Roadmap for Optical Metasurfaces.

Metasurfaces have recently risen to prominence in optical research, providing unique functionalities that can be used for imaging, beam forming, holography, polarimetry, and many more, while keeping device dimensions small. Despite the fact that a vast range of basic metasurface designs has already been thoroughly studied in the literature, the number of metasurface-related papers is still growing at a rapid pace, as metasurface research is now spreading to adjacent fields, including computational imaging, augmented and virtual reality, automotive, display, biosensing, nonlinear, quantum and topological optics, optical computing, and more. At the same time, the ability of metasurfaces to perform optical functions in much more compact optical systems has triggered strong and constantly growing interest from various industries that greatly benefit from the availability of miniaturized, highly functional, and efficient optical components that can be integrated in optoelectronic systems at low cost. This creates a truly unique opportunity for the field of metasurfaces to make both a scientific and an industrial impact. The goal of this Roadmap is to mark this "golden age" of metasurface research and define future directions to encourage scientists and engineers to drive research and development in the field of metasurfaces toward both scientific excellence and broad industrial adoption.

Room-temperature strong coupling in a single-photon emitter-metasurface system.

Solid state single-photon sources with high brightness and long coherence time are promising qubit candidates for modern quantum technology. To prevent decoherence processes and preserve the integrity of the qubits, decoupling the emitters from their surrounding environment is essential. To this end, interfacing single photon emitters (SPEs) with high-finesse cavities is required, especially in the strong coupling regime, when the interaction between emitters can be mediated by cavity fields. However, achieving strong coupling at elevated temperatures is challenging due to competing incoherent processes. Here, we address this long-standing problem by using a quantum system, which comprises a class of SPEs in hexagonal boron nitride and a dielectric cavity based on bound states in the continuum (BIC). We experimentally demonstrate, at room temperature, strong coupling of the system with a large Rabi splitting of ~4 meV thanks to the combination of the narrow linewidth and large oscillator strength of the emitters and the efficient photon trapping of the BIC cavity. Our findings unveil opportunities to advance the fundamental understanding of quantum dynamical system in strong coupling regime and to realise scalable quantum devices capable of operating at room temperature.

Schrödinger's Red Beyond 65,000 Pixel-Per-Inch by Multipolar Interaction in Freeform Meta-Atom through Efficient Neural Optimizer.

Freeform nanostructures have the potential to support complex resonances and their interactions, which are crucial for achieving desired spectral responses. However, the design optimization of such structures is nontrivial and computationally intensive. Furthermore, the current "black box" design approaches for freeform nanostructures often neglect the underlying physics. Here, a hybrid data-efficient neural optimizer for resonant nanostructures by combining a reinforcement learning algorithm and Powell's local optimization technique is presented. As a case study, silicon nanostructures with a highly-saturated red color are designed and experimentally demonstrated. Specifically, color coordinates of (0.677, 0.304) in the International Commission on Illumination (CIE) chromaticity diagram - close to the ideal Schrödinger's red, with polarization independence, high reflectance (>85%), and a large viewing angle (i.e., up to ± 25°) is achieved. The remarkable performance is attributed to underlying generalized multipolar interferences within each nanostructure rather than the collective array effects. Based on that, pixel size down to ≈400 nm, corresponding to a printing resolution of 65000 pixels per inch is demonstrated. Moreover, the proposed design model requires only ≈300 iterations to effectively search a thirteen-dimensional (13D) design space - an order of magnitude more efficient than the previously reported approaches. The work significantly extends the free-form optical design toolbox for high-performance flat-optical components and metadevices.

Dual-Resonance Nanostructures for Color Downconversion of Colloidal Quantum Emitters.

