1.
Chem Commun (Camb)
; 49(57): 6451-3, 2013 Jul 21.
Artículo
en Inglés
| MEDLINE
| ID: mdl-23756448
RESUMEN
A photoinduced confined chemical etching system based on TiO2 nanotube arrays is developed for the planarization of the copper surface, which is proved to be a prospective stress-free chemical planarization method for metals and semiconductors.
