ABSTRACT
In order to meet the requirements of having a small structure, a wide frequency band, and high sensitivity for acoustic signal measurement, an acoustic sensor based on a silicon-based grooved microring resonator is proposed. In this paper, the effective refractive index method and the finite element method are used to analyze the optical characteristics of a grooved microring resonator, and the size of the sensor is optimized. The theoretical analysis results show that, when the bending radius reaches 10 µm, the theoretical quality factor is about 106, the sensitivity is 3.14 mV/Pa, and the 3 dB bandwidth is 430 MHz, which is three orders of magnitude larger based on the sensitivity of the silicon-based cascaded resonator acoustic sensor. The sensor exhibits high sensitivity and can be used in hydrophones. The small size of the sensor also shows its potential application in the field of array integration.
ABSTRACT
To reduce the loss of the metal-insulator-metal waveguide structure in the near-infrared region, a plasmonic nanosensor structure based on a racetrack resonant cavity is proposed herein. Through finite element simulation, the transmission spectra of the sensor under different size parameters were analyzed, and its influence on the sensing characteristics of the system was examined. The analysis results show that the structure can excite the double Fano resonance, which has a distinctive dependence on the size parameters of the sensor. The position and line shape of the resonance peak can be adjusted by changing the key parameters. In addition, the sensor has a higher sensitivity, which can reach 1503.7 nm/RIU when being used in refractive index sensing; the figure of merit is 26.8, and it can reach 0.75 nm/°C when it is used in temperature sensing. This structure can be used in optical integrated circuits, especially high-sensitivity nanosensors.