Differential pressure sensors based on transfer-free piezoresistive layered PdSe2thin films.

Piezoresistive layered two-dimensional (2D) crystals offer intriguing promise as pressure sensors for microelectromechanical systems (MEMS) due to their remarkable strain-induced conductivity modulation. However, integration of the conventional chemical vapor deposition grown 2D thin films onto a micromachined silicon platform requires a complex transfer process, which degrades their strain-sensing performance. In this study, we present a differential pressure sensor built on a transfer-free piezoresistive PdSe2polycrystalline film deposited on a SiNxmembrane by plasma-enhanced selenization of a metal film at a temperature as low as 200 °C. Based on the resistance change and finite element strain analysis of the film under membrane deflection, we show that a 7.9 nm thick PdSe2film has a gauge factor (GF) of -43.3, which is ten times larger than that of polycrystalline silicon. The large GF enables the development of a diaphragm pressure sensor with a high sensitivity of 3.9 × 10-4kPa-1within the differential pressure range of 0-60 kPa. In addition, the sensor with a Wheatstone bridge circuit achieves a high voltage sensitivity of 1.04 mV·kPa-1, a rapid response time of less than 97 ms, and small output voltage variation of 8.1 mV in the temperature range of 25 °C to 55 °C. This transfer-free and low-temperature grown PdSe2piezoresistive thin film is promising for MEMS transducer devices.

Pulse irradiation synthesis of metal chalcogenides on flexible substrates for enhanced photothermoelectric performance.

High synthesis temperatures and specific growth substrates are typically required to obtain crystalline or oriented inorganic functional thin films, posing a significant challenge for their utilization in large-scale, low-cost (opto-)electronic applications on conventional flexible substrates. Here, we explore a pulse irradiation synthesis (PIS) to prepare thermoelectric metal chalcogenide (e.g., Bi2Se3, SnSe2, and Bi2Te3) films on multiple polymeric substrates. The self-propagating combustion process enables PIS to achieve a synthesis temperature as low as 150 °C, with an ultrafast reaction completed within one second. Beyond the photothermoelectric (PTE) property, the thermal coupling between polymeric substrates and bismuth selenide films is also examined to enhance the PTE performance, resulting in a responsivity of 71.9 V/W and a response time of less than 50 ms at 1550 nm, surpassing most of its counterparts. This PIS platform offers a promising route for realizing flexible PTE or thermoelectric devices in an energy-, time-, and cost-efficient manner.

Interfacial Charge Transfer for Enhancing Nonlinear Saturable Absorption in WS2/graphene Heterostructure.

Interlayer charge-transfer (CT) in 2D atomically thin vertical stacks heterostructures offers an unparalleled new approach to regulation of device performance in optoelectronic and photonics applications. Despite the fact that the saturable absorption (SA) in 2D heterostructures involves highly efficient optical modulation in the space and time domain, the lack of explicit SA regulation mechanism at the nanoscale prevents this feature from realizing nanophotonic modulation. Here, the enhancement of SA response via CT in WS2/graphene vertical heterostructure is proposed and the related mechanism is demonstrated through simulations and experiments. Leveraging this mechanism, CT-induced SA enhancement can be expanded to a wide range of nonlinear optical modulation applications for 2D materials. The results suggest that CT between 2D heterostructures enables efficient nonlinear optical response regulation.

Genetic algorithm-based optical proximity correction for DMD maskless lithography.

We present an optical proximity correction (OPC) method based on a genetic algorithm for reducing the optical proximity effect-induced pattern distortion in digital micromirror device (DMD) maskless lithography. Via this algorithm-assisted grayscale modulation of the initial mask at the pixel level, the exposure pattern can be enhanced significantly. Actual exposure experiments revealed that the rate of matching between the final exposure pattern and the mask pattern can be increased by up to 20%. This method's applicability to complex masks further demonstrates its universality for mask pattern optimization. We believe that our algorithm-assisted OPC could be highly helpful for high-fidelity and efficient DMD maskless lithography for microfabrication.

Thickness-dependent carrier transport of PdSe2films grown by plasma-assisted metal selenization.

