Thin-Film Piezoelectric Micromachined Ultrasound Transducers in Biomedical Applications: A Review.

Thin-film piezoelectric micromachined ultrasound transducers (PMUTs) are an increasingly relevant and well-researched field, and their biomedical importance has been growing as the technology continues to mature. This review article briefly discusses their history in biomedical use, provides a simple explanation of their principles for newer readers, and sheds light on the materials selection for these devices. Primarily, it discusses the significant applications of PMUTs in the biomedical industry and showcases recent progress that has been made in each application. The biomedical applications covered include common historical uses of ultrasound such as ultrasound imaging, ultrasound therapy, and fluid sensing, but additionally new and upcoming applications such as drug delivery, photoacoustic imaging, thermoacoustic imaging, biometrics, and intrabody communication. By including a device comparison chart for different applications, this review aims to assist microelectromechanical systems (MEMS) designers that work with PMUTs by providing a benchmark for recent research works. Furthermore, it puts forth a discussion on the current challenges being faced by PMUTs in the biomedical field, current and likely future research trends, and opportunities for PMUT development areas, as well as sharing the opinions and predictions of the authors on the state of this technology as a whole. The review aims to be a comprehensive introduction to these topics without diving excessively deep into existing literature.

Low-Cost Scalable PCB-Based 2-D Transducer Arrays for Volumetric Photoacoustic Imaging.

Photoacoustic (PA) imaging provides deep tissue molecular imaging of chromophores with optical absorption contrast and ultrasonic resolution. Present PA imaging techniques are predominantly limited to one 2D plane per acquisition. 2D ultrasound transducers, required for real-time 3D PA imaging, are high-cost, complex to fabricate and have limited scalability in design. We present novel PCB-based 2D matrix ultrasound transducer arrays that are capable of being bulk manufactured at low-cost without using laborious ultrasound fabrication tools. The 2D ultrasound array specifications are easily scalable with respect to widely available PCB design and fabrication tools at low cost. To demonstrate scalability, we fabricated low (11 MHz) frequency 8x8 matrix array and high (40 MHz) frequency 4x4 matrix array by directly bonding an undiced polyvinylidene fluoride (PVDF) piezoelectric material of desired thickness to the custom designed PCB substrate. Characterization results demonstrate wideband PA receive sensitivity for both low (87%) and high (188%) frequency arrays. Volumetric PA imaging results of light absorbing targets inside optical scattering medium demonstrate improved spatial resolution and field of view with increase in aperture size.

Advances and Applications of Metal-Organic Frameworks (MOFs) in Emerging Technologies: A Comprehensive Review.

Metal-organic frameworks (MOFs) that are the wonder material of the 21st century consist of metal ions/clusters coordinated to organic ligands to form one- or more-dimensional porous structures with unprecedented chemical and structural tunability, exceptional thermal stability, ultrahigh porosity, and a large surface area, making them an ideal candidate for numerous potential applications. In this work, the recent progress in the design and synthetic approaches of MOFs and explore their potential applications in the fields of gas storage and separation, catalysis, magnetism, drug delivery, chemical/biosensing, supercapacitors, rechargeable batteries and self-powered wearable sensors based on piezoelectric and triboelectric nanogenerators are summarized. Lastly, this work identifies present challenges and outlines future opportunities in this field, which can provide valuable references.

Thin-film PMUTs: a review of over 40 years of research.

Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices' design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author's past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.

Electric current-assisted manipulation of liquid metals using a stylus at micro-and nano-scales.

A novel methodology, based on wetting and electromigration, for transporting liquid metal, over long distances, at micro-and nano-scale using a stylus is reported. The mechanism is analogous to a dropper that uses 'suction and release' actions to 'collect and dispense' liquid. In our methodology, a stylus coated with a thin metal film acts like the dropper that collects liquid metal from a reservoir upon application of an electric current, holds the liquid metal via wetting while carrying the liquid metal over large distances away from the reservoir and drops it on the target location by reversing the direction of electric current. Essentially, the working principle of the technique relies on the directionality of electromigration force and adhesive force due to wetting. The working of the technique is demonstrated by using an Au-coated Si micropillar as the stylus, liquid Ga as the liquid metal to be transported, and a Kleindiek-based position micro-manipulator to traverse the stylus from the liquid reservoir to the target location. For demonstrating the potential applications, the technique is utilized for closing a micro-gap by dispensing a minuscule amount of liquid Ga and conformally coating the desired segment of the patterned thin films with liquid Ga. This study confirms the promising potential of the developed technique for reversible, controlled manipulation of liquid metal at small length scales.

Manipulating liquid metal flow for creating standalone structures with micro-and nano-scale features in a single step.

Standalone structures with periodic surface undulations or ripples can be spontaneously created upon flowing a liquid metal, e.g. Ga, over a metallic film, e.g. Pt, Au, etc, through a complex 'wetting-reaction'-driven process. Due to the ability of 3-dimensional patterning at the small length scale in a single step, the liquid metal 'ripple' flow is a promising non-conventional patterning technique. Herein, we examine the effect of a few process parameters, such as distance away from the liquid reservoir, size of the liquid reservoir, and the geometry, thickness, and width of substrate metal film, on the nature of the ripple flow to produce finer patterns with feature sizes of ≤ 2µm. The height and the pitch of the pattern decrease with distance from the liquid reservoir and decrease in the reservoir volume. Furthermore, a decrease in the thickness and width of the substrate film also leads to a decrease in the height and pitch of the ripples. Finally, the application of an external electric field also controls the ripple patterns. By optimizing various parameters, standalone ripple structures of Ga with the height and pitch of ≤ 500 nm are created. As potential applications, the ripple patterns with micro-and nano-scopic features are demonstrated to produce a diffraction grating and a die for micro-stamping.

Spontaneous Formation of Structures with Micro- and Nano-Scopic Periodic Ripple Patterns.

We report the first study on the formation of structures with micro- and nano-scopic periodic surface patterns created by the spontaneous flow of liquid metal over thin metallic solid films. Minute details of the flow of liquid gallium over gold are captured in situ at very high magnifications using a scanning electron microscope, and a series of experiments and microstructural characterization are performed to understand the underlying principles of the liquid flow and the pattern formation. This phenomenon is solely driven by wetting, with little influence of gravity, and is aided by a tenacious semi-solidus envelope of the intermetallic compound formed due to the reaction between the liquid metal and the metallic substrate. This complex flow creates highly periodic patterns with features ranging from hundreds of nanometers to tens of micrometers, which can be tuned a priori. We propose a model capturing the essential mechanics of the ripple formation and apply it to simulate the formation of a single ripple, along with its essential asymmetry, that forms the basis for generating the observed patterns.