Performance of a flat-field grating spectrometer for tender x-ray emission spectroscopy.

A flat-field grating spectrometer for tender x-ray emission spectroscopy has been developed. The grating has been coated with an aperiodic Ni/C multilayer that improves the diffraction efficiency in the range 1-3.5 keV at a constant angle of incidence. The aperiodic layer structure originates from the topmost bilayer with a larger thickness compared to other Ni/C bilayers. The performance of the spectrometer has been evaluated by measuring characteristic x rays such as the L series emitted from a Cu(In,Ga)Se2-based thin-film solar cell specimen. It is shown that the Lα1,2 x-ray emission spectra of Cu, In, Ga, and Se can be clearly simultaneously observed in the range from 0.9 to 3.3 keV, and the linewidths are 4.9, 26.1, 4.6, and 6.1 eV, respectively, corresponding to a spectral resolution of 100-300.

Multilayer-coated photodiode-based beam intensity monitor for polarization analysis of plasma soft X-ray laser.

A Mo/Si multilayer-coated photodiode detector (MP) for beam intensity monitoring was prototyped and characterized using synchrotron radiation and X-ray laser (XRL) sources in order to perform polarization analysis of a laser-driven plasma soft XRL generated from nickel-like silver plasma. At a wavelength of 13.9 nm and an angle of incidence of 45°, the s-polarization reflectance is 0.525 and shows a strong positive correlation with the transmittance, corresponding to the photodiode current generated by the MP. We succeeded in performing polarization analysis of XRL beams with a large shot-to-shot intensity variation using the MP. Thus, this MP enables shot-to-shot monitoring and delivery of high intensity beams for downstream XRL experiments.

Chemical state information of bulk specimens obtained by SEM-based soft-X-ray emission spectrometry.

Electron-beam-induced soft-X-ray emission spectroscopy (SXES) that uses a grating spectrometer has been introduced to a conventional scanning electron microscope (SEM) for characterizing desired specimen areas of bulk materials. The spectrometer was designed as a grazing incidence flat-field optics by using aberration corrected (varied line spacing) gratings and a multichannel plate detector combined with a charge-coupled device camera, which has already been applied to a transmission electron microscope. The best resolution was confirmed as 0.13 eV at Mg L-emission (50 eV), which is comparable with that of recent dedicated electron energy-loss spectroscopy instruments. This SXES-SEM instrument presents density of states of simple metals of bulk Mg and Li. Apparent band-structure effects have been observed in Si L-emission of Si wafer, P L-emission of GaP wafer, and Al L-emissions of intermetallic compounds of AlCo, AlPd, Al2Pt, and Al2Au.

A new grating X-ray spectrometer for 2-4 keV enabling a separate observation of In-Lß and Sn-Lα emissions of indium tin oxide.

A new multilayer-coated varied line-spaced grating, JS4000, was fabricated and tested for extending the upper limit of a grating X-ray spectrometer for electron microscopy. This grating was designed for 2-3.8 keV at a grazing incidence angle of 1.35°. It was revealed that this new multilayer structure enables us to take soft-X-ray emission spectra continuously from 1.5 to 4.3 keV at the same optical setting. The full-width at half maximum of Te-L(α1,2) (3.8 keV) emission peak was 27 eV. This spectrometer was applied to indium tin oxide particles and clearly resolved Sn-L(α) (3444 eV) and In-L(ß1) (3487 eV) peaks, which could not be resolved by a widely used energy-dispersive X-ray spectrometer.

Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range.

Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at 86.00° incidence evaluated by synchrotron radiation show over 5% (or 8%) in the 50-200 eV range with the maxima of 22% (or 26%-27%). Also the resolving power evaluated by a laser produced plasma source is in excess of 700 at the energy near the K emission spectrum of lithium (~55 eV) for all gratings. Moreover, the K emission spectrum of metallic Li with high spectral resolution is successfully observed with the spectrograph attached to a transmission electron microscope.

Development and performance test of a soft x-ray polarimeter and ellipsometer for complete polarization analysis.

A new apparatus for polarimetric and ellipsometric measurements based on the rotating-analyzer method in the soft x-ray region has been designed, constructed, and installed in the soft x-ray beamline (BL-11) at the SR Center of Ritsumeikan University, Shiga, Japan. It can realize the optical configurations for the complete polarization analysis by using six independently movable drive shafts. A demonstration of the capabilities of the apparatus has been performed using Mo/Si multilayer polarizers deposited by an ion beam sputtering method. It is for the first time shown that the degree of linear polarization of monochromatized light from the BL-11 is approximately 87% at 92 eV since the beamline has been constructed.

Fabrication and evaluation of a wideband multilayer laminar-type holographic grating for use with a soft-x-ray flat-field spectrograph in the region of 1.7 keV.

A multilayer laminar-type holographic grating having an average groove density of 2400 lines/mm is designed and fabricated for use with a soft-x-ray flat-field spectrograph covering the 0.70-0.75 nm region. A varied-line-spaced groove pattern is generated by the use of an aspheric wavefront recording system, and laminar-type grooves are formed by a reactive ion-etching method. Mo/SiO2 multilayers optimized for the emission lines of Hf-M, Si-K, and W-M are deposited on one of the three designated areas on the grating surface in tandem. The measured first-order diffraction efficiencies at the respective centers of the areas are 18%-20%. The flat-field spectrograph equipped with the grating indicates a spectral linewidth of 8-14 eV for the emission spectra generated from electron-impact x-ray sources.

Efficiency and polarization performance of a multilayer-coated laminar grating in the 6.5-6.9-nm wavelength region.

We applied a Mo/B4C multilayer coating to a laminar holographic grating with 2400 grooves/mm and a 1-m radius of curvature. By use of synchrotron soft x rays the multilayer-coated grating was evaluated to have diffraction efficiencies of 3.1% and 0.017% for s- and p-polarized radiation, respectively, at a 6.7-nm wavelength at a 45.35 degrees grazing angle of incidence in the +1 (inside) grating order. Thus the polarizance was estimated to be 98.9% at least. The zero-order peak was suppressed by the destructive interference caused by the groove profile.