Atomically thin narrow-bandgap layered PdSe2has attracted much attention due to its rich and unique electrical properties. For silicon-compatible device integration, direct wafer-scale preparation of high-quality PdSe2thin film on a silicon substrate is highly desired. Here, we present the low-temperature synthesis of large-area polycrystalline PdSe2films grown on SiO2/Si substrates by plasma-assisted metal selenization and investigate their charge carrier transport behaviors. Raman analysis, depth-dependent x-ray photoelectron spectroscopy, and cross-sectional transmission electron microscopy were used to reveal the selenization process. The results indicate a structural evolution from initial Pd to intermediate PdSe2-xphase and eventually to PdSe2. The field-effect transistors fabricated from these ultrathin PdSe2films exhibit strong thickness-dependent transport behaviors. For thinner films (4.5 nm), a record high on/off ratio of 104was obtained. While for thick ones (11 nm), the maximum hole mobility is about 0.93 cm2V-1S-1, which is the record high value ever reported for polycrystalline films. These findings suggest that our low-temperature-metal-selenized PdSe2films have high quality and show great potential for applications in electrical devices.

Van der Waals nanomesh electronics on arbitrary surfaces.

Chemical bonds, including covalent and ionic bonds, endow semiconductors with stable electronic configurations but also impose constraints on their synthesis and lattice-mismatched heteroepitaxy. Here, the unique multi-scale van der Waals (vdWs) interactions are explored in one-dimensional tellurium (Te) systems to overcome these restrictions, enabled by the vdWs bonds between Te atomic chains and the spontaneous misfit relaxation at quasi-vdWs interfaces. Wafer-scale Te vdWs nanomeshes composed of self-welding Te nanowires are laterally vapor grown on arbitrary surfaces at a low temperature of 100 °C, bringing greater integration freedoms for enhanced device functionality and broad applicability. The prepared Te vdWs nanomeshes can be patterned at the microscale and exhibit high field-effect hole mobility of 145 cm2/Vs, ultrafast photoresponse below 3 µs in paper-based infrared photodetectors, as well as controllable electronic structure in mixed-dimensional heterojunctions. All these device metrics of Te vdWs nanomesh electronics are promising to meet emerging technological demands.

Gate-bias instability of few-layer WSe2 field effect transistors.

Semiconducting two-dimensional (2D) layered materials have shown great potential in next-generation electronics due to their novel electronic properties. However, the performance of field effect transistors (FETs) based on 2D materials is always environment-dependent and unstable under gate bias stress. Here, we report the environment-dependent performance and gate-induced instability of few-layer p-type WSe2-based FETs. We found that the hole mobility of the transistor drastically reduces in vacuum and further decreases after in situ annealing in vacuum compared with that in air, which can be recovered after exposure to air. The on-current of the WSe2 FET increases with positive gate bias stress time but decreases with negative gate bias stress time. For the double sweeping transfer curve, the transistor shows prominent hysteresis, which depends on both the sweeping rate and the sweeping range. Large hysteresis can be observed when a slow sweeping rate or large sweeping range is applied. In addition, such gate-induced instability can be reduced in vacuum and further reduced after in situ vacuum annealing. However, the gate-induced instability cannot be fully eliminated, which suggests both gases adsorbed on the device and defects in the WSe2 channel and/or the interface of WSe2/SiO2 are responsible for the gate-induced instability. Our results provide a deep understanding of the gate-induced instability in p-type WSe2 based transistors, which may shed light on the design of high-performance 2D material-based electronics.

Gate Bias Stress Instability and Hysteresis Characteristics of InAs Nanowire Field-Effect Transistors.

Because of the excellent electrical properties, III-V semiconductor nanowires are promising building blocks for next-generation electronics; however, their rich surface states inevitably contribute large amounts of charge traps, leading to gate bias stress instability and hysteresis characteristics in nanowire field-effect transistors (FETs). Here, we investigated thoroughly the gate bias stress and hysteresis effects in InAs nanowire FETs. It is observed that the output current decreases together with the threshold voltage shifting to the positive direction when a positive gate bias stress is applied, and vice versa for the negative gate bias stress. For double-sweep transfer characteristics, the significant hysteresis behavior is observed, depending heavily on the sweeping rate and range. On the basis of complementary investigations of these devices, charge traps are confirmed to be the dominant factor for these instability effects. Importantly, the hysteresis can be simulated well by utilizing a combination of the rate equation for electron density and the empirical model for electron mobility. This provides an accurate evaluation of carrier mobility, which is in distinct contrast to the overestimation of mobility when using the transconductance for calculation. All these findings are important for understanding the charge trap dynamics to further enhance the device performance of nanowire FETs.

