by precursors of the opposite phase as the temperature is increased. We compute the critical value of the order parameter for the onset of percolation, which signals the breakdown of the conventional dilute gas approximation.