We present a dual-resonance nanostructure made of a titanium dioxide (TiO2) subwavelength grating to enhance the color downconversion efficiency of CdxZn1-xSeyS1-y colloidal quantum dots (QDs) emitting at ∼530 nm when excited with a blue light at ∼460 nm. A large mode volume can be created within the QD layer by the hybridization of the grating resonances and waveguide modes, resulting in large absorption and emission enhancements. Particularly, we achieved polarized light emission with a maximum photoluminescence enhancement of ∼140 times at a specific angular direction and a total enhancement of ∼34 times within a 0.55 numerical aperture (NA) of the collecting objective. The enhancement encompasses absorption, Purcell and outcoupling enhancements. We achieved a total absorption of 35% for green QDs with a remarkably thin color conversion layer of ∼400 nm. This work provides a guideline for designing large-volume cavities for absorption/fluorescence enhancement in microLED display, detector, or photovoltaic applications.

Electrically Tunable Reflective Metasurfaces with Continuous and Full-Phase Modulation for High-Efficiency Wavefront Control at Visible Frequencies.

All-dielectric optical metasurfaces can locally control the amplitude and phase of light at the nanoscale, enabling arbitrary wavefront shaping. However, lack of postfabrication tunability has limited the true potential of metasurfaces for many applications. Here, we utilize a thin liquid crystal (LC) layer as a tunable medium surrounding the metasurface to achieve a phase-only spatial light modulator (SLM) with high reflection in the visible frequency, exhibiting active and continuous resonance tuning with associated 2π phase control and uncoupled amplitude. Dynamic wavefront shaping is demonstrated by programming 96 individually addressable electrodes with a small pixel pitch of ∼1 µm. The small pixel size is facilitated by the reduced LC thickness, strongly suppressing cross-talk among pixels. This device is used to demonstrate dynamic beam steering with a wide field-of-view and high absolute diffraction efficiencies. We believe that our demonstration may help realize next-generation, high-resolution SLMs, with wide applications in dynamic holography, tunable optics, and light detection and ranging (LiDAR), to mention a few.

Photon pairs bi-directionally emitted from a resonant metasurface.

Metasurfaces are artificially structured surfaces able to control the properties of light at subwavelength scales. While, initially, they have been proposed as means to control classical optical fields, they are now emerging as nanoscale sources of quantum light, in particular of entangled photons with versatile properties. Geometric resonances in metasurfaces have been recently used to engineer the frequency spectrum of entangled photons, but the emission directivity was so far less studied. Here, we generate photon pairs via spontaneous parametric down conversion from a metasurface supporting a quasi-bound state in the continuum (BIC) leading to remarkable emission directivities. The pair generation rate is enhanced 67 times compared to the case of an unpatterned film of the same thickness and material. At the wavelength of the quasi-BIC resonance, photons are mostly emitted backwards, while their partners, spectrally detuned by only 8 nm, are emitted forwards. This behavior demonstrates fine spectral splitting of entangled photons and their bi-directional emission, never before observed in nanoscale sources. We expect this work to be a starting point for the efficient demultiplexing of photons in nanoscale quantum optics.

Polarization-Tunable Perovskite Light-Emitting Metatransistor.

Emerging immersive visual communication technologies require light sources with complex functionality for dynamic control of polarization, directivity, wavefront, spectrum, and intensity of light. Currently, this is mostly achieved by free space bulk optic elements, limiting the adoption of these technologies. Flat optics based on artificially structured metasurfaces that operate at the sub-wavelength scale are a viable solution, however, their integration into electrically driven devices remains challenging. Here, a radically new approach to monolithic integration of a dielectric metasurface into a perovskite light-emitting transistor is demonstrated. It is shown that nanogratings directly structured on top of the transistor channel yield an 8-fold increase of electroluminescence intensity and dynamic tunability of polarization. This new light-emitting metatransistor device concept opens unlimited opportunities for light management strategies based on metasurface design and integration.

Programmable Wavefront Control in the Visible Spectrum Using Low-Loss Chalcogenide Phase-Change Metasurfaces.

