3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI.

This paper presents three-dimensional (3D) models of high-frequency piezoelectric micromachined ultrasonic transducers (PMUTs) based on the finite element method (FEM). These models are verified with fabricated aluminum nitride (AlN)-based PMUT arrays. The 3D numerical model consists of a sandwiched piezoelectric structure, a silicon passive layer, and a silicon substrate with a cavity. Two types of parameters are simulated with periodic boundary conditions: (1) the resonant frequencies and mode shapes of PMUT, and (2) the electrical impedance and acoustic field of PMUT loaded with air and water. The resonant frequencies and mode shapes of an electrically connected PMUT array are obtained with a laser Doppler vibrometer (LDV). The first resonant frequency difference between 3D FEM simulation and the measurement for a 16-MHz PMUT is reasonably within 6%, which is just one-third of that between the analytical method and the measurement. The electrical impedance of the PMUT array measured in air and water is consistent with the simulation results. The 3D model is suitable for predicting electrical and acoustic performance and, thus, optimizing the structure of high-frequency PMUTs. It also has good potential to analyze the transmission and reception performances of a PMUT array for future compact ultrasonic systems.

Evaporation of Binary Sessile Drops: Infrared and Acoustic Methods To Track Alcohol Concentration at the Interface and on the Surface.

Evaporation of droplets of three pure liquids (water, 1-butanol, and ethanol) and four binary solutions (5 wt % 1-butanol-water-based solution and 5, 25, and 50 wt % ethanol-water-based solutions) deposited on hydrophobic silicon was investigated. A drop shape analyzer was used to measure the contact angle, diameter, and volume of the droplets. An infrared camera was used for infrared thermal mapping of the droplet's surface. An acoustic high-frequency echography technique was, for the first time, applied to track the alcohol concentration in a binary-solution droplet. Evaporation of pure alcohol droplets was executed at different values of relative humidity (RH), among which the behavior of pure ethanol evaporation was notably influenced by the ambient humidity as a result of high hygrometry. Evaporation of droplets of water and binary solutions was performed at a temperature of 22 °C and a mean humidity of approximately 50%. The exhaustion times of alcohol in the droplets estimated by the acoustic method and the visual method were similar for the water-1-butanol mixture; however, the time estimated by the acoustic method was longer when compared with that estimated by the visual method for the water-ethanol mixture due to the residual ethanol at the bottom of the droplet.

High-frequency acoustic for nanostructure wetting characterization.

Nanostructure wetting is a key problem when developing superhydrophobic surfaces. Conventional methods do not allow us to draw conclusions about the partial or complete wetting of structures on the nanoscale. Moreover, advanced techniques are not always compatible with an in situ, real time, multiscale (from macro to nanoscale) characterization. A high-frequency (1 GHz) acoustic method is used for the first time to characterize locally partial wetting and the wetting transition between nanostructures according to the surface tension of liquids (the variation is obtained by ethanol concentration modification). We can see that this method is extremely sensitive both to the level of liquid imbibition and to the impalement dynamic. We thus demonstrate the possibility to evaluate the critical surface tension of a liquid for which total wetting occurs according to the aspect ratio of the nanostructures. We also manage to identify intermediate states according to the height of the nanotexturation. Finally, our measurements revealed that the drop impalement depending on the surface tension of the liquid also depends on the aspect ratio of the nanostructures. We do believe that our method may lead to new insights into nanoscale wetting characterization by accessing the dynamic mapping of the liquid imbibition under the droplet.

Acoustic tracking of Cassie to Wenzel wetting transitions.

Many applications involving superhydrophobic materials require accurate control and monitoring of wetting states and wetting transitions. Such monitoring is usually done by optical methods, which are neither versatile nor integrable. This letter presents an alternative approach based on acoustic measurements. An acoustic transducer is integrated on the back side of a superhydrophobic silicon surface on which water droplets are deposited. By analyzing the reflection of longitudinal acoustic waves at the composite liquid-solid-vapor interface, we show that it is possible to track the local evolution of the Cassie-to-Wenzel wetting transition efficiently, as induced by evaporation or the electrowetting actuation of droplets.