Development of High-Precision NO2 Gas Sensor Based on Non-Dispersive Infrared Technology.

Increasing concerns about air quality due to fossil fuel combustion, especially nitrogen oxides (NOx) from marine and diesel engines, necessitate advanced monitoring systems due to the significant health and environmental impacts of nitrogen dioxide (NO2). In this study, a gas detection system based on the principle of the non-dispersive infrared (NDIR) technique is proposed. Firstly, the pyroelectric detector was developed by employing an ultra-thin LiTaO3 (LT) layer as the sensitive element, integrated with nanoscale carbon material prepared by wafer-level graphics technology as the infrared absorption layer. Then, the sensor was hermetically sealed using inert gas through energy storage welding technology, exhibiting a high detectivity (D*) value of 4.19 × 108 cm·âˆšHz/W. Subsequently, a NO2 gas sensor was engineered based on the NDIR principle employing a Micro Electro Mechanical System (MEMS) infrared (IR) emitter, featuring a light path chamber length of 1.5 m, along with integrated signal processing and software calibration algorithms. This gas sensor was capable of detecting NO2 concentrations within the range of 0-500 ppm. Initial tests indicated that the gas sensor exhibited a full-scale relative error of less than 0.46%, a limit of 2.8 ppm, a linearity of -1.09%, a repeatability of 0.47% at a concentration of 500 ppm, and a stability of 2% at a concentration of 500 ppm. The developed gas sensor demonstrated significant potential for application in areas such as industrial monitoring and analytical instrumentation.

Comparative Study of Single Crystal and Polymeric Pyroelectric Detectors in the 0.9-2.0 THz Range Using Monochromatic Laser Radiation of the NovoFEL.

The development of efficient and reliable sensors operating at room temperature is essential to advance the application of terahertz (THz) science and technology. Pyroelectric THz detectors are among the best candidates, taking into account their variety, outstanding performance, ease of fabrication, and robustness. In this work, we compare the performance of six different detectors, based on either LaTiO3 crystal or different polymeric films, using monochromatic radiation of the Novosibirsk Free Electron Laser facility (NovoFEL) in the frequency range of 0.9-2.0 THz. The main characteristics, including noise equivalent power and frequency response, were determined for all of them. Possible reasons for the differences in the obtained characteristics are discussed on the basis of the main physicochemical characteristics and optical properties of the sensitive area. At least three detectors showed sufficient sensitivity to monitor the shape and duration of the THz macropulses utilizing only a small fraction of the THz radiation from the primary beam. This capability is crucial for accurate characterization of THz radiation during the main experiment at various specialized endstations at synchrotrons and free electron lasers. As an example of such characterization, the typical stability of the average NovoFEL radiation power at the beamline of the electron paramagnetic resonance endstation was investigated.

Voltage Response of a Pyroelectric Detector to a Single Rectangular Optical Radiation Pulse.

In this paper, a mathematical description of the voltage response of a pyroelectric detector to a single rectangular pulse of optical radiation is presented. Mathematical procedures leading to the derivation of the dependencies describing the detector response for the cases, taking into account the duration of the radiation pulse absorbed by the detector and the relations between values of the electrical and thermal time constants of the detector, are shown in detail. The analytical results are compared and verified by experimental studies carried out using a commercially available pyroelectric detector (model PE10-S-Q) manufactured by the company Ophir. Comparison of the experimentally obtained data with analytical calculations showed good agreement.

Miniaturized CO2 Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector.

NDIR CO2 gas sensors using a 10-cm-long gas channel and CMOS-compatible 12% doped ScAlN pyroelectric detector have previously demonstrated detection limits down to 25 ppm and fast response time of ∼2 s. Here, we increase the doping concentration of Sc to 20% in our ScAlN-based pyroelectric detector and miniaturize the gas channel by ∼65× volume with length reduction from 10 to 4 cm and diameter reduction from 5 to 1 mm. The CMOS-compatible 20% ScAlN-based pyroelectric detectors are fabricated over 8-in. wafers, allowing cost reduction leveraging on semiconductor manufacturing. Cross-sectional TEM images show the presence of abnormally oriented grains in the 20% ScAlN sensing layer in the pyroelectric detector stack. Optically, the absorption spectrum of the pyroelectric detector stack across the mid-infrared wavelength region shows ∼50% absorption at the CO2 absorption wavelength of 4.26 µm. The pyroelectric coefficient of these 20% ScAlN with abnormally oriented grains shows, in general, a higher value compared to that for 12% ScAlN. While keeping the temperature variation constant at 2 °C, we note that the pyroelectric coefficient seems to increase with background temperature. CO2 gas responses are measured for 20% ScAlN-based pyroelectric detectors in both 10-cm-long and 4-cm-long gas channels, respectively. The results show that for the miniaturized CO2 gas sensor, we are able to measure the gas response from 5000 ppm down to 100 ppm of CO2 gas concentration with CO2 gas response time of ∼5 s, sufficient for practical applications as the average outdoor CO2 level is ∼400 ppm. The selectivity of this miniaturized CO2 gas sensor is also tested by mixing CO2 with nitrogen and 49% sulfur hexafluoride, respectively. The results show high selectivity to CO2 with nitrogen and 49% sulfur hexafluoride each causing a minimum ∼0.39% and ∼0.36% signal voltage change, respectively. These results bring promise to compact and miniature low cost CO2 gas sensors based on pyroelectric detectors, which could possibly be integrated with consumer electronics for real-time air quality monitoring.