All-dielectric metasurfaces provide unique solutions for advanced wavefront manipulation of light with complete control of amplitude and phase at sub-wavelength scales. One limitation, however, for most of these devices is the lack of any post-fabrication tunability of their response. To break this limit, a promising approach is employing phase-change materials (PCMs), which provide fast, low energy, and non-volatile means to endow metasurfaces with a switching mechanism. In this regard, great advancements have been done in the mid-infrared and near-infrared spectrum using different chalcogenides. In the visible spectral range, however, very few devices have demonstrated full phase manipulation, high efficiencies, and reversible optical modulation. In this work, a programmable all-dielectric Huygens' metasurface made of antimony sulfide (Sb2 S3 ) PCM is experimentally demonstrated, a low loss and high-index material in the visible spectral range with a large contrast (≈0.5) between its amorphous and crystalline states. ≈2π phase modulation is shown with high associated transmittance and it is used to create programmable beam-steering devices. These novel chalcogenide PCM metasurfaces have the potential to emerge as a platform for next-generation spatial light modulators and to impact application areas such as programmable and adaptive flat optics, light detection and ranging (LiDAR), and many more.

Phase-Change Perovskite Microlaser with Tunable Polarization Vortex.

Metasurfaces supporting optical bound states in the continuum (BICs) are emerging as simple and compact optical cavities to realize polarization-vortex lasers. The winding of the polarization around the singularity defines topological charges which are generally set by the cavity design and cannot be altered without changing geometrical parameters. Here, a subwavelength-thin phase-change halide perovskite BIC metasurface functioning as a tunable polarization vortex microlaser is demonstrated. Upon the perovskite structural phase transitions, both its refractive index and gain vary substantially, inducing reversible and bistable switching between distinct polarization vortexes underpinned by opposite topological charges. Dynamic tuning and switching of the resulting vector beams may find use in microscopy imaging, particle trapping and manipulation, and optical data storage.

Miniaturizing color-sensitive photodetectors via hybrid nanoantennas toward submicrometer dimensions.

Digital camera sensors use color filters on photodiodes to achieve color selectivity. As the color filters and photosensitive silicon layers are separate elements, these sensors suffer from optical cross-talk, which sets limits to the minimum pixel size. Here, we report hybrid silicon-aluminum nanostructures in the extreme limit of zero distance between color filters and sensors. This design could essentially achieve submicrometer pixel dimensions and minimize the optical cross-talk arising from tilt illuminations. The designed hybrid silicon-aluminum nanostructure has dual functionalities. Crucially, it supports a hybrid Mie-plasmon resonance of magnetic dipole to achieve color-selective light absorption, generating electron hole pairs. Simultaneously, the silicon-aluminum interface forms a Schottky barrier for charge separation and photodetection. This design potentially replaces the traditional dye-based filters for camera sensors at ultrahigh pixel densities with advanced functionalities in sensing polarization and directionality, and UV selectivity via interband plasmons of silicon.

Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography.

Nanostructures exhibiting optical resonances (so-called nanoantennas) have strong potential for applications in color printing and filtering with sub-wavelength resolution. While small scale demonstrations of these systems are interesting as a proof-of-concept, their large scale and volume fabrication requires deeper analysis and further development for industrial adoption. Here, we evaluate the color quality produced by large size nanoantenna arrays fabricated on a 12-in. wafer using deep UV immersion photolithography and dry etching processes. The color reproduction and quality are analyzed in context of the CIE color diagram, showing that a vivid and vibrant color palette, almost fully covering the sRGB color space, can be obtained with this mass-manufacturing-ready fabrication process. The obtained results, thus, provide a solid foundation for the potential industrial adoption of this emerging technology and expose the limits and challenges of the process.

Sum-Frequency Generation in High-Q GaP Metasurfaces Driven by Leaky-Wave Guided Modes.

Resonant metasurfaces provide a unique platform for enhancing multiwave nonlinear interactions. However, the difficulties over mode matching and material transparency place significant challenges in the enhancement of these multiwave processes. Here we demonstrate efficient nonlinear sum-frequency generation (SFG) in multiresonant GaP metasurfaces based on guided-wave bound-state in the continuum resonances. The excitation of the metasurface by two near-infrared input beams generates strong SFG in the visible spectrum with a conversion efficiency of 2.5 × 10-4 W-1, 2 orders of magnitude higher than the one reported in Mie-type resonant metasurfaces. In addition, we demonstrate the nontrivial polarization dependence on the SFG process. In contrast to harmonic generation, the SFG process is enhanced when using nonparallel polarized input-beams. Importantly, by varying the input pump beam polarization it is possible to direct the SFG emission to different diffraction orders, thereby opening up new opportunities for nonlinear light sources and infrared to visible light conversion.

