1.
Appl Opt
; 59(5): A16-A19, 2020 Feb 10.
Artículo
en Inglés
| MEDLINE
| ID: mdl-32225347
RESUMEN
Rotational spatial plasma-enhanced atomic layer deposition has been used to deposit thin films on half-sphere lenses. Non-uniformity of less than ±1% is demonstrated for Nb2O5 deposited at 1.4 Å/s and for SiO2 deposited at 6 Å/s.