Subject(s)
Attention Deficit Disorder with Hyperactivity/economics , Episode of Care , Insurance, Health, Reimbursement/economics , Maternal Health Services/economics , Medicaid/economics , Respiratory Tract Infections/economics , Arkansas , Attention Deficit Disorder with Hyperactivity/therapy , Humans , Insurance, Health, Reimbursement/trends , Medicaid/trends , Respiratory Tract Infections/therapy , United StatesSubject(s)
Episode of Care , Medicaid/economics , Medicaid/organization & administration , Reimbursement Mechanisms/economics , Reimbursement Mechanisms/organization & administration , Arkansas , Cost Control , Health Care Reform/economics , Health Care Reform/organization & administration , Humans , United StatesSubject(s)
Health Personnel/legislation & jurisprudence , Medicaid/legislation & jurisprudence , Medical Audit/legislation & jurisprudence , Medical Audit/methods , Medicare/legislation & jurisprudence , Arkansas , Health Personnel/standards , Humans , Medicaid/standards , Medicare/standards , United StatesABSTRACT
High-frequency, thickness mode resonators were fabricated using a 7 microm piezoelectric transducer (PZT) thick film that was produced using a modified composite ceramic sol-gel process. Initial studies dealt with the integration of the PZT thick film onto the substrate. Zirconium oxide (ZrO2) was selected as a diffusion barrier layer and gave good results when used in conjunction with silicon oxide (SiO2) as an etch stop layer. Using these conditions, devices were produced and the acoustic properties measured and modeled. The resonators showed a resonant frequency of about 200 MHz, an effective electromechanical coupling coefficient of 0.34, and a Q factor of 22. Modeling was based on a Mason-type model that gave good agreement between the experimental data and the simulations. The latter showed, for the PZT thick film, an electromechanical coupling coefficient of 0.35, a stiffness of 8.65 x 10(10) N x m(-2) and an e33,f piezoelectric coefficient of 9 C x m(-2).