High resolution multispectral spatial light modulators based on tunable Fabry-Perot nanocavities.

Spatial light modulators (SLMs) are the most relevant technology for dynamic wavefront manipulation. They find diverse applications ranging from novel displays to optical and quantum communications. Among commercial SLMs for phase modulation, Liquid Crystal on Silicon (LCoS) offers the smallest pixel size and, thus, the most precise phase mapping and largest field of view (FOV). Further pixel miniaturization, however, is not possible in these devices due to inter-pixel cross-talks, which follow from the high driving voltages needed to modulate the thick liquid crystal (LC) cells that are necessary for full phase control. Newly introduced metasurface-based SLMs provide means for pixel miniaturization by modulating the phase via resonance tuning. These devices, however, are intrinsically monochromatic, limiting their use in applications requiring multi-wavelength operation. Here, we introduce a novel design allowing small pixel and multi-spectral operation. Based on LC-tunable Fabry-Perot nanocavities engineered to support multiple resonances across the visible range (including red, green and blue wavelengths), our design provides continuous 2π phase modulation with high reflectance at each of the operating wavelengths. Experimentally, we realize a device with 96 pixels (~1 µm pitch) that can be individually addressed by electrical biases. Using it, we first demonstrate multi-spectral programmable beam steering with FOV~18° and absolute efficiencies exceeding 40%. Then, we reprogram the device to achieve multi-spectral lensing with tunable focal distance and efficiencies ~27%. Our design paves the way towards a new class of SLM for future applications in displays, optical computing and beyond.

Near unity transmission and full phase control with asymmetric Huygens' dielectric metasurfaces for holographic projections.

Huygens' metasurfaces are transparent arrays of nanostructures that enable phase-front manipulation. This is achieved by simultaneous excitation of electric dipole (ED) and magnetic dipole (MD) resonances with equal amplitudes and phases in the constituent meta-atoms. In usual designs, the size changes of the meta-atoms, necessary to map the phase front, can detune the overlapping of ED and MD resonances, decreasing the transmission and limiting the operating bandwidth. In this report, we demonstrate that ED and MD resonances can be almost perfectly tuned together over a large wavelength range, keeping their spectral overlap, in a silicon metasurface by using anisotropic meta-atoms. In particular, we show near-unity transmission (>95% in simulations) and 2π phase control in a wavelength range from 760 to 815 nm using cuboidal nanoantennas. Using this concept, we also experimentally demonstrate clear reconstruction from holograms of a single metasurface spanning the near infrared and the whole visible spectral range.

Nanoscale mapping of optically inaccessible bound-states-in-the-continuum.

Bound-states-in-the-continuum (BIC) is an emerging concept in nanophotonics with potential impact in applications, such as hyperspectral imaging, mirror-less lasing, and nonlinear harmonic generation. As true BIC modes are non-radiative, they cannot be excited by using propagating light to investigate their optical characteristics. In this paper, for the 1st time, we map out the strong near-field localization of the true BIC resonance on arrays of silicon nanoantennas, via electron energy loss spectroscopy with a sub-1-nm electron beam. By systematically breaking the designed antenna symmetry, emissive quasi-BIC resonances become visible. This gives a unique experimental tool to determine the coherent interaction length, which we show to require at least six neighboring antenna elements. More importantly, we demonstrate that quasi-BIC resonances are able to enhance localized light emission via the Purcell effect by at least 60 times, as compared to unpatterned silicon. This work is expected to enable practical applications of designed, ultra-compact BIC antennas such as for the controlled, localized excitation of quantum emitters.

Bound State in the Continuum in Nanoantenna-Coupled Slab Waveguide Enables Low-Threshold Quantum-Dot Lasing.

