ABSTRACT
The anodic dissolution of silicon in acidic electrolytes is a well-known technology enabling the silicon machining to be accurately controlled down to the micrometer scale in low-doped n-type silicon electrodes. Attempts to scale down this technology to the submicrometer scale has shown to be challenging, though it premises to enable the fabrication of meso and nano structures/systems that would greatly impact the fields of biosensors and nanomedicine. In this work, we report on the electrochemical etching at high anodic voltages (up to 40 V) of two-dimensional regular arrays of millions pores per square centimeter (up to 30 × 106 cm-2) with sub-micrometric diameter (down to ~860 nm), high depth (up to ~40 µm), and high aspect-ratio (up to ~45) using low-doped n-type silicon electrodes (resistivity 3-8 Ω cm). The use of high anodic voltages, which are over one order of magnitude higher than that commonly used in electrochemical etching of silicon, tremendously improves hole focusing at the pore tips during the etching and enables, in turn, the control of electrochemical etching of submicrometer-sized pores when spatial period reduces below 2 µm. A theoretical model allows experimental results to be interpreted in terms of an electric-field-enhanced focusing of holes at the tip apex of the pores at high anodic voltages, with respect to the pore base, which leads to a smaller curvature radius of the tip apex and enables, in turn, the etching of pore tips to be preferentially sustained over time and space.
ABSTRACT
In this work, the bottom-up template-assisted preparation of high-density lattices (up to 11 · 106 membranes/cm2) of suspended polymer membranes with micrometric size (in the order of few µm2) and sub-micrometric thickness (in the order of hundreds of nm) is demonstrated for both photoluminescent and non-photoluminescent polymers by capillarity-driven solvent evaporation. Solvent evaporation of low concentration polymer solutions drop-cast on an array of open-ended micropipes is shown to lead to polymer membrane formation at the inlet of the micropipes thanks to capillarity. The method is proven to be robust with high-yield (>98%) over large areas (1 cm2) and of general validity for both conjugated and non-conjugated polymers, e.g. poly(9,9-di-n-octylfluorene-alt-benzothiadiazole (F8BT), poly[2-methoxy-5-(3',7'-dimethyloctyloxy)-1,4-phenylenevinylene] (MDMO-PPV), polystyrene (PS), thus breaking a new ground on the controlled preparation of polymer micro and nanostructures. Angle dependence and thermal stability of photoluminescence emission arising from F8BT membrane lattices was thorough investigated, highlighting a non-Lambertian photoluminescence emission of membrane lattices with respect to F8BT films. The method is eventually successfully applied to the preparation of both photoluminescent and non-photoluminescent micro Quick Response (µQR) codes using different polymers, i.e. F8BT, MDMO-PPV, PS, thus providing micrometric-sized taggants suitable for anti-counterfeiting applications.