ABSTRACT
A new numerical Monte Carlo method based model of a hot cavity surface ionization ion source is presented in this paper. The model, intended to support the studies on ionization phenomena in a widely used class of ion sources, takes into account geometry of the ion source and extraction system, ionizer temperature and other features. The results of ion source efficiency calculations for various configurations of the extraction field are reviewed. The dominant role of the ionizer region near the extraction opening is described. Simulated dependences of ionization efficiency on the working parameters like ionizer length and temperature, ionization potential of the substance, and extraction voltage are discussed. A good agreement of the experimental data (e.g., influence of ionizer temperature, current-voltage curve) and the predictions of the model is found. It is also shown that the contribution to the ionization yield from impact of thermionic electrons accelerated by the extraction field may be significant, especially for the substances of small surface ionization coefficient. The simulation results are compared to the predictions of different theoretical models of the ion source--the obtained simulation data are in accordance both with a well-known Kirchner formula and the so called spherical ionizer model.