Colloidal quantum dots (CQDs) are a promising gain material for solution-processed, wavelength-tunable lasers, with potential application in displays, communications, and biomedical devices. In this work, we combine a CQD film with an array of nanoantennas, made of titanium dioxide cylinders, to achieve lasing via bound states in the continuum (BICs). Here, the BICs are symmetry-protected cavity modes with giant quality factors, arising from slab waveguide modes in the planar CQD film, coupled to the periodic nanoantenna array. We engineer the thickness of the CQD film and size of the nanoantennas to achieve a BIC with good spatial and spectral overlap with the CQDs, based on a second-order transverse-electric (TE)-polarized waveguide mode. We obtain room-temperature lasing with a low threshold of approximately 11 kW/cm2 (peak intensity) under 5-ns-pulsed optical excitation. This work sheds light on the optical modes in solution-processed, distributed-feedback lasers and highlights BICs as effective, versatile, surface-emitting lasing modes.

Generation of even and odd high harmonics in resonant metasurfaces using single and multiple ultra-intense laser pulses.

High harmonic generation (HHG) opens a window on the fundamental science of strong-field light-mater interaction and serves as a key building block for attosecond optics and metrology. Resonantly enhanced HHG from hot spots in nanostructures is an attractive route to overcoming the well-known limitations of gases and bulk solids. Here, we demonstrate a nanoscale platform for highly efficient HHG driven by intense mid-infrared laser pulses: an ultra-thin resonant gallium phosphide (GaP) metasurface. The wide bandgap and the lack of inversion symmetry of the GaP crystal enable the generation of even and odd harmonics covering a wide range of photon energies between 1.3 and 3 eV with minimal reabsorption. The resonantly enhanced conversion efficiency facilitates single-shot measurements that avoid material damage and pave the way to study the controllable transition between perturbative and non-perturbative regimes of light-matter interactions at the nanoscale.

Silicon Nanoantenna Mix Arrays for a Trifecta of Quantum Emitter Enhancements.

Dielectric nanostructures have demonstrated optical antenna effects due to Mie resonances. Previous work has exhibited enhancements in absorption, emission rates and directionality with practical limitations. In this paper, we present a Si mix antenna array to achieve a trifecta enhancement of ∼1200-fold with a Purcell factor of ∼47. The antenna design incorporates ∼10 nm gaps, within which fluorescent molecules strongly absorb the pump laser energy through a resonant mode. In the emission process, the antenna array increases the radiative decay rates of the fluorescence molecules via a Purcell effect and provides directional emission through a separate mode. This work could lead to novel CMOS-compatible platforms to enhance fluorescence for biological and chemical applications.

Second harmonic generation in gallium phosphide nano-waveguides.

We designed, fabricated and tested gallium phosphide (GaP) nano-waveguides for second harmonic generation (SHG). We demonstrate SHG in the visible range around 655 nm using modal phase matching. We observe phase matched SHG for different combinations of interacting modes by varying the widths of the waveguides and tuning the wavelength of the pump. We achieved a normalized internal SHG conversion efficiency of 0.4% W-1cm-2 for a continuous-wave pump at wavelength of 1283.5 nm, the highest reported in the literature for a GaP waveguide. We also demonstrated temperature tuning of the SHG wavelength with a slope of 0.17 nm/°C. The presented results contribute to the development of integrated photonic platforms with efficient nonlinear wave-mixing processes for classical and quantum applications.

Continuous Wave Second Harmonic Generation Enabled by Quasi-Bound-States in the Continuum on Gallium Phosphide Metasurfaces.

Resonant metasurfaces are an attractive platform for enhancing the nonlinear optical processes, such as second harmonic generation (SHG), since they can generate large local electromagnetic fields while relaxing the phase-matching requirements. Here, we demonstrate visible range, continuous wave (CW) SHG by combining the attractive material properties of gallium phosphide with high quality-factor photonic modes enabled by bound states in the continuum. We obtain efficiencies around 5e-5% W-1 when the system is pumped at 1200 nm wavelength with CW intensities of 1 kW/cm2. Moreover, we measure external efficiencies of 0.1% W-1 with pump intensities of only 10 MW/cm2 for pulsed irradiation. This efficiency is higher than the values previously reported for dielectric metasurfaces, but achieved here with pump intensities that are two orders of magnitude lower. These results take metasurface-based SHG a step closer to practical applications.