Artificial visual systems enabled by quasi-two-dimensional electron gases in oxide superlattice nanowires.

Rapid development of artificial intelligence techniques ignites the emerging demand on accurate perception and understanding of optical signals from external environments via brain-like visual systems. Here, enabled by quasi-two-dimensional electron gases (quasi-2DEGs) in InGaO3(ZnO)3 superlattice nanowires (NWs), an artificial visual system was built to mimic the human ones. This system is based on an unreported device concept combining coexistence of oxygen adsorption-desorption kinetics on NW surface and strong carrier quantum-confinement effects in superlattice core, to resemble the biological Ca2+ ion flux and neurotransmitter release dynamics. Given outstanding mobility and sensitivity of superlattice NWs, an ultralow energy consumption down to subfemtojoule per synaptic event is realized in quasi-2DEG synapses, which rivals that of biological synapses and now available synapse-inspired electronics. A flexible quasi-2DEG artificial visual system is demonstrated to simultaneously perform high-performance light detection, brain-like information processing, nonvolatile charge retention, in situ multibit-level memory, orientation selectivity, and image memorizing.

Graphene/WS2 heterostructure saturable absorbers for ultrashort pulse generation in L-band passively mode-locked fiber lasers.

Graphene/WS2 (G/WS2) van der Waals (vdW) heterostructures are utilized as saturable absorbers (SAs) in compact mode-locked fiber lasers operating in the telecommunication L-band for the first time. The interlayer coupling is confirmed by Raman and photoluminescence spectra. In comparison with pure WS2, the heterostructure exhibits excellent nonlinear optical properties in terms of larger modulation depth and lower saturation intensity due to the strong interlayer coupling. By incorporating the G/WS2-based SA into an all-anomalous-dispersion fiber laser, stable conventional-soliton pulses with a pulse duration down to 660 fs can be realized at 1601.9 nm, manifesting better output performance compared to pure WS2. In addition, through shifting the cavity dispersion to the net-normal dispersion, the G/WS2 SA can also be applied for dissipative-soliton generation. Resultant output pulses feature the central wavelength of 1593.5 nm and the pulse duration of 55.6 ps. Our results indicate that the G/WS2 vdW heterostructure is a promising candidate as SA for pulsed laser applications, which pave the way for the development of novel ultrafast photonic devices with desirable performance.

2D materials beyond graphene toward Si integrated infrared optoelectronic devices.

Since the discovery of graphene in 2004, it has become a worldwide hot topic due to its fascinating properties. However, the zero band gap and weak light absorption of graphene strictly restrict its applications in optoelectronic devices. In this regard, semiconducting two-dimensional (2D) materials are thought to be promising candidates for next-generation optoelectronic devices. Infrared (IR) light has gained intensive attention due to its vast applications, including night vision, remote sensing, target acquisition, optical communication, etc. Consequently, the generation, modulation, and detection of IR light are crucial for practical applications. Due to the van der Waals interaction between 2D materials and Si, the lattice mismatch of 2D materials and Si can be neglected; consequently, the integration process can be achieved easily. Herein, we review the recent progress of semiconducting 2D materials in IR optoelectronic devices. Firstly, we introduce the background and motivation of the review. Then, the suitable materials for IR applications are presented, followed by a comprehensive review of the applications of 2D materials in light emitting devices, optical modulators, and photodetectors. Finally, the problems encountered and further developments are summarized. We believe that milestone investigations of IR optoelectronics based on 2D materials beyond graphene will emerge soon, which will bring about great industrial revelations in 2D material-based integrated nanodevice commercialization.

High-Performance Transparent Ultraviolet Photodetectors Based on InGaZnO Superlattice Nanowire Arrays.

Due to the efficient photocarrier separation and collection coming from their distinctive band structures, superlattice nanowires (NWs) have great potential as active materials for high-performance optoelectronic devices. In this work, InGaZnO NWs with superlattice structure and controllable stoichiometry are obtained by ambient-pressure chemical vapor deposition. Along the NW axial direction, perfect alternately stacking of InGaO(ZnO)4+ blocks and InO2- layers is observed to form a periodic layered structure. Strikingly, when configured into individual NW photodetectors, the Ga concentration is found to significantly influence the amount of oxygen vacancies and oxygen molecules adsorbed on the NW surface, which dictate the photoconducting properties of the NW channels. Based on the optimized Ga concentration (i.e., In1.8Ga1.8Zn2.4O7), the individual NW device exhibits an excellent responsivity of 1.95 × 105 A/W and external quantum efficiency of as high as 9.28 × 107% together with a rise time of 0.93 s and a decay time of 0.2 s for the ultraviolet (UV) photodetection. Besides, the obtained NWs can be fabricated into large-scale parallel arrays on glass substrates as well to achieve fully transparent UV photodetectors, where the performance is on the same level or even better than many transparent photodetectors with high performance. All the results discussed above demonstrate the great potential of InGaZnO superlattice NWs for next-generation advanced optoelectronic devices.

Utilizing a NaOH Promoter to Achieve Large Single-Domain Monolayer WS2 Films via Modified Chemical Vapor Deposition.

Because of their fascinating properties, two-dimensional (2D) nanomaterials have attracted a lot of attention for developing next-generation electronics and optoelectronics. However, there is still a lack of cost-effective, highly reproducible, and controllable synthesis methods for developing high-quality semiconducting 2D monolayers with a sufficiently large single-domain size. Here, utilizing a NaOH promoter and W foils as the W source, we have successfully achieved the fabrication of ultralarge single-domain monolayer WS2 films via a modified chemical vapor deposition method. With the proper introduction of a NaOH promoter, the single-domain size of monolayer WS2 can be increased to 550 µm, while the WS2 flakes can be well controlled by simply varying the growth duration and oxygen concentration in the carrier gas. Importantly, when they are fabricated into global backgated transistors, WS2 devices exhibit respectable peak electron mobility up to 1.21 cm2 V-1 s-1, which is comparable to those of many state-of-the-art WS2 transistors. Photodetectors based on these single-domain WS2 monolayers give an impressive photodetection performance with a maximum responsivity of 3.2 mA W-1. All these findings do not only provide a cost-effective platform for the synthesis of high-quality large single-domain 2D nanomaterials, but also facilitate their excellent intrinsic material properties for the next-generation electronic and optoelectronic devices.

Engineering Surface Structure of Spinel Oxides via High-Valent Vanadium Doping for Remarkably Enhanced Electrocatalytic Oxygen Evolution Reaction.

Spinel oxides (AB2O4) with unique crystal structures have been widely explored as promising alternative catalysts for efficient oxygen evolution reactions; however, developing novel methods to fabricate robust, cost-effective, and high-performance spinel oxide based electrocatalysts is still a great challenge. Here, utilizing a complementary experimental and theoretical approach, pentavalent vanadium doping in the spinel oxides (i.e., Co3O4 and NiFe2O4) has been thoroughly investigated to engineer their surface structures for the enhanced electrocatalytic oxygen evolution reaction. Specifically, when the optimal concentration of vanadium (ca. 7.7 at. %) is incorporated into Co3O4, the required overpotential to reach a certain jGEOM and jECSA decreases dramatically for oxygen evolution reactions in alkaline media. Even after 30 h of chronopotentiometry, the required potential for V-doped Co3O4 just increases by 16.3 mV, being much lower than that of the undoped one. It is observed that the pentavalent vanadium doping introduces lattice distortions and defects on the surface, which in turn exposes more active sites for reactions. DFT calculations further reveal the rate-determining step changing from the step of *-O to *-OOH to the step of *-OH to *-O, while the corresponding energy barriers decrease from 1.73 to 1.57 eV accordingly after high-valent V doping. Moreover, the oxygen intermediate probing method using methanol as a probing reagent also demonstrates a stronger OH* adsorption on the surface after V doping. When vanadium doping is performed in the inverse spinel matrix of NiFe2O4, impressive performance enhancement in the oxygen evolution reaction is as well witnessed. All these results clearly illustrate that the V doping process can not only efficiently improve the electrochemical properties of spinel transition metal oxides but also provide new insights into the design of high-performance water oxidation electrocatalysts.

Direct Vapor-Liquid-Solid Synthesis of All-Inorganic Perovskite Nanowires for High-Performance Electronics and Optoelectronics.

Controlled synthesis of lead halide perovskite (LHP) nanostructures not only benefits fundamental research but also offers promise for applications. Among many synthesis techniques, although catalytic vapor-liquid-solid (VLS) growth is recognized as an effective route to achieve high-quality nanostructures, until now, there is no detailed report on VLS grown LHP nanomaterials due to the emerging challenges in perovskite synthesis. Here, we develop a direct VLS growth for single-crystalline all-inorganic lead halide perovskite ( i.e., CsPbX3; X = Cl, Br, or I) nanowires (NWs). These NWs exhibit high-performance photodetection with the responsivity exceeding 4489 A/W and detectivity over 7.9 × 1012 Jones toward the visible light regime. Field-effect transistors (FET) based on individual CsPbX3 NWs are also fabricated, where they show the superior hole mobility of up to 3.05 cm2/(V s), higher than other all-inorganic LHP devices. This work provides important guidelines for the further improvement of these perovskite nanostructures for utilizations.

Ultra-fast photodetectors based on high-mobility indium gallium antimonide nanowires.

Because of tunable bandgap and high carrier mobility, ternary III-V nanowires (NWs) have demonstrated enormous potential for advanced applications. However, the synthesis of large-scale and highly-crystalline InxGa1-xSb NWs is still a challenge. Here, we achieve high-density and crystalline stoichiometric InxGa1-xSb (0.09 < x < 0.28) NWs on amorphous substrates with the uniform phase-purity and <110 >-orientation via chemical vapor deposition. The as-prepared NWs show excellent electrical and optoelectronic characteristics, including the high hole mobility (i.e. 463 cm2 V-1 s-1 for In0.09Ga0.91Sb NWs) as well as broadband and ultrafast photoresponse over the visible and infrared optical communication region (1550 nm). Specifically, the In0.28Ga0.72Sb NW device yields efficient rise and decay times down to 38 and 53 µs, respectively, along with the responsivity of 6000 A W-1 and external quantum efficiency of 4.8 × 106 % towards 1550 nm regime. High-performance NW parallel-arrayed devices can also be fabricated to illustrate their large-scale device integrability for next-generation, ultrafast, high-responsivity and broadband photodetectors.

Nonpolar-Oriented Wurtzite InP Nanowires with Electron Mobility Approaching the Theoretical Limit.

As an important semiconductor nanomaterial, InP nanowires (NWs) grown with a typical vapor-liquid-solid mechanism are still restricted from their low electron mobility for practical applications. Here, nonpolar-oriented defect-free wurtzite InP NWs with electron mobility of as high as 2000 cm2 V-1 s-1 can be successfully synthesized via Pd-catalyzed vapor-solid-solid growth. Specifically, PdIn catalyst particles are involved and found to expose their PdIn{210} planes at the InP nucleation frontier due to their minimal lattice mismatch with nonpolar InP{2̅110} and {1̅100} planes. This appropriate lattice registration would then minimize the overall free energy and enable the highly crystalline InP NW growth epitaxially along the nonpolar directions. Because of the minimized crystal defects, the record-high electron mobility of InP NWs ( i.e., 2000 cm2 V-1 s-1 at an electron concentration of 1017 cm-3) results, being close to the theoretical limit of their bulk counterparts. Furthermore, once the top-gated device geometry is employed, the device subthreshold slopes can be impressively reduced down to 91 mV dec-1 at room temperature. In addition, these NWs exhibit a high photoresponsivity of 104 A W-1 with fast rise and decay times of 0.89 and 0.82 s, respectively, in photodetection. All these results evidently demonstrate the promise of nonpolar-oriented InP NWs for next-generation electronics and optoelectronics.

Facile large-area autofocusing Raman mapping system for 2D material characterization.

Two-dimensional (2D) materials have attracted tremendous research interests due to their intriguing properties and promising applications. As one of the most typical 2D material characterization methods, however, the conventional Raman mapping only works within few-hundreds micrometers range at a time due to the focus depth constraint and the non-ideal level of the substrate. To implement wafer-scale Raman scanning, large-area autofocusing Raman mapping (LARM) is highly desirable. Here, we present a modified centroid method to build a facile LARM system in which the Raman excitation laser is employed as the focus laser, reducing the system cost and complexity. Based on identifying the shape of the semicircle laser reflection image, a self-written autofocusing algorithm allows a real-time adjusting the focus position during the large-scale scanning. As a state-of-the-art demonstration, the thickness distribution of both few layer WS2 triangle domains sparsely located in sub-millimeter range and polycrystalline continuous MoS2 film up to 2-inch scale can be well-revealed. Our results may shed light on wafer-scale nondestructive optical characterization of 2D materials.

Novel Series of Quasi-2D Ruddlesden-Popper Perovskites Based on Short-Chained Spacer Cation for Enhanced Photodetection.

Quasi two-dimensional (2D) layered organic-inorganic perovskite materials (e.g., (BA)2(MA) n-1Pb nI3 n+1; BA = butylamine; MA = methylamine) have recently attracted wide attention because of their superior moisture stability as compared with three-dimensional counterparts. Inevitably, hydrophobic yet insulating long-chained organic cations improve the stability at the cost of hindering charge transport, leading to the unsatisfied performance of subsequently fabricated devices. Here, we reported the synthesis of quasi-2D ( iBA)2(MA) n-1Pb nI3 n+1 perovskites, where the relatively pure-phase ( iBA)2PbI4 and ( iBA)2MA3Pb4I13 films can be obtained. Because of the shorter-branched chain of iBA as compared with that of its linear equivalent ( n-butylamine, BA), the resulting ( iBA)2(MA) n-1Pb nI3 n+1 perovskites exhibit much enhanced photodetection properties without sacrificing their excellent stability. Through hot-casting, the optimized ( iBA)2(MA) n-1Pb nI3 n+1 perovskite films with n = 4 give the significantly improved crystallinity, demonstrating the high responsivity of 117.09 mA/W, large on-off ratio of 4.0 × 102, and fast response speed (rise and decay time of 16 and 15 ms, respectively). These figure-of-merits are comparable or even better than those of state-of-the-art quasi-2D perovskite-based photodetectors reported to date. Our work not only paves a practical way for future perovskite photodetector fabrication via modulation of their intrinsic material properties but also provides a direction for further performance enhancement of other perovskite optoelectronics.

High-Index Faceted Porous Co3O4 Nanosheets with Oxygen Vacancies for Highly Efficient Water Oxidation.

Because of sluggish kinetics of the oxygen evolution reaction (OER), designing low-cost, highly active, and stable electrocatalysts for OER is important for the development of sustainable electrochemical water splitting. Here, {112} high-index facet exposed porous Co3O4 nanosheets with oxygen vacancies on the surface have been successfully synthesized via a simple hydrothermal method followed by NaBH4 reduction. As compared with the pristine and other faceted porous Co3O4 nanosheets (e.g., {110} and {111}), the as-prepared {112} faceted porous nanosheets exhibit a much lower overpotential of 318 mV at a current density of 10 mA cm-2. Importantly, these nanosheets also give excellent electrochemical stability, displaying an insignificant change in the required overpotential at a current density of 10 mA cm-2 even after a 14 h long-term chronoamperometric test. All these superior OER activity and stability could be attributed to their unique hierarchical structures assembled by ultrathin porous nanosheets, {112} high-index exposed facets with higher ratio of Co2+/Co3+ and oxygen vacancies on the surface, which can substantially enhance the charge transfer rate and increase the number of active sites. All these findings not only demonstrate the potency of our Co3O4 nanosheets for efficient water oxidation but also provide further insights into developing cost-effective and high-performance catalysts for electrochemical applications.