ABSTRACT
VUV absorbance and index of refraction data for a series of linear and cyclic alkanes have been collected in order to understand the relationship between the electronic excitation wavelength (or absorbance edge), index of refraction, and molecular structure. The absorbance edge and index for a homologous series of both linear and cyclic alkanes increase with increasing carbon number. The optical properties of complex cycloalkanes do not vary predictably with increasing carbon number but instead depend on variations in the hydrocarbon structure in addition to hydrocarbon size. An understanding of the fundamental optical properties of this class of compounds is directly applicable to the identification of a high index and low-absorbance fluid for 193 nm immersion lithography.