1.
Guang Pu Xue Yu Guang Pu Fen Xi
; 33(4): 1108-11, 2013 Apr.
Artículo
en Chino
| MEDLINE
| ID: mdl-23841438
RESUMEN
The optical emission spectroscopy of hybrid N2/trimethylgallium (TMG) plasma in an ECR-PECVD system was investigated. The results indicate that the TMG gas is strongly dissociated into Ga*, CH and H even under self-heating condition. Ga species and nitrogen molecule in metastable state are dominant in hybrid ECR plasma. The concentration of metastable nitrogen molecule increases with the microwave power. On the other hand, the concentration of excited nitrogen molecules and of nitrogen ion decreases when the microwave power is higher than 400 W.