A CMOS Compatible Pyroelectric Mid-Infrared Detector Based on Aluminium Nitride.

The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as the pyroelectric material and fabricated using semiconductor mass fabrication processes. To ensure thermal decoupling of the detector, the detectors are realized on a Si3N4/SiO2 membrane. The detectors have been tested at a wavelength close to the CO2 absorption region in the mid-infrared. Devices with various detector and membrane sizes were fabricated and the influence of these dimensions on the performance was investigated. The noise equivalent power of the first demonstrator devices connected to a readout circuit was measured to be as low as 5 . 3 × 10 - 9 W / Hz .

Comparison of Thermal Detector Arrays for Off-Axis THz Holography and Real-Time THz Imaging.

In terahertz (THz) materials science, imaging by scanning prevails when low power THz sources are used. However, the application of array detectors operating with high power THz sources is increasingly reported. We compare the imaging properties of four different array detectors that are able to record THz radiation directly. Two micro-bolometer arrays are designed for infrared imaging in the 8-14 µm wavelength range, but are based on different absorber materials (i) vanadium oxide; (ii) amorphous silicon; (iii) a micro-bolometer array optimized for recording THz radiation based on silicon nitride; and (iv) a pyroelectric array detector for THz beam profile measurements. THz wavelengths of 96.5 µm, 118.8 µm, and 393.6 µm from a powerful far infrared laser were used to assess the technical performance in terms of signal to noise ratio, detector response and detectivity. The usefulness of the detectors for beam profiling and digital holography is assessed. Finally, the potential and limitation for real-time digital holography are discussed.

High precision medical laser power density meter based on AVR microcontroller / 国际生物医学工程杂志

Objective To research and design a kind of high accuracy laser power density meter to measure laser power density in clinical medicine,in order to combine laser with clinical medicine well.Methods The pyroelectric detector was used to convert the laser signal to available electrical signal,preamplifier filter circuit and control circuit were designed to match the detector,and C was used for software programming.With the combination of hardware and software design,a high precision laser power density meter was developed,which was based on AVR microcontroller.Results The instrument could measure the minimum 1 mW/cm2 of laser power density accurately and the error rate was 2％,which met the requirements of the laser power density meter parameters in medical application.Conclusion The power density meter has a high precision,small error rate and good stability,and it can measure the laser power density accurately.

Intramural Comparison of NIST Laser and Optical Fiber Power Calibrations.

The responsivity of two optical detectors was determined by the method of direct substitution in four different NIST measurement facilities. The measurements were intended to demonstrate the determination of absolute responsivity as provided by NIST calibration services at laser and optical-communication wavelengths; nominally 633 nm, 850 nm, 1060 nm, 1310 nm, and 1550 nm. The optical detectors have been designated as checks standards for the purpose of routine intramural comparison of our calibration services and to meet requirements of the NIST quality system, based on ISO 17025. The check standards are two optical-trap detectors, one based on silicon and the other on indium gallium arsenide photodiodes. The four measurement services are based on: (1) the laser optimized cryogenic radiometer (LOCR) and free field collimated laser light; (2) the C-series isoperibol calorimeter and free-field collimated laser light; (3) the electrically calibrated pyroelectric radiometer and fiber-coupled laser light; (4) the pyroelectric wedge trap detector, which measures light from a lamp source and monochromator. The results indicate that the responsivity of the check standards, as determined independently using the four services, agree to within the published expanded uncertainty ranging from approximately 0.02 % to 1.24 %.