Bidirectional reflectance capabilities of the NIST Robotic Optical Scattering Instrument.

The National Institute of Standards and Technology (NIST) Robotic Optical Scattering Instrument (ROSI) serves as the national reference instrument for specular and diffuse bidirectional reflectance measurements in the ultraviolet to short-wave infrared wavelength regions. This paper gives a comprehensive overview of the design, operation, and capabilities of ROSI. We describe measurement methods for diffuse and specular reflectance, identify and quantify the elements of the uncertainty budget, and validate the reflectance scale through comparison with NIST's previous reference instrument, the Spectral Tri-function Automated Reference Reflectometer. Examples of the range of ROSI's capabilities, including the limits for low-reflectance measurements and a research application using out-of-plane measurements of bidirectional reflectance for remote sensing reference reflectors, are also covered.

Optical reflectance of pyrheliometer absorption cavities: progress toward SI-traceable measurements of solar irradiance.

We have accurately determined the absorptance of three pyrheliometer cavities at 532 nm by measuring the residual reflectance using an angle-resolved bidirectional reflectometer. Measurements were performed at a normal incidence as a function of the viewing angle and position on the cavity cone. By numerically integrating the measured angle-resolved scatter over both the direction and position and accounting for an obstructed view of the cavity, we determined that the effective cavity reflectance was between 8×10-4 and 9×10-4. Thus, the absorptance of the three cavities ranged from 0.99909±0.00014 to 0.99922±0.00012 (k=2 combined expanded uncertainties). These measurements, when extended over the spectral range of operation of the pyrheliometer, are required to establish SI traceability for absolute solar irradiance measurements.

Goniometric and hemispherical reflectance and transmittance measurements of fused silica diffusers.

Fused silica diffusers, made by forming scattering centers inside fused silica glass, can exhibit desirable optical properties, such as reflectance or transmittance independent of viewing angle, spectrally flat response into the ultraviolet wavelength range, and good spatial uniformity. The diffusers are of interest for terrestrial and space borne remote sensing instruments, which use light diffusers in reflective and transmissive applications. In this work, we report exploratory measurements of two samples of fused silica diffusers. We will present goniometric bidirectional scattering distribution function (BSDF) measurements under normal illumination provided by the National Institute of Standards and Technology (NIST)'s Goniometric Optical Scatter Instrument (GOSI), by NIST's Infrared reference integrating sphere (IRIS) and by the National Aeronautics and Space Administration (NASA)'s Diffuser Calibration Laboratory. We also present hemispherical diffuse transmittance and reflectance measurements provided by NIST's Double integrating sphere Optical Scattering Instrument (DOSI). The data from the DOSI is analyzed by Prahl's inverse adding-doubling algorithm to obtain the absorption and reduced scattering coefficient of the samples. Implications of fused silica diffusers for remote sensing applications are discussed.

Scatterfield microscopy for extending the limits of image-based optical metrology.

We have developed a set of techniques, referred to as scatterfield microscopy, in which the illumination is engineered in combination with appropriately designed metrology targets to extend the limits of image-based optical metrology. Previously we reported results from samples with sub-50-nm-sized features having pitches larger than the conventional Rayleigh resolution criterion, which resulted in images having edge contrast and elements of conventional imaging. In this paper we extend these methods to targets composed of features much denser than the conventional Rayleigh resolution criterion. For these applications, a new approach is presented that uses a combination of zero-order optical response and edge-based imaging. The approach is, however, more general and a more comprehensive set of analyses using theoretical methods is presented. This analysis gives a direct measure of the ultimate size and density of features that can be measured with these optical techniques. We present both experimental results and optical simulations using different electromagnetic scattering packages to evaluate the ultimate sensitivity and extensibility of